Large Bore Compact Cylinder Series CQ2

protrusion from cylinder body Can be mounted on four sides CS1 1in = 25.4mm CQ2 Overall length mm Weight kg (lb) Series 180 219 16.6 (36.6) CQ2 200 226 20.6 (45.4) 180 30.4 (67.0) 385 CS1 200 39.5 (87.1) 390 Comparison with 100mm stroke and rod end male threads Variations Applicable auto switch models Rod end configuration Standard strokes Size Type Action Series 10 20 30 40 50 75 100 125 150

Series MXP Precision Air Slide Table

Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100

JXCx-OMT0061CN

) 1 (H) 0 ON ON 2 OFF OFF ON OFF, 3 OFF 4 READY 0 10.1.2 (1) [IN]( )[] (P.39) 5 ALARM 6 7 8 ONOFF 9C () D E 10.1.2 F (1) [IN]( )[] (P.39) 1 F0 L 2 F0 H 70 L 9.5.1 (P.30)RWw1 Sub Function 80h OR() Sub *3 10.1.2 (1) [IN]()[] (P.39) 3 Function F8 H 9.5.1 (P.30) 00h*3 10.1.2 (1)[ ](P.40) 70 L 4 Address F8 H H= L= 44 - (1) [IN]() PLC RWr RWr bit 0 10.1.2 (1)[ ]

Prevents Micro-Bubbles

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 Sensor (Breathing port) R VXA 2-Q VN PB LVC G H PA C LVA SMC A B LVH N E LVD J B LVQ (F) LQ LVN TI/ TIL PA (mm) Dimensions PAX A B C D E F G H J K L M M5 x 0.8 R N Q Model LVC2 LVC3 LVC4 LVC5 LVC6 30 30 54.5 44 11 79 28.5 13 4 20 37 3.5 23.5 M3 x 0.5 PB 36 47 79 56 16.5 106 43 17.5 7.5 34 46 5.5 39

9.8

Option ZS-39-5G ZS-39-B ZS-39-D ZS-39-R ZS-39-01 ZS-39-N1 ZS-39-N2 Lead wire with connector (with connector cover) (5 cores, 2 m) Panel mount adapter Panel mount adapter + Front protective cover DIN rail adapter Front protective cover R1/8 piping adapter NPT1/8 piping adapter Made to Order 1 Series ZSE10(F)/ISE10 Specifications Model ZSE10 (vacuum pressure) Rated pressure range ZSE10F (compound

HRX-OM-R026

5.17.1 Pump operation mode . 5-39 5.17.2 How to check the pump operation mode and value setting . 5-39 5.18 Warming up function . 5-42 5.18.1 Warming up function. 5-42 5.18.2 Warming up function setting and checking . 5-43 5.19 Alarm buzzer sound setting. 5-45 5.19.1 Alarm buzzer sound setting . 5-45 5.19.2 Alarm buzzer sound setting and checking. 5-45 5.20 Alarm customizing function . 5

10

frequency [c.p.m] Weight [g] Model Bore size [mm] MHL2-10DZ 60 20 56 76 280 MHL2-10D1Z 40 40 78 118 355 10 MHL2-10D2Z 60 96 156 430 MHL2-16DZ 60 30 68 98 525 MHL2-16D1Z 40 60 110 170 725 16 MHL2-16D2Z 80 130 210 845 MHL2-20DZ 60 40 82 122 940 MHL2-20D1Z 40 80 142 222 1335 20 Symbol MHL2-20D2Z 100 162 262 1520 Double acting: External grip Double acting: Internal grip MHL2-25DZ 60 50 100 150

IDU/IDF

B 171 217 284 171 217 284 171 217 284 171 217 284 171 217 284 199 217 284 171 217 284 171 217 284 171 217 284 171 217 284 199 217 284 G H Weight (kg) 33 37 46 30 34 43 39 44 53 39 44 53 54 59 68 60 66 78 38 43 52 50 55 64 54 59 68 66 71 80 76 82 94 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3.4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3.4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3.4 IDF-TR500-1 IDF-TR500-2 IDF-TR500

21

M9BW With auto switch CDM3 L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil S n Mounting Bore size 2 pcs. 1 pc. n pcs.

VS7-6

Unit n: Station L: Dimensions n L L1 L2 Equation L1=43n+64 L2=43n+76 L3 297 340 383 426 469 512 555 598 641 L3=43n+211 2 150 162 3 193 205 4 236 248 5 279 291 6 322 334 7 365 377 8 408 420 9 451 463 10 494 506 ( ): In case of direct manual override style.

Modular F.R.L. Unit

Optional specification Note 2) With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B 176 179 216 218 B 114 156 159 196 198 B 150 153 190 192 B 151 154 191 193 AC20C AC25C AC30C AC40C AC40C-06 10 F.R.L.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Motor cable: Counter axis side Lock cable: Counter axis side Encoder cable: Axis side (30) L 37.4 LE-CSNA LE-CSNB I/O connector LE C SNA 37.2 52.4 Controller type I/O connector (LECSA) I/O connector (LECSB) SNA SNB 39 39 Regeneration option 6 Mounting hole LA LEC MR RB LEC (12) 144 12 (6) 15 Regeneration option type 032 Allowable regeneration power 30 W 12 Allowable regeneration power 100

CLA

675 (3000) <150 450 (2000) 040 225 (1000 ) o 14.5(01) 29 (0.2) 43.5 (0.3) 58 (0.4) 72.5 (0.5) PSI (MPa) IN=0.101972 kg, lMpa=10.1972 kg/em, Lock operation options Spring-air Spring Air pressure Locking lock-up lock-up pressure lock-up 1.0mm D.Smm S ioppageaccuracy Operate High accuracy -High accuracy towards .Retainlng force 'Retaining force safety ride interchangeable interchangeable (exhaust

Compact and Lightweight

Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 250 100 250 100 100 100 Vacuum pressure Vacuum pressure ZL Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 200 80 200 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] ZH ZH Air consumption 150

Rotary Cylinder Series MRQ Size: 32, 40 1

The standard angle adjustment range of 5 (one side) is changed to in this type. + 5 95 (mm) E Mounting screw Y Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)

Plug-in/Plug Lead: Single Unit

Note2) For thread standard, refer to page 2-6-39.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note 2) For thread standard, refer to page 2-5-39. Enclosure Nil B Side ported Bottom ported(1) Note) Dust-protected Dusttight /Low jetproof type Note) It is not necessary for plug lead type.

ZQ-OM01301

ZQ-OM01301-A Maximum vacuum release flow rate Vacuum release flow rates in product specifications and according to the V port size [L/min (ANR) ] Supply pressure error V Port [MPa] ZQ05A ZQ07A ZQ10A ZQ000A Size Common Individual Common Individual Common Individual Common Individual PD PD PD PD PD PD PD PD 3.2 0.1 16 14 11 23 0.2 26 23 19 38 0.3 39 31 35 28 29 22 52 43 45 39 47 41 38 35 66

ZQ-OM01401

) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48