CHKD/CHKG

8 x L counter bore J J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6

NCM

K L M B A C (inch) Part no.

90

35 40 45 50 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] Suction flow (Port exhaust) Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure [kPa] Vacuum pressure [kPa

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50,75,100 64 42 5.5 8 48 56 30 10 to 50,75,100 70.5 48.5 5.5 8 54 62 25, 30, 40 40 10 to 50,75,100 72 50 6.6 9 67 76 Bore size (mm) FZ L M FV 10 55 18 FX FT L B + Stroke 16 60 20 FZ 20 64 20 A + Stroke 4-FD 25 65 22 34 30 72 22 40 40 89 22 50 Rear

Compact Cylinder with Air Cushion

73 55 30 to 100 M FV 80 11 11 99 116 134 20 53.5 77 83.5 63.5 40 to 100 100 11 11 117 136 154 22 53.5 94 98 76 40 to 100 4-FD FT L FX FZ B + Stroke A + Stroke Rod end male threads Rod end nut L1 Rear flange type/RQG, RDQG Rear flange type mm Bore size (mm) Stroke range (mm) L1 L A FV M 33.5 8 63 72 30 to 100 43.5 10 80 84.5 40 to 100 B + Stroke 4-FD 43.5 12 100 99 40 to 100 L FT FX FZ A +

CNS

K F C B TX TZ N N TT M H S + Stroke ZZ + Stroke (For NPT port) With rod boot Z1 + l + 1/2 stroke 75 15 40 l h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) C EA A AL B BN BP BQ CL D E F FA G GA GB GL GR J K KA 125 140 160 16 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 155 23 25 30 M14 x 1.5 15 31 25 to 1000 16 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 15

Programless controller Step motor (servo 24 VDC)

Brown 2 A B-1 Cable length (L) Red 1 A A-1 Orange 6 B B-2 Yellow 5 B A-2 8 8m *1) Green 3 COM-A / COM B-3 A 10m *1) Blue 4 COM-B / A-3 B 15m *1) Shield Cable color Terminal no. C 20m *1) Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 *1) Produced upon receipt of A A-5 Black 6 order. B B-6 Orange 9 Only Robotic type cable can be selected.

Cylinder with Lock Series CNS

K F C B TX TZ N N TT M H S + Stroke ZZ + Stroke With rod boot Z1 + l + 1/2 stroke 75 15 40 l h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J K KA 125 140 160 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 16 155 23 25 30 M14 x 1.5 15 31 25 to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 15 31 30 to

MQQ

28 10 to 50, 75, 100 B + Stroke L FT FX FZ FX (Dimensions other than A and L are the same as the front flange type.)

CG5-S

A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulphuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A D A A C A 8 Magnesium hydroxide A B A A B A 9 Acetylene A A A A A A 10 Formic

5 Port Solenoid Valve

1000 [mm] 5000 [mm] Connector specification Straight Angle S A 010 050 Straight connector type Angle connector type M12 14.9 M12 6 6 5 1 2 1 2 28.3 5 4 3 4 3 48 34 18 30 5 31.3 30 5 Socket connector pin arrangement Socket connector pin arrangement 50 L 50 L A code A code 14.8 SPEEDCON 44.5 L 50 2 1 5 PCA 1401804 Cable length (L) 1500 [mm] 3000 [mm] 5000 [mm] 4 3 M12 SPEEDCON 5.00.15 5.00.15

HEC-OM-S008

31 30 33 42 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 34 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 41 34 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 39 34 4D HECR 5-6 MODBUS communication function 5.6 Function codes The table berow function codes to read or write register.

Modular Type Air Filters Series AF

Body center H R A L D F C E B Dimensions mm Interface With T Bracket 24 35 40 A B C D E F G H R L Applicable Models Y20T-T4 Y30T-T4 Y40T-T4 10 11 14 48 70 80 2.75 3.5 4.5 33 45 50 AC21*-X2217 AC31*-X2217 AC41*-X2217 15 16 22 5.5 7 9 30 41 50 3 4 4 5 7 7 Other Available Air Line Products with Epoxy Coating/Stainless Hardware Description Option Code Series (N)AV AMG AR20-60 AVL AW20-40 E*00

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 18 2 x 5.4 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 431 IZS40/41/42 Series Dimensions Ionizer/IZS41, 42 30 44 304 6.8 30 85 9 60 50 A 60 x (n-1) L n (Number of emitter cartridges), L Dimension L (mm) IZS4-340 IZS4-400 IZS4-460 IZS4

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

H unit Use this unit when the cylinder is operated in a load and speed range above the L unit limit line and below the H unit limit line. 1000.5 1 2 3 4 5 100 10 30 20 0.5 1 2 3 4 5 10 20 30 m2, m3 max. m1 max. m1 max. m2, m3 max.

e

Auto Switch Proper Mounting Position (at Stroke End Detection) Center of magnet A D-M9m, D-M9mV D-M9mW, D-M9mWV (mm) D-A9, D-A9mV (mm) A Operating range Bore size 16 25 A Operating range Bore size 16 25 30 9 34 4.5 30 9 34 4.5 Note) Only adjust the setting position after confirming the auto switch is properly activated.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 23 23 30 30 42 42 50 8.5 11 12 15 18 23 28 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 442 Series

MQQ

A B L LD LG LH 10 10 to 40 61.5 74.3 8 4.5 2.8 19 LH LY 16 10 to 60 70.5 87.7 10 6.6 4 24 20 10 to 60 79 96.2 10 6.6 4 26 25 10 to 50, 75, 100 84.5 103.7 12 6.6 4 30 Y Y 4-LD X X LG LT 28 10 to 50, 75, 100 104 123.2 12 6.6 4 33 LS + Stroke LX LZ RE A B A + Stroke B + Stroke L REC 25, 28 Bore size (mm) LS LT LX LY LZ X Y CX 10 49.5 2 38 33.5 48 8 5 M LY 16 58.5 3.2 48 42 62 9.2 5.8 LH CY 20