Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Cooling Capacity: 200 (20.6kW), Thread: Rc, Option: W [SI Unit Only (Not Available in Japan Due to Measurement Law)]

1

[Electrical power waveform with power saving circuit] Applied voltage 24 V With power saving circuit 0.1 w 0.1 w Standard 0.35 w 0.35 w 0 V SY Standard With power saving circuit 0.35 (0.9) W 0.1 (0.4) W EX600 0 W 67 ms (40 ms) VM Space saving/Improved operability Space saving/Improved operability The value in ( ) are for the quick response and high pressure types.

CATALOG

P O R T S PT Ports XC18 NPT Ports (25~40 Only) A L L O W A B L E M O M E N T A N D M A X I M U M A L L O W A B L E L O A D H O W T O O R D E R M Y 1 M R O D L E S S C Y L I N D E R MY1M G M O M E N T (N M) A L L O W A B L E L O A D (N) B O R E S I Z E 16 16mm 20 20mm 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm Local Production Available N O O F S W I T C H E S ...2 Pieces S ...1 Piece

2

40 28.4 7.5 11 12 KQ2T12-00A 18.5 23 32.3 17 10.7 8 4.2 57.4 45.4 9 15.7 16 KQ2T16-00A 23.8 28.6 40.5 20.6 13.4 8 4.2 100 58.9 13 29.8 Q Q 2 x O 2 x N M Q L1 L2 Q D D L1 M L1 M Note) D is maximum diameter.

A

P O R T S PT Ports XC18 NPT Ports (25~40 Only) A L L O W A B L E M O M E N T A N D M A X I M U M A L L O W A B L E L O A D H O W T O O R D E R M Y 1 M R O D L E S S C Y L I N D E R MY1M G M O M E N T (N M) A L L O W A B L E L O A D (N) B O R E S I Z E 16 16mm 20 20mm 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm Local Production Available N O O F S W I T C H E S ...2 Pieces S ...1 Piece

Table of Contents

MI W S 100 200 50 CEP1 130 50 100 50 40 40 CE1 40 Weight of transferred object m (kg) Weight of transferred object m (kg) 32 30 40 50 CE2 20 30 32 20 ML2B 20 16 10 C J G5-S 10 12 5 4 CV 3 4 5 3 MVGQ 2 2 CC 1 1 RB 1 5 10 20 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) J Lateral Load and Operating Pressure DThe larger the lateral load, the higher the operating pressure required

Table of Contents

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

Made to Order

200 Z D D C M W CQ2 XC26A W 40 200 M9BW D Z M D C CDQ2 XC26A Built-in magnet for auto switch Made to Order 1 Symbol Double clevis width Double knuckle width XC26A* 16.5 mm XC26B* 19.5 mm XC26C 12.5 mm Mounting D Double clevis * Mounting brackets are shipped together, (but not assembled). * Not available for bore size 32 mm Bore size 32 32 mm 40 40 mm 50 50 mm 63 63 mm Number of auto switches

Table of Contents

1 20 50 76 75 100 200 DStroke (mm) Stroke (mm) -X MGPL32 to 63 MGPL32 to 63 30 30 20Data 50, 63 20 20 50, 63 50, 63 32, 40 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 50, 63 10 10 32, 40 5 20 25 25 26 26 50 76 75 100 200 5 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 40 40 100 100 30 30 80 Load weight m (kg) Load weight m (

Table of Contents

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 0 20 40 60 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 18 19 Courtesy of Steven

Electric Actuator/Slider Type

How to Order T6 LEJS 40 500 A q w e r t y u i o q Size w Motor type 1 e Lead [mm] Symbol LEJS40 LEJS63 H 24 30 A 16 20 B 8 10 40 63 Symbol Type Output [W] Actuator size Compatible driver T6 AC servo motor (Absolute encoder) 100 40 LECSS2-T5 T7 200 63 LECSS2-T7 1 For motor type T6, the compatible driver part number sufx is T5. r Stroke [mm] 2 y Cable type 4, 6 u Cable length [m] 5, 6 i Driver

Electric Actuators

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 18 Standard Motor/Horizontal

ZP

Basic Pad Dimensions/Models Single unit 10 to 40 w q ZP D N 10 D Model A B C D E Y q Pad dia.

Table of Contents

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

High Vacuum Angle Valve

M: Size 16, 25, 40 only.

Table of Contents

m C Lead wire length 0.6 m CL Lead wire length 3.0 m CN W/o lead wire L LN Lead wire length 0.3 m Connector type Y DC: 0.45 W (With indicator light: 0.5 W) Without lead wire (Applicable to only DC) Plug connector type LO Without connector M Lead wire length 0.3 m 24 VDC and 12 VDC are applicable to 0.45 W.

Battery-less

How to Order i q e r t y u LEHF 32 K2 64 R1 E CD17T w For details on controllers, refer to the next page. q Size K Basic w Motor type e Lead r 2-finger type t Stroke [mm] 32 40 Stroke/both sides Size Basic Long stroke 32 64 32 40 80 40 E Battery-less absolute (Step motor 24 VDC) y Motor cable entry u Actuator cable type/length Robotic cable [m] Nil None R8 81 Basic (Entry on the right side

Table of Contents

Applicable shaft type: W Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1= L2 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A18 Symbol: A17 Shorten the long shaft. Shorten the short shaft. A parallel keyway is used on the long shaft for size 40.