IDG

P P1 or Step 2 Step 3 Model selection based on corrected outlet flow rate HA Review operating conditions or increase size. YES In the case of IDG30 and IDG30M (with the element in the initial state), P P1, therefore proceed to Step 7 .

3 Port Solenoid Valve Rubber Seal Series SY100 1

For driving air operated valves for fluid control N.C N.O N.C N.C Air operated style fluid control valve Vacuum valve Vacuum pad A, B 1(P) A, B 1(P) A, B 1(P) A, B 3(P) 3(R) 3(R) 3(R) 1(R) Vacuum releasing air Atmospheric pressure or micro pressure The characteristic values shown in the catalog are representative values, not warranting the performance. 4-3-1 2 Series SY100 Precautions Be

VEX1

Refer to p.5.3-1 for details. 5.1-36

3 Port Solenoid Valve Rubber Seal Series SY100

V100 Porting specifications Bracket SY Nil: For manifold P: For body ported type to P, R, A port Nil: Without bracket F: With bracket SYJ 3 port VK Type of actuation 1 2 Normally closed Normally open VZ VT P piping specifications only.

One-touch Fittings Series KQ2

p A .

Digital Flow Switch Series PFA For Air Series PFW For Water

P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200 P P P 50 to 500 P P P P 150 to 3000 P P P P 300 to 6000 P P P P 6000 to 12000 Series variations For Water Flow rate Remote type Output specification Port size (Rc, NPT, G) Integrated measurement display type Display unit Sensor unit Switch output 3/8 1/2 3/4 range l/min PFW31m 30m 32m PFW704 720 740 PFW504 520 540 P P

EX120/121/122

1 End plate (Output side) P. 1678 SI unit Input block e Waterproof cap P. 1672 o Power cable with connector P. 1677 e Waterproof cap P. 1672 w Power cable with connector (for SI unit) P. 1672 !

Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Symbol Output specifications Part no.

Thermo-chiller

9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17 Communication Functions. p. 18 Options. p. 19 Optional Accessories. . p. 20 VCooling Capacity Calculation Required Cooling Capacity Calculation. p.

CRBU

Refer to p.1.2-7 for further information.)

Thermo-con

50 or less Sulfuric acid ion (SO42) [mg/L] 50 or less p p p p p Acid consumption amount (at pH4.8) [mg/L] 50 or less Total hardness [mg/L] 70 or less [mg/L] 50 or less Calcium hardness (CaCO3) Ionic state silica (SiO2) [mg/L] 30 or less p p p p p p [mg/L] 0.3 or less Iron (Fe) Copper (Cu) [mg/L] 0.1 or less Should not be detected.

VS7-6

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

AC Servo Motor Driver (CC-Link Type ）

` p 0 0 0 1 1 SOH DC1 !

Manifold Specifications

sides of 1(P) port and exhaust air from both sides of 3 and 5(R) port.

VKF300

P-69.5 (JT)

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

3 Port Solenoid Valve/

M12 connector pin number 1(P) 1(P) Safety limit switch Made by Rockwell Automation Symbol Pin Numbers (Built-in switch 3N.C.)

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Stainless Steel One-touch Fittings Series KG

(mm) Weight (g) P Part No.

30

5 P. 12 Metric Inch P. 6 P. 13 Metric R thread G thread P. 3 P. 16 P. 10 Inch Hexagon Socket Head Male Connector KQB2S Union Tee KQB2T Bulkhead Connector KQB2E Metric Inch P. 5 P. 12 Metric R thread G thread Metric Rc thread G thread P. 7 P. 18 P. 3 P. 16 P. 13 P. 10 Inch Inch Straight Union KQB2H Union Y KQB2U Extended Male Elbow KQB2W Metric Inch P. 3 P. 10 Metric Inch P. 5 P. 12 Metric