Thermo-con/Rack Mount Type

p. 18 Dimensions p. 19 Operation Display Panel p. 20 Alarm p. 20 Maintenance p. 20 VOptions With Feet and No Rack Mounting Brackets p. 21 With Flow Switch p. 21 High-Pressure Pump Mounted p. 21 VOptional Accessories Power Supply Cable p. 22 Specific Product Precautions p. 23 4 HECR Series Model Selection Guide to Model Selection 1.

Thermo-con

50 or less Sulfuric acid ion (SO42) [mg/L] 50 or less p p p p p Acid consumption amount (at pH4.8) [mg/L] 50 or less Total hardness [mg/L] 70 or less [mg/L] 50 or less Calcium hardness (CaCO3) Ionic state silica (SiO2) [mg/L] 30 or less p p p p p p [mg/L] 0.3 or less Iron (Fe) Copper (Cu) [mg/L] 0.1 or less Should not be detected.

Vacuum Pad

Inlet, With Buffer How to Order p. 6 Dimensions p. 6 Construction p. 9 Parts Structure p. 10 Mounting Adapter Part Nos. p. 11 Buffer Assembly Part Nos. p. 12 1 Vacuum Pad 20, 25, 35, 50 Pad diameter How to Order ZP3P 20 PTSF Pad unit Pad diameter Symbol Pad diameter 20 20 25 25 35 35 50 50 Pad material Symbol Material SF Silicone rubber Complies with the FDA (USA Food and Drug Administration

VQ5000

Release valve spacer VVQ5000-24A-5D D U D U (see p. 36~39) See pages 31 through 40 for detailed dimensions of each option.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 38 (53) 5 3 38 (53) 32 (42) 1 23 (30) 1/8 14 port 10 30 (42) 30 (42) 3/8, 1/2, 3/4-2 port 3, 5 port 1/8 12 port 3/8, 1/2, 3/4-2 port 2, 4 port 3/8, 1/2, 3/4 1 port EVS7-8-FG-D-M0 EVS7-8-F G-D-M0 H J I 221.5 216.5 216.5 103 103 56 56 56 56 16 (20) (4 port) 16 (20) (2 port) 16 (20) (4 port) 16 (20) (2 port) B A PB B A PB 62 (72) 75 (86) 38 50 62 (72) 75 (86) 14 12 50 38 14 12 Manual override

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Sensors 9 Release for switching connector direction Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D n 8 7 6 5 4 3 2 Stations 1 9 60 37 26 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 8 For top ported 4 4 4 4 4 4 4 4 3 R 2 P 1 2 2 2 2 2 2 2 29.6 13.1 7.5 43.5 58.1 P=11.5 One-touch fitting, thread piping [4(A), 2(B) port] Applicable

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

RSQ

Bore size: 16, 20 4-O counterbore 2-N through E MK(2) Stroke Q 2-P F Y RS Q G RS H A T D RZQ W U MI W S 20 (22) V M 10 (11) H + Stroke A + 2 stroke B + Stroke CEP1 CE1 RSQB Bore size: 32, 40, 50 32 40 50 2 Stroke F Q 2-P CE2 Z J ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20

IS10M is a pressure switch with a linear mechanical set point indicator, for modular installation with SMC's FRL units.  The switch housing attaches to a spacer that clamps inline with the FRL.  The housing assembly includes a reed switch activated by a piston-mounted magnet.  A screw adjusts the spring loading the piston to set the switch point. 

IS10M is a pressure switch with a linear mechanical set point indicator, for modular installation with SMC's FRL units.  The switch housing attaches to a spacer that clamps inline with the FRL.  The housing assembly includes a reed switch activated by a piston-mounted magnet.  A screw adjusts the spring loading the piston to set the switch point. 

JXCx-OMY0004

Alarms and countermeasures (P.66) for detailed alarm information. 19 Alarm 4 5 Please refer to 20. Handling of sent/received data (P.87) for handling of the data. -35No.

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

C95

, D-Y59, D-Y7BAL D-Z80, D-Y69 D-Y7P(V), D-Y7W(V) D-F5NTL D-A3, D-G39 D-A44, D-K39 D-A59W D-F5, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-A5 D-A6 Bore size (mm) CM2 B A B A B A B A B A B A 125 160 200 250 6.5 18.5 17 45.5 19.5 17 10 22 20.5 49 23 20.5 18 30 28.5 41.5 57 31 28.5 31.5 13 25 23.5 36.5 52 26 23.5 26.5 10.5 22.5 21 34 49.5 23.5 21 24 6.5 18.5 17 30 45.5 19.5 17 20 CG1 Courtesy of

51

MB1 D-G5, K5, G5W, G5BA D-K59W, D-G59F, D-G5NT 20 to 100 D-C7, C8/D-C73C, C80C 20 to 63 CA2 CS1 Hs Hs CS2 24.5 16 A B B A D-H7, H7W D-H7NF, H7BA, D-H7C 20 to 63 D-B5, B6, B59W 20 to 100 Hs Hs 24.5 16 A B B A (mm) Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NT D-G5BA Auto switch model Auto switch model D-M9 D-M9W D-M9A D-A9 D-H7

Thermo-chiller/Rack Mount Type

V: Power supply voltage Power consumption P: 1000 [W] Q = P = 1000 [W] P Cooling capacity = Considering a safety factor of 20%, Power consumption 1000 [W] x 1.2 = 1200 [W] e Derive the heat generation amount from the output. w Derive the heat generation amount from the power supply output. Output (shaft power, etc.)

MU

Possible to install auto switches Variations Standard stroke (mm) Rod end shape Applicable auto switch model Action Style Size 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Single rod 32 Reed switch D-A7 D-A8 (2 color) D-A79W Double acting 40 50 Double rod 63 Male thread/ Female thread Solid state switch D-A7 D-J7 (2 color) D-F7lW D-J7lW 25 32 Single acting Spring return/

Rotary Gripper Series MRHQ

D-F9B Perpendicular D-F9BV D-F9N Auto switch part no.

MHY2/MHW2

Note 1) Refer to "Auto Switch Hystersis" on p.2.8-24 when using the 2 color indication type D-Y7BAL.

VQC

19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)