Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

Output block / Power block

The Power supply can be connected only when the SI unit (EX250, EX260, EX500-Q 02 series) and Power block are side by side. Power supply connector (No.0) and power supply connector (No.1) are connected together internally.

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

Vacuum

(station 4) Noter Order lett to right (station 1-10) facing tension bolt & filter cover 52 IIIZM $eri Manifold Dimensions inch (mm NZZM05-T068 ) t n: station L1 1 .73 @4\ 2.36 (60) 2.99 (76) 3.62 (92) 4.2s (108) 4.88 (124) 5,51 (140) 6.14 (156) 6.77 (172\ L2 2.20 (56) 2.83 (72\ 3.46 (88) 4.09 (104) 4.72 (1201 s.35 (136) 5.98 (1s2) 6.61 (168) 7.24 (18r'.

Speed Controller: Standard Type Large Flow In-line Type AS Series

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B 13-3-12 12 Series ZR Large Size Vacuum Module: Ejector System Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Specifications Quick response: 10 mS Vacuum pressure switch part no.

VFRA3000

5 Port Air Operated Valve Series VFRA3000 Model Configuration Port size Rc(PT) Effective area (mm2) (Cv) Pilot port size Rc(PT) Weight (kg) Valve model 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3111-03 VFRA3211-02 2 position double 0.71 1 8 VFRA3111-02 2 position single 0.61 1 8 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3211-03 VFRA3311-02 3 position closed center 0.72 1 8 1 4 3 8 34.2 (1.9) 36 (2.0) PA,

Manifold Specifications

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod

Digital Flow Switch (Manifold type)

The default setting is temperature output. 4: IO-Link is only available in the display integrated type. 5: When without temperature sensor (symbol: L, L2) is selected, temperature output and setting cannot be performed. -15No.PF-OMW0004-B Table 2. Return unit flow switch unit specification Type Symbol Instantaneous flow Accumulated flow Temp.

Compact Type

When disassembling and reassembling the cylinder, contact SMC or refer to the separate instruction manual. l2 l1 Approx. 0.5 or less l1 (mm) 5 5 l2 (mm) 8.4 9.5 CXSJ6 CXSJ10 Warning Piping 1. Take precautions when your hands are near the plate and housing.

HRX-OM-Z002

HRLE050 200V N L HRLE090 200V L3 L1 L2 Fig. 3-12 Cable wiring (200V) 3.3 Installation Procedure HRLE Series 3-16 HRX-OM-Z002 Chapter 3 Transport and Set Up 400V L1 L2 L3 Fig. 3-13 Cable wiring (400V) HRLE Series 3.3Installation Procedure 3-17 HRX-OM-Z002 Chapter 3 Transport and Set Up 3.3.4 Preparation and wiring of communication cable Be sure to turn OFF the breaker of the facility power

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

ITV

IITV20 02 5 Example AV Valve stations Electro-pneumatic regulator Blanking plate assembly ITV1030-311S-X26 2 2 stations P398020-13 AU 8 8 stations Electro-pneumatic regulator LOCK UNLOCK RESET SET AF ITV2050-212S-X26 E SMC REGULATOR OUT port size ITV1000/2000 P 02 03 1/4 3/8 LOCK UNLOCK RESET SET MPa AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

VVXA21/22

L1 L2 384 372 494 476 348 336 448 430 312 300 402 384 276 264 356 338 240 228 310 292 204 192 264 246 168 156 218 200 132 120 172 154 96 84 126 108 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Air Cylinder

Knock pin hole Clevis Pin x Material: Cast iron 80, 100 L2 L1 Material: Carbon steel (mm) Part no.

AC Servo Motor Driver (SSCNET /H Type)

For LECSS2-T, set [ms/div] and [Number of collection Div] to the horizontal axis (time axis). [ms/div] [Number of collection Div] will be [Measurement time]. Click of [ms/div] and set the DiV number. The unit ms of [Number of collection Div] is 1000ms1s. Click of [Number of collection Div] and set the time.

AC Servo Motor Driver (Pulse input type)

For LECSB, set [ms/div] and [Number of collection Div] to the horizontal axis (time axis). [ms/div] [Number of collection Div] will be [Measurement time]. Click of [ms/div] and set the DiV number. The unit ms of [Number of collection Div] is 1000ms1s.

HRX-OM-W002

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

HRX-OM-X071

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.