ZP3

ZP3 T 04 B N A5 With adapter From p. 149 p. 160 From p. 162 ZP3 T 04 B N J 3 B5 With buffer From p. 152 p. 161 p. 164 q w e r t y u Bellows type q Vacuum inlet direction w Pad diameter t Buffer stroke 04 4 06 6 08 8 Nil Pad unit T Vertical Y Lateral Stroke [mm] Buffer specification J JB K 3 6 10 15 20 e Material r Buffer specification N NBR S Silicone rubber1 U Urethane rubber F FKM GN Conductive

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

7

A B M G1/2 IN OUT 2 x M4 x 0.7 Thread depth 8 2 x P Port size L K I F 18 (D) J Conduit U E 280 C (42) 45 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier T A B IN OUT M 2 x P Port size L K F I (D) J (mm) Model Conduit terminal Conduit Grommet Electrical entry Port size P A B C E F I J K L T V 1/4, 3/8 1/2 88 (93.5) 22.5 30 D M T 55.5 (61) U T 49.5 (55) U U 50 20 4.5 5

ISE20A is UL/CSA, CE and RoHS compliant, with an IP40 enclosure rating.

ISE20A is UL/CSA, CE and RoHS compliant, with an IP40 enclosure rating.

IR1000/2000/3000

P-84.5 (YG)

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

Air Cylinder

Grease pack part number: GR-S-010 (10 g) CS2 Basic (B) P Bore size Stroke 20 25 20 CM2B P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 Width across flats B1 H1 H2 32 to 40 P Width across flats KA E (Head side pressure port) I G G NA D Q MM NN AL N N F K H A P QY NA ZZ + Stroke S

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [L] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Pressure switch Thermometer Pressure control equipment Control circuit Solenoid

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

Battery-less

How to Order LEFS 25 H R B E 200 C N K R1 CD17T q w e r t u y i o !0 !1 !

Series KDM Rectangular Multi-connector

(Panel mounting hole: See Dimensions.) 2 r o t c e n n o C h c n I c i r t e M 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K e u l B 2 3 / 5 3 0 P M D K 4 4 0 P M D K r o t c e n n o C g u l P d e R 4 / 1 7 0 P M D K 6 6 0 P M D K 6 1 / 5 9 0 P M D K 8 8 0 P M D K 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K r o t c e n n o c t e k c o S ) g n i k c a p h t i W ( e u l B 2 3 / 5 3 0 P M D K 4 4

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc. P tight screw (4 x 14), 2 pcs. (3)Intermediate support bracket EX600-ZMB1: For direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

LJ1H

X70 Stroke 2 F P K A 1 2 LJ1H20 Vertical Mount Specification Dust seal specification Motor specification Refer to Table below.

LX

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

Possible to transfer a workpiece at low-speed.

10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.