Modular Design with Uniform Body Style

S N F A F N N M J M J S R R K C B C B V2 V1 Q1 Q1 V1 V2 Q2 Q1 Q1 K IN OUT OUT IN EXH U U EXH P3 (Port size) P2 G Clearance for maintenance (Pressure gauge port size) Drain E P3 (Port size) P2 G Clearance for maintenance (Pressure gauge port size) Drain AC40-V-D to AC40-06-V-D A N S N F M J R B C V2 V1 Q2 Q1 Q1 OUT IN 2 x P1 (Port size) U EXH E P2 P3 (Port size) G Clearance for maintenance

SMC Pneumatic Clean Series

2 B 20 100 H N H7B 21 C D B M 2 B 20 100 H N H7B Nil Built-in magnet No Number of auto switches D With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

U D B M CE-compliant SI unit part no.

C85

Nil (Example) C73C 5 m Z (Example) C73CZ 3 m L (Example) C73CL None N (Example) C73CN Solid state switches marked with are manufactured upon receipt of order.

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M6 MB M5 M6 M8 M5 M6 M8 M4 Ms M6 ~.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

9 g V _E t L ] c : 1 1 . 8 1 ( 3 0 0 ) H:23.62 (600) 0.55 (1 2.72 Lead wire lenqlh tr r . r , . , , , i & , : , ' M Type Plug Connector (M) : iWJ3240O-OMOO-M5 L Type Plug Connector (L) : tWJ3240 )-OLCU-Ms @ Base Mounted TUp" with Suhplatel3 Positiln Grommet (G) : NVJ3340O-OGO-M5, WJ34/roO-OGO-M5, NVJ3S4oO-OG.M5 (H) : WJ3340O-OHO-1'5, NVJ344OO-OHO-M5, NVJ3540O-OH-M5 , , , M Type Plug Connector

Compact 5-Port Solenoid Valve

2 1.5 m 3 3 m SI unit output polarity, End plate type (S6m) Refer to page 63.

CQS

2 pcs. 1 pc. n pcs.

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 50 + 45 (n 2) 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 60 + 45 (n 2) 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

: M-5P) 30 4-M6 x 1 4-M5 x 0.8, depth 7 Bottom hole diameter 5.1 W 32 0.05 D B 8 0.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting base side B D 16.5 14.5 Across AA MXP16-30B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 For rail mounting 8 2-M2 x 0.4, depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8, depth 7 20 20 L (mm) Model M MA W H S Z J V K L MXP16-20B 40 30 65 58 20 102 93 82

CL

Lead wire length symbols: 0.5 m Nil(Example) C73C 1 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 9-2-16 for details.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Z 0.5 46.5 50 37 M 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 2 x M6 x 1 thread depth 13 5 (With stroke adjuster at retraction end) N 1 x F 2 51 (With stroke adjuster at extension end) 25 F 30 30 FF 58 76 46 73 22.5 6 x M5 x 0.8 thread depth 8 6 2 N x M5 x 0.8 thread depth 10 Stroke adjuster at retraction end 6 18 46.5 (With stroke

3 Port Solenoid Valve Series SYJ300/500/700

H -M5 M5 x 0.8 (A port) 14 5 10 2-3.2 (For mounting) 26.4 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] (Light/surge voltage suppressor) 41.5 [48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (W0): SYJ34-W0-M5 Approx.

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

Air Fittings & Tubing

<M5, M6> D P M Part No.

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

MGP

M L MGP 25, 50, 75, 100 16 MXS 20 25 32 40 50 63 MXQ MGP 25, 50, 75, 100, 125, 150, 175, 200 M L MXF MXW 80 100 M L MGP 50, 75, 100, 125, 150, 175, 200 MXP OUT(N) IN(N) Theoretical Force MG (N) Rod dia.

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s 3 u i ni n w im k C ra c l o Mi 6 3 8 ax n o 1 ti M ta ro e m g u m n ni Mi 180 e ra C s l i o w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock

Rotary Table/

Standard type For 90 For 180 Positioning pin hole Positioning pin hole Counter-clockwise 3 3 A port A port A port 3 22.5 3 22.5 84 e 96 ng e 3 ra ng on ra ti B port n ta 3 90 tio 4 ro 7 ta m 1 Clockwise ro e e u s i g m w 3 m 6 k C n c l o ni a u 8 r Mi im 3 n 1 o ti e ax ta ng ro m M u ra m ni Mi 180 n tio e C s ta l i o w c k ro m mu xi Ma Positioning pin hole Positioning pin hole Position