Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

0 i o q u y t r !2 w !1 CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 Parts list No. Description Material Note Hard anodized Aluminum alloy Body 1 Electroless Ni plated Aluminum alloy Head cover 2 Chromate (15 is not available.)

PF2D

0 u !0 !2 w y r !0 e PF2A Number Parts Material 1 New PFA Body PF3W 2 New PFA Sensor 3 Super PFA Tube LFE 4 PPS Housing A 5 PPS Housing B PF2D PF2D 6 PPS Housing C 7 POM Bushing IF 8 PPS Cap 9 FKM Gasket !1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

Pin Clamp Cylinder Series CKQ/CLKQ

D-F9BA U U B A [For CLKQ] D-A9, D-F9W D-A9V, D-M9V D-F9WV D-F9BA U U B A 14 Series CKQ/CLKQ Pin Clamp Cylinder Proper Auto Switch Mounting Position and Its Mounting Height Direct mounting type Applicable auto switch: D-M9 [For CKQ] [For CLKQ] B B A A Rail mounting type Applicable auto switch: D-P5DWL D-P5DWSC (Different side) [For CKQ] [For CLKQ] B B U U A A Besides the models listed

MLGC

e r t y u i o !

MLGC

e r t y u i o !

AR20-B to AR60-B

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

ZPT/ZPX

Calculation ZX ZR : Lifting force (N) : Stable vacuum pressure (kPa) : Pad area (cm2) : Factor of safety: Horizontal pad contact : 4 (dynamic) Vertical pad contact : 8 (dynamic) W P S t Pad ZM W = P x S x 0.1 x 1 t W ZH W ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Booster Relay Series IL100

2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !

VCA

side, side ported) End plate assembly (U side, side ported) 6 6 Al Al End plate assembly (U side, front ported) End plate assembly (U side, front ported) Note 2) O-ring is included with manifold valve .

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 +0.036 0 8 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 (29.3) (33.1) (40.4) (49.2) +0.036 0 +0.036 0 +0.043 0 +0.043 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 10 10 10 10 42 48 53 60 20 25 32 40 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 +0.036 0 10 10 +0.043 0 12 12 +0.043 0 14

CXS

1 5.6 3.2 28 0.2 28 0.2 22.7 35 37 16 6.3 5 12 2-R3.5 4-M3 x 0.5 (Through) 2-M2.5 x 0.45 x 6 (Hexagon socket head cap screw) 2-M3 x 0.5 x 12.5 (Hexagon head bolt) 2-M3 x 0.5 (Hexagon nut) 6 7 4-M3 x 0.5 (Through) 4-M3 x 0.5 with depth 4.5 (Opposite side: Same) W (10) 10 3 2-5.1 8 6 22.5 22.5 (mm) 4-M5 x 0.8 with depth 4.5 (Piping port) (Opposite side: Same) Model W Z ZZ SS S 10 66 103 40

MXH

4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Component Parts SY w Description Material N.C. Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Cylinder with Lock Series CLS

128 28 17 36 36 16 114 64 M14 x 1.5 to 1000 56 53 182 95 23 5 132 169 144 32 20 40 40 18.5 130 74 M16 x 1.5 to 1200 (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA L N M MM P RR S U W H Z ZZ 15 31 65 19 M30 x 1.5 35 1/2 29 98 35 110 383 412 to 1000 8 15 31 75 19 M30 x 1.5 35 1/2 32 98 40 110 393 425 to 1000 9 17 36 80 22 M36 x 1.5 39 3/4 36 106 45 120 438 474 to 1200 With rod boot

60

75 90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4

AC Servo Motor Driver (SSCNET Type)

[1] Power supply input terminals, L1, L2: Provide specified power supply to input terminals L1 and L2. [2] Connect the motor input terminal (U, V, W) to the driver power terminal (U, V, W).

AC Servo Motor Driver (Pulse input type)

Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H MM NN R X Y LC LH LT LX LZ 6 10 15 M3 x 0.5 17 6 28 6 20 8 10.5 1.6 3 11 14 3.4 14 6.5 10.5 9 M10 x 1.0 7 7 M4 x 0.7 20 7 33 6 24 8 13 1.6 5 13 17 4.5 15 7 12 12 M12 x 1.0 8 10 M5 x 0.8 24 7 43 6 30 10 15.5 2.3 6 18 19 5.5 20 16.5 14 M14 x 1.0 10 12 10 Symbol S Z With auto switch Bore size (mm) W J 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H MM NN R X Y LC LH LT LX LZ 6 10 15 M3 x 0.5 17 6 28 6 20 8 10.5 1.6 3 11 14 3.4 14 6.5 10.5 9 M10 x 1.0 7 7 M4 x 0.7 20 7 33 6 24 8 13 1.6 5 13 17 4.5 15 7 12 12 M12 x 1.0 8 10 M5 x 0.8 24 7 43 6 30 10 15.5 2.3 6 18 19 5.5 20 16.5 14 M14 x 1.0 10 12 10 Symbol S Z With auto switch Bore size (mm) W J 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st