Table of Contents

Material Polyolefin (Equivalent to UL-94 standard V-0) 0 20 0 20 40 60 Note) The color of all inner tubing is black.

Compact Rotary Actuator Series CRQ2

15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !

Mechanically Jointed Rodless Cylinders

Load Weight Allowable Moment MY3A, MY3B/m1 MY3A, MY3B/M1 MY3A, MY3B/M2 MY3A, MY3B/M3 40 30 80 200 200 50 100 40 30 20 100 10 50 40 30 50 40 30 20 5 4 3 10 20 20 Load weight (kg) 63 q Moment (Nm) Moment (Nm) Moment (Nm) 5 4 3 63 50 40 63 63 10 10 2 50 50 50 t w e r 5 4 3 2 5 4 3 1 32 40 40 40 0.5 0.4 0.3 1 25 2 2 32 32 32 20 0.5 0.4 0.3 1 0.2 1 25 16 25 25 20 0.5 0.4 0.3 0.1 0.5 0.4 0.3 0.2

Table of Contents

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

SYJ300/500/700

VFN 4-4-43 44 Series SYJ700 Manifold for Internal Pilot Type Type 20/Type 21 How to Order Applicable solenoid valve SYJ712--01 SYJ712M--01 SYJ722--01 SYJ722M--01 Applicable blanking plate assembly SYJ700-10-2A A port 1/8 SS3YJ7 20 05 A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

20 stations 20 R Port Rc (PT)1/4 Note) If there are more than 6 stations in type 20 or more than 9 stations in 21 type, supply air to both sides of "P" port and exhaust air from both sides of "R" port.

Rotary Table/Rack & Pinion Style Series MSQ

200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ50 MSQ7A MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement

CLQ

Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction

CLQ

Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 t Applicable bore size (mm) Applicable snap ring 20 25 32, 40 50, 63 80 100 Part no.

Rotary Table/

30 40 MSQA10 (High precision type) 70 60 0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type)

Compact Cylinder with Lock Series CLQ

Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N

NAAMS Standards Compliant

mm offset: Plain 19 250.03 38 250.03 A A M8 x 1.25 R27 M8 x 1.25 8.5 R50 570.05 37 12.5 20 8.5 22 22 12.5 R7 R27 22 20 22 R7 [mm] [mm] Model NAAMS code A Weight [kg] CKZ-63A001 ACA001M 135.0 1.2 CKZ-63A002 ACA002M 165.0 1.4 CKZ-63A003 ACA003M 195.0 1.6 CKZ-63A004 ACA004M 225.0 1.8 CKZ-63A005 ACA005M 255.0 2.1 CKZ-63A006 ACA006M 285.0 2.3 Model NAAMS code A Weight [kg] CKZ-63A013 ACA013M

Series MXP Precision Air Slide Table

0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16

180° Angular Style Air Gripper Series MHY2/MHW2

point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHW2-25D MHW2-40D 160 50 Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 120 Gripping force (N) Gripping force (N) 0.5 0.5 100 30 0.4 0.4 80 0.3 0.3 0.2 20 60 MHZ 0.2 40 10 20 MHF 0 20 40 60 Gripping point L (mm) 100 80 80 100 120 140 160 0 20 40 60 Gripping point L (mm) MHL MHR Confirmation

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 15 0.4 0.3 150 0.4 0.4 MHK 40 10 0.3 0.3 100 0.2 0.2 0.2 MHS 5 20 50 MHC 0 0 40 Gripping point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHT MHW2-25D MHW2-40D 160 50 MHY Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 Gripping force (N) Gripping force (N) 120 MHW 0.5 0.5 100 30 0.4 0.4 80 MRHQ 0.3 0.3 20 60 0.2 0.2 Misc. 40 10

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

-40D 160 50 MHY Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 Gripping force (N) Gripping force (N) 120 MHW 0.5 0.5 100 30 0.4 0.4 80 MRHQ 0.3 0.3 20 60 0.2 0.2 Misc. 40 10 20 D0 20 40 60 Gripping point L (mm) 100 80 20 40 60 Gripping point L (mm) 80 100 120 140 160 0 20Confirmation of Gripping Point MHY Step 2 MHW 200 60 H H 50 Overhang H (mm) Overhang H (mm) MHW2-20D 150 MHW2-25D MHW2

Direct Solenoid

oN Opd.tion: 360 it60 131) 130 360 360 130 150 150 r5n 150 1 1 0 150 150 i $'q (46.C) (4.5) 0,177 t'r.5) (10) 0.39,1 ool (5) (5) .) 0346 19.81 0.543 03.31 03.q M6di4 air {lub.i*td d 0ll.16}, .nd non.flflm.blo mn.torlci non{orcs!.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly 13 14 15 NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 1233.

MHY2/MHW2

0.1 0.1 5 L L 0 20 30 50 60 Holding point L (mm) 40 70 0 30 40 60 70 Holding point L (mm) 50 80 90 2.8-4 180 Angular Gripper Series MHY2/MHW2 MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7MPa Pressure 0.7MPa Pressure 0.7MPa 250 20 0.6 80 0.6 0.6 Holding force (N) Holding force (N) Holding force (N) 200 0.5 0.5 0.5 60 15 0.4 0.3 150 0.4 0.4 40 10 0.3 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40