PF-OMN0011_C

PNP 1~5 V F PNP 4~20 mA G NPN H PNP J 1~5 V 1~5 V K 4~20 mA 4~20 mA OUT2 C (1) T V + (2m) N M L/min L G gal/min gal F gal/min gal J L/min L GFJ : 1[L/min]0.2642[gal/min] 1[gal/min]3.785[L/min] []=9/5[]+32 15 V PF3W5--1(T) -9No.PF-OMN0011CN-C C (1 ) T V -10No.PF-OMN0011CN-C / ZS-26-B ZS-26-C ZS-26-01 ZS-40-W 2 m (e-con) ZS-28-CA-4 1 ZS-40-Y 10 -11No.PF-OMN0011CN-C

SRP

40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow

SRP

40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.

IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) IR1000-01 IR1000-01 IR1000-01 Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa 0.5 0.204 0.2 Set pressure P2 MPa Set pressure MPa Set pressure MPa 0.4 0.202 0.15 Setting point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 40 20 80 60 100 140 120 0 50 100 200

COQ2BP

[I (mm) c l BonI.1iIi (mm) A L[) R N X Y LG L 0 ~ t::;r H LH L1 . 50s 107 .2 15 39 18 9 5 Ml0Xl.S 14.7 43.5 MSl(l .25 14 M8x 1.25 B 15 46 18 Ml0xl.5 16.2 43.5 Ml0xl .5 18 9 11 5 Ml0Xl.5 63 112.7 M12xl .75 22 M12xt.75 19.5 11 53.5 13 7 MI6X2.0 59 20 21 80 133 .5 Rod Side Flange: COQ2FP 0-0 OM-DO 4-oFO 40 Thread d Ih A SpeCIal cap bolt 4-N . rBote size A L 0 R N FD FT FV FX F2 Ll H C !

100

10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow rate Air consumption

ZR

Adapter D 19 31 19 31 H SET L H SET L 4 Suction filter Suction filter Vacuum pressure switch Pressure setting trimmer Vacuum pressure switch Pressure setting trimmer Individual spacer Individual spacer 28 52 28 52 20 31 31 32 74 44 63 Release valve (SOL.c) Vacuum valve (SOL.a) Release valve (SOL.c) Vacuum valve (SOL.a) Non-locking push type Manual override Vacuum valve (SOL.b) Vacuum valve

ZL3-OM00601

(mg/m3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 point() 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000 3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 3.3.2 Air pressure 1) Operation with a pressure exceeding the maximum operating pressure leads to breakage of the product.

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

Vacuum Gripper

TQ1230001-OM101-D 2.

KK/KK13

urethane hose with fiber reinforcement) Applicable hose H H D M L L (mm) Applicable hose I.D.

Round Type Hydraulic Cylinder

Cotter pin 4 x 20 l (2 pcs.)

S Couplers Series KK/KK13

urethane hose with fiber reinforcement) Applicable hose H H D M L L (mm) Applicable hose I.D.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

from the D side.

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For