3-Position Rotary Table

for stable operation (s/90) Allowable kinetic energy (J) Size 10 20 30 50 0.007 0.025 0.2 to 1.0 0.048 0.081 Note) If operated where the kinetic energy exceeds the allowable value, this may cause damage to the internal parts and result in product failure.

Solid State Auto Switches

Weight (g) Auto switch model 60 D-P74-376 Dimensions (mm) Indicator light Connector size M12 13.6 14 SMC 5 32 500 44.5 2 x 2 x 6 Counterbore depth 2.4 2 x 3.4 through 5 6 4 20 Most sensitive position 16 1648 Heat Resistant Reed Auto Switch D-B30(J)/31(J)/35(J) Refer to SMC website for the details of the products conforming to the international standards.

Ionizer

Balance adjustment trimmer 4 x M4 x 0.7 depth 5 14 19 20 (For mounting, opposite side: Same) 13 17 7 Connection cable IZS31-CF-X210 14.9 16 20 20 52 (Cable length: Refer to the above table.) 65 8P modular jack (Plug for sensor cable) Maintenance detection level selection switch 15 100 4 x M4 x 0.7 depth 5 20 900 Connection cable length L (For mounting, opposite side: Same) 7 16 26 58 80x2

Process Valve

(without light), 2 W (with light) 4 W (without light), 4.2 W (with light) DC 12 (P1) 10 (P2) 12 (P1) Allowable voltage fluctuation SGC 50C or less (When rated voltage is applied.)

CE

5.8 6.6 42 24 3.2 96.4 48 66.5 62 6.6 8 39 48 60 133 8 124 12 18 8 16 9 114 121 14 Series CE1 32, 40, 50, 63/Dimensions Double end tapped CE1B Bore size Stroke 4-N through 8-O thread depth 20 20 2.5 91 500 or 3000 K 7 H G D M E J F C X B + Stroke L Z M A + Stroke E T 2-P (port size) I Q Metal connector Made by TAJIMI R04-J8M7.3 15.5 M14 x 1 38 (mm) G A C D E F H J K B I Bore size (mm) 32

XLAQ/XLDQ

sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143

MRQ

(mm) (mm) Stroke 15 20 30 40 50 75 10 25 5 100 20 30 20 15 15 17.5 25 Y 12.5 15 17.5 20 Q 20 20 30 20 68 70.5 68 68 68 70.5 80.5 83 75.5 E 70.5 MRQFS40SMRQ40, #3 (Flange only) 1.5-15 Series MRQ Made to Order Specifications -X1 to X5 Consult SMC for the detailed specifications, dimensions and delivery.

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + M

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + M + T

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: G + M

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: J + M + T

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: Earth Leakage Breaker

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + M

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + M + T

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: High Temp Environment Specs

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: J + T

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Earth Leakage Breaker

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + J

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + M + T

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + J + T