C95Series

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

LEC-OM02904

AC DC 2. 10 3 10 (2) ()40 10(555) (10.1) A P (10.1) KT [m2] [W] [] [56] A P T K (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10 10.3 (E6) OFF 10 11000 (EM1) (EM1) 10.3.1 (1) 10.3 (10.2) ((2)(a)(b)) ON EM1 (EM1) OFF V0 te 10.3 t 1J Lmax V L 0 (10.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 10 5 10 (2) (10.2) (a) 200V 25 73 20 23

Cylinder with Lock Series CNS

When using a single/double knuckle joint together with a rod end nut, the A and H dimensions should be extended.

Cylinder

Circuit Diagram : D-90Type Bore Dimension A j Dimension B Dimension C ;t)-k.

Electric Actuators

Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

KR

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T VMG Seal Tube Can be used for a wide range of pressures from a low vacuum up to a pressure of 1.0 MPa The use of a special profile ensures sealing and reduces resistance when the tube is inserted.

Suction Guard (Produced upon receipt of order) FHG Series

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

SZ3000

Press the manifold. 1-3-19 20 Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60FD Stations UWith external pilot 2n2One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 13.3 24 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 A 4 2One-touch fitting [1(P), 3(R) port] Applicable tubing

SZ3000

0 (A) 4 (B) 2 (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i JIS Symbol 2 position double with back pressure check valve 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 e w t y q o r u !

Clamp Cylinder with Lock

20 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 15 15 35 18 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 20 20 17 17 40 A 20 20 19.5 0.2 0.5 15 45 60 25 45 60 A Part no.

CE

D-M9 D-M9V D-F9W D-F9WV D-A9 D-A9V D-F9BAL Bore size (mm) A B A B A B A B A B A B A B 12 40.5 4 41 4.5 38 2 46 9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91

CE

Bore size (mm) A B A B A B A B A B A B A B 12 40.5 4 41 4.5 38 2 46 9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating

CE

D-F9W D-F9WV D-A9 D-A9V D-F9BAL Bore size (mm) A B A B A B A B A B A B A B 12 40.5 4 41 4.5 38 2 46 9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5

Rubber seal 5 Port Solenoid Valve Series SYJ7000

] R P R 63.8 (DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/surge voltage suppressor) + + + 73 [80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector

Valve Single Unit

Refer to external dimensions in pages 1-6-44 to 1-6-46, and then mount it. 1-6-43 SX7000: SS5X7-20Stations Grommet (G) 2n2-One-touch fittings (A, B port) 2n1-Rc 1/4 (A, B port) 6-Rc 1/4 L1 L2 Applicable tubing O.D.: 8 (Mounting hole) 4-4.5 10 (P, EA, EB port) 10 16.5 11.5 22.4 76.8 19.5 19 20.5 B A B A B A B A B A B A B A 20 20 EA EB P EB EA P 21 21 62.5 67.7 21 60 128.6 115.6 30 99.5 28.2

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) N.O. (A contact) Number of auto switches N.O. (A contact) N.O. (A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Dedicated Controller

ENT 84 13 Series LC1 Options T-nuts and T-brackets for Mounting Be sure to use when mounting the controller. Note) The controller unit includes either T-nuts or T-brackets.

Electric Actuator / Low profile slider type

( (L Li in ne ea ar r g gu ui id de e ( (L Li in ne ea ar r g gu ui id de e s si in ng gl le e a ax xi is s t ty yp pe e) ) d do ou ub bl le e a ax xi is s t ty yp pe e) ) LECP Series This manual describes the actuators operation in combination with the LECP6 series controllers.

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Mechanically Jointed Rodless Cylinders

A B A B A B A B MY-S16 MY-S25 MY-S32 MY-S40 63.6 091 130 182 Note) A set of side supports consists of a left support and a right support.