NAMUR

Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 400 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF

RLQ

Hs A B D-A7H D-A80H D-F7 D-J79 D-F7W D-A79W D-F7WV D-F7V D-F7BAVL D-J79W D-F79F D-F7NTL D-F7BAL Approx. Hs Approx.

Compact Cylinder with Air Cushion and Lock Series RLQ

: (g) D-F7, J79 D-F7V D-J79C D-F7W, J79W D-F7WV D-F7BAL, F7BAVL D-F7F D-F7NTL Bore size (mm) Standard strokes (mm) D-A7, A80 20 531 708 25 552 734 30 576 759 1258 1756 40 622 810 1338 1849 50 669 861 1416 1941 75 788 993 1621 2183 100 901 1120 1819 2412 D-A73C, A80C 32 40 50 63 D-A7H, A80H D-A79W [Stainless steel mounting screw kit] Use the following stainless steel mounting screw kit

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K AA BB H J M N P1 P2 A B Note 1) C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B

Series VS

Pilot valve assembly SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 6 9 Series VS R8b S VALVES A A F B C B C D D 14 14 14 SMC SMC SMC 12 12 SMC 12 MANUAL MANUAL INDICATOR INDICATOR MANUAL MANUAL INDICATOR INDICATOR OVERRIDE OVERRIDE LIGHT LIGHT OVERRIDE OVERRIDE LIGHT LIGHT E E ALL DIMENSIONS ARE IN MILLIMETERS ALL DIMENSIONS ARE IN MILLIMETERS A B D C E F 188.5 188.5

0.5

Power supply cable IZS41 IZF CP HS Automatic cleaning unit 21 Power supply cable Nil Power supply cable (3 m) Z Power supply cable (10 m) Model 21 For IZF21 31 For IZF31 X13 02 IZS41 CP Power supply cable length Cleaning arm (for automatic cleaning unit) 01 Total length: 1 m 02 Total length: 2 m IZF M3 21 Model 19 Total length: 19 m 20 Total length: 20 m 21 For IZF21 31 For IZF31 : Available

Exhaust Cleaner Series AMC

E R E X H A U S T C L E A N E R S E R I E S (N)AMC 0 (N)AMC Japanese N North American O P T I O N B Bracket D Threaded Drain Port (Female) B O D Y S I Z E P O R T S I Z E 2 1/4 3 3/8 5 3/4 6 1 8 1 1/2 9 2 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D T H R E A D 1 Male 2 Female (Only NAMC220, 320, 520 Special Order Only) R(PT)* Remove (N) when ordering N NPT FOR FURTHER TECHNICAL

SFOD-OMT0009CN

(c)BUSY ONINP OFF No. () (d)INP ONBUSY OFF INP ON BUSY OFF (INP ONBUSY OFF) 2 ABS 75 No.SFOD-OMT0009CN-B (3) --(a)No.(INx) (b)DRIVE ON Min.15ms No.(OUTx ) No. No. (c)BUSY ONINP OFF (d)INP ON 2.5[s] ALARM ON( ) BUSY OFF INP ON BUSY OFF 1)(0-149) 2)(d) 2 ABS 76 No.SFOD-OMT0009CN-B (4) HOLD --(a)(BUSY ON)HOLD ON (b)BUSY OFF () No. (c)HOLD OFF No.

VT325

Air flow direction: z Block, x c Conduit terminal (TS) Coil When the coil y is energized the plunger u is pulled down depressing the spool e via the overtravel assembly i and the air passage between port z and port x is opened and port c is blocked.

        Series VKF300

0 44 & 111 ((( 35 44 & $ ' ' & "" ()*+. /# ,VV061 &30 ! // 44 44 $ %& ' V100 !" # $% S070 &30 0 5 6 !!"0 44 & / ! ! ' VQD 111 ((( $ ' ' VKF & VK ! "# VT "" ()*+ "" ,VS &30 ! // 4 $ ! "# %& 0" ' &30 0 5 6 !!"0 44 & / ! ! ' & * !2 111 ((( 35 44 & $ ' ' &30 ! // 4 $ ! "# %& ! ' &30 0 5 6 !!"0 44 & ( 3 ,' & ,' ' ' ( * !2 )* '' )+ '' ( %( !" ! ! &' & / ! !

Information

[C] [60 Hz] Circulating fluid temperature [C] Pump Capacity 012 018 024 A W 012 018 A W HRS -20 (Single-phase 200 to 230 VAC) HRS -10 (Single-phase 100/115 VAC) 0.30 0.30 30 30 Outlet 60 [Hz] Outlet 60 [Hz] 0.25 0.25 Outlet 50 [Hz] Outlet 50 [Hz] 0.20 0.20 20 20 0.15 0.15 0.10 0.10 10 10 0.05 0.05 Return port Return port 0 0.00 0.00 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Pressure [MPa]

Multi-channel Digital Sensor Monitor ( compatible)

(Display pattern for 3rd, 4th, 5th, 8th and 9th digit from the left) Characters Q, X, Z, /, or cannot be displayed. (Display patter for 1st., 2nd., 6th., and 7th digit) Characters A to Z can be displayed (the same as the 3 digits on the right).

I

/NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l

Compact Vacuum Unit Ejector/ Vacuum Pump System

When increasing the number of stations, order the required number of single unit of the body type 3 valve (b) and the required number of either the pressure sensor (d) assembly (c) or the vacuum pressures switch assembly (d).

E-MY2B_E_A

Phone AUSTRIA / (43) 2262-62 280 ITALY / (39) 02-92711 BELGIUM / (32) 3-355 1464 NETHERLANDS / (31) 20-531 8 CZECH REP. / (420) 5-414 24611 NORWAY / (47) 67 12 90 20 DENMARK / (45) 70 25 29 00 POLAND / (48) 22-548 50 85 FINLAND / (358) 9-859 580 PORTUGAL / (351) 2 610 89 22 FRANCE / (33) 1-64 76 1000 SPAIN / (34) 945-18 4100 GERMANY / (49) 6103 4020 SWEDEN / (46) 8-603 0700 GREECE / (30)

VKF300

Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

(Station 5) 02 2 stations : : Option Prefix "" mark on valves to be assembled on the manifold. 20 20 stations Write sequentially from the 1st station on the D side None DIN rail mounting DIN rail mounting (Without DIN rail) D DO Uside Dside Stations...3.2...1 A port P1 How to Order Valve VQ M C6 2 1 1 1 G VX VNl Series/Orifice Port size VQ Port size One-touch fitting for 6 One-touch fitting

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

E-MY2_E_D

Phone AUSTRIA / (43) 2262-62 280 ITALY / (39) 02-92711 BELGIUM / (32) 3-355 1464 NETHERLANDS / (31) 20-531 8 CZECH REP. / (420) 5-414 24611 NORWAY / (47) 67 12 90 20 DENMARK / (45) 70 25 29 00 POLAND / (48) 22-548 50 85 FINLAND / (358) 9-859 580 PORTUGAL / (351) 2 610 89 22 FRANCE / (33) 1-64 76 1000 SPAIN / (34) 945-18 4100 GERMANY / (49) 6103 4020 SWEDEN / (46) 8-603 0700 GREECE / (30)