LEH_C

DIN D DIN 16 16 1DIN 2 0 2 0 I/O (m) L ) L ) 25 25 ) 10,16,20,25 32 32 1.5 1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20

Vacuum Pad

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

VQ7-6/7-8

side R side L side R side D side 40 (53) D side (2n-Rc1/8) 17 2 82.5 34 14 154 (single) 82.5 4n-Rc3/8, 1/2 175.5 (double) 154 (single) 59 62 94 175.5 (double) 180.5 175.5 (3 position) 180.5 175. 5 (3 position) Bottom port drawing 171.5 183.5 139 14 12 PA PB P 40 (41.5) 67 80.5 R2 R1 38 (27) 4-Rc1/8 5 1 3 (pilot pressure exhaust port) SMC 32 (35) 35 32 (35) 6-Rc1/2, 3/4 35 L: Dimensions Formula

JXCx-OMU0004

SW (SW , ) FG ( ,) 7 LED SET 114 15 MANU AL 16 1 SP EED 16 1 16 1 ACCE L 16 1 CN1 CN2 CN3 CN4 I/O I/O *1 12 No.JXC-OMU0004-A h k n L 2.02.4[mm] W 0.50.6[mm] L W 3.3 1 2 DIN LECP1 (LECP1D-) 13 No.JXC-OMU0004-A 3.4 1 LECP1DINLECP1D 2M4 DIN A DIN ADIN 2 M4 M4 ,SG 14 No.JXC-OMU0004-A D (100 ) 2mm 2 0V D 3 40 30mm 60mm ()60mm 0mm 16 LEH 10mm 25 () 30mm 60mm

MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 2020, 30, 40, 50, 75, 100 125, 150, 175, 200 Data MGQ 20, 25 M L M L MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 OUT (N) IN (N) Theoretical Output (N) Bore size (mm) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Made to Order Specifications (For details, refer to

RZQ

34 46 33 45 50 29.5 40 33.5 44 34 44.5 31 41.5 32.5 43 36.5 47 35.5 46 RB 63 33 43 37 47 37.5 47.5 34.5 44.5 36 46 40 50 39 49 J D-A7H,A80H D-F7,D-F79F D-J79,J79W D-F7W D-F7BAL D-F7NTL DD-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-M9V D-F9WV D-A7,A80 Bore size (mm) -X 20U U U U U U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 Data 40 44 35 36 42 38.5 41.5 37.5

3 Position Cylinder Series RZQ

A B A B A B A B A B A B 32 29 39.5 30 40.5 26 36.5 31.5 42 24.5 35 27.5 38 27 37.5 40 46 33 45 34 47.5 30 42 35.5 43.5 28.5 40.5 31.5 31 43 27 39 50 46 47 35.5 43 36.5 48.5 32.5 41.5 38 44.5 31 44 34 33.5 29.5 40 63 49 40 50 39 46 41.5 51.5 36 44.5 37.5 47.5 34.5 47 37 33 43 D-A7H,A80H D-F7,D-F7F D-J79,J79W D-F7W D-F7BAL D-F7NTL D-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C

Thermo-chiller/Rack Mount Type

min)/0.34 (at 23 L/min) Rated flow (50/60 Hz)6 [L/min] 15/23 Flow display range20 [L/min] 5 to 40 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option DM) Particle filter nominal filtration rating19 [m] 5 Bypass valve19 Installed Tank capacity [L] Approx. 5 Outlet, Return port size Rc1/2 Drain port

CE

Bore size (mm) Stroke (mm) Bore size (mm) Manufacturable stroke range Applicable auto switch Note D25 50 100 75 125 150 175 200 250 300 400 500 12 25 to 150 D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W D-F7V D-F7/J79 D-J79C D-F7WV D-F7W/J79W D-F7BAL/F7BAVL D-F79F/F7NTL Switch mounting screw (M3 x 0.5 x 8l ) Square nut 12 20 -X BQ-1 20 25 to 300 32 2025 to 400 40 25 to 600 32 40 50 63 Switch mounting

CE

Bore size (mm) Stroke (mm) Bore size (mm) Manufacturable stroke range Applicable auto switch Note D25 50 100 75 125 150 175 200 250 300 400 500 12 25 to 150 D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W D-F7V D-F7/J79 D-J79C D-F7WV D-F7W/J79W D-F7BAL/F7BAVL D-F79F/F7NTL Switch mounting screw (M3 x 0.5 x 8l ) Square nut 12 20 -X BQ-1 20 25 to 300 32 2025 to 400 40 25 to 600 32 40 50 63 Switch

ISO Standard Hydraulic Cylinder

2 (n 4) 2 D-M9/M9W 20 + 40 85 + 40 95 + 40 100 + 40 105 + 40 115 + 40 "n" pcs.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MDHR3-15 MDHR3-10 H L H When auto switch D-M9V is used When auto switch D-M9 is used When auto switch D-M9V is used Max. Protrusion of Auto Switch from Edge of Body: L, H Max. Protrusion of Auto Switch from Edge of Body: H (mm) (mm) D-M9V D-M9V D-M9N Auto switch model Auto switch model L H 1.3 The auto switch will not protrude in the case of D-F9. H 2.3 12-5-26

Support Guide/11-LEFG Series

(72) 39.4 28 3.5 3H9 (+0.025 0 ) depth 3 (37) A (Table traveling distance) 36 L 7 7 27 40 40 33 (40) 21.7 20 n x 3.5 Vacuum port M5 x 0.8 x 5 34 B D x 100 (= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180 11-LEFG16-S-150 244 157 230 11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300

100

30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow rate Air

MXH Series Compact Slide

D-A9 D-F9 D-F9 W B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

Industrial Filters

74, 105 EM100 All types of gases/liquids, High-temperature fluids P.42 5, 10, 20, 40 74, 105 EM500 Stainless steel 316 21 Filter Selection by Main Application FGD/FGE/FGG type FGD type FGE type FGG type Applications and Applicable Element : Recommended : Can be used : Cannot be used Applicable filter model F G D C F G D E F G D T F G D F F G E S F G E L F G E T F G G S F G G L Fluid name

48

[mm] Auto Switch Mounting Height [mm] D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV A B 12 (10 x 2) 10.0 2.5 16 (12 x 2) 10.0 2.5 20 (16 x 2) 9.5 6.0 25 (20 x 2) 9.5 6.5 32 (25 x 2) 9.5 8.5 40 (32 x 2) 8.5 16.5 50 (40 x 2) 8.5 23.0 63 (45 x 2) 8.5 27.5 80 (56 x 2) 8.5 41.5 100 (71 x 2) 7.5 46.5 Auto switch model Auto switch model D-M9V D-M9WV D-M9AV Bore size Bore size Hs 12 (10 x 2) 14.0 16 (12

LX Series Compact Electric Actuators

o"o+ oeep 3 o 3 l "!l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Thermo-con/Rack Mount Type

External temperature sensor connector/Alarm output connector D-sub 15 pin (socket) Holding screw: M2.6 Pin no. Signal contents HECR008 HECR010 N 100-240 VAC 200-240 VAC L 100-240 VAC 200-240 VAC E PE PE N L 8 7 6 5 4 3 2 Pin no.

CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view