21

A1 E1 L L1 MM ND NX NZ R1 U1 A Part no. size Applicable bore size Type C9 for axis Y-020B Y-032B Y-040B 20 25, 32 40 +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 46 16 20 25 36 M8 x 1.25 9 9 18 5 14 CDP-1 48 18 20 25 38 M10 x 1.25 9 9 18 5 14 CDP-1 Type C9 for axis 68 22 24 49.7 55 M14 x 1.5 12 16 38 13 25 CDP-3 3 x 18 l A knuckle pin and retaining rings (split pins for 40) are included.

CL

S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x

MQQ

18 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM Construction !

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 8-18-2 in vacuum environments (1.3 x 104 Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

MQQ

18 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM Construction !

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Note 1) Please consult with SMC if other specifications for surface treatment are required. 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Laser marking Hexagon wrench 8-18-2 8-18-3 3 Series CYV Model Selection 1 Caution on Design (1) The allowable load mass moment differs depending on the workpiece mounting method, cylinder mounting orientation and

Air Slide Table/Long Stroke Type Series MXY

Nil 6 50, 100, 150, 200 1 pc.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Electric actuators / Common precautions . 9 2.1 Wiring/Cables . 9 2.2 Design/Selection . 10 2.3 Mounting . 11 2.4 Handling . 12 2.5 Operating Environment . 14 2.6 Maintenance . 15 2.7 Actuator with Lock . 15 2.8 Design/Selection . 16 2.9 Handling . 16 2.10 Mounting . 17 2.11 Power Supply . 18 2.12 Grounding . 18 2.13 Wiring . 18 2.14 Maintenance . 19 3.

180

180 Angular Type Air Gripper MHY2/MHW2 Series 10, 16, 20, 25 MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHY MHW MHW -X MRHQ MA D697 180 Angular Type Air Gripper MHY2/MHW2 Series Cam Type Rack & Pinion Type MHY2 Series/Cam Type Light and compact size in small bore sizes Over length L (mm) Gripping moment Weight (g) Bore size (mm) Model (Nm) L MHY2-10D 10 0.16 70 71 MHY2-16D 16 150 0.54 84 MHY2-20D

MRQ

20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body

ZPT/ZPX

Characteristics Base resistance Acid resistance Weatherability Ozone resistance Abrasion resistance Waterproof Solvent resistance (Benzene, toluene) Oil resistance benzol Oil resistance gasoline Operating temperature range (C) Material Durometer HS (5) NBR 0 to 120 X 50 X X X 50 Silicon rubber 30 to 250 X X X X X Urethane rubber 0 to 60 60 X X X X X 60 Fluoro rubber 0 to 250 X 50 EPR 20 to 150

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ConlrolNet and CANopen protoclos, with 64 l/O t\r12ll\,18 connecbr slection available (t.

Process Pump

-1S19 1S25 10 204 255 120 4 x 9 AIR SUP (P1) Rc, NPT, G 1/4" FLUID OUT With nut 249 A 8 8 195 157 118 91 51 18 FLUID IN With nut AIR SUP (P2) Rc, NPT, G 1/4" Tube Size Applicable for Nut Size (Tube size can be altered, using a reducer even within the same nut size.)

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size A B C D E F H K L M N Model Note) Note) Q R Q R Q R S Q R S U 22 (23) 45 (52) 44 43 58 40.5 46.5 99 43 66 83 13.5 28 64 31 6.5 12.5 27 14 12.8 M4 4.5 1/8 VCL21 22 (23) 46 (53) 44 44 58 41.5 46.5 99 44 66 86 18 36 67.5 31 8.5 12.5 27 18 12.8 M4 6 1/4 24 (25) 56.5 (63.5) 46 54.5 60 52 48.5 101 54.5 68 99 22

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

mm ZSE ISE ZSP 18 9.6 PS 20.8 ISA PSE In case of PSE54-M3 IS Application examples Application examples ISG Pads can be directly mounted.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4 148 137.5 112.5 18 5 148 137.5 123 12.5 6 160.5 150 133.5 13.5 7 173 162.5 144 14.5 8 185.5 175 154.5 15.5 9 198 187.5 165 16.5 10 210.5 200 175.5 17.5 L1 L2 L3 L4 L1 L2 L3 L4 31 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-

JXCx-OMX0009

(7) Setting parameters . 18 (8) Setup of the operation parameters . 19 (9) Test run . 19 3.

VFR

0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31 5.3 18 [9.7]

Low Friction Cylinders Series MQ

8 16 10 9 A + Stroke Individual -X 20 20 10 20 10 10 25 20 18 36 12 10 30 22 18 36 12 10 40 28 22 44 12 14 1179 Series MQQ Accessory Dimensions Rod end thread adapter Rod end nut d NN Rod MM D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.