Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 24.4 24.9 23.5 21.4 25.3 25.8 23.7 24.6 30.7 29.1 36.1 30.9 32 32.2 8 M5 x 0.8 21.5 10 4 M A L 17 4 4 4 10 14 18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R) 6 18.5 10 10 12 14 18.5 19 25.5 23.5 30.5 25.5 26.5 25 7 14 14 13 24 23 23 46 1/8 1/4 1/8 1/4 1/4

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

} 1.6 (20) 15 EB P EA 2 x 2.2 (Positioning for manifold gasket) 27.2 (45) L plug connector with cover (LL) 3 52-SY5420-LL-01 (-F2) 5 L 156 (Lead wire length) Insulation: Red (+) Insulation: Black () 5.9 4.1 14.7 12 0.3 mm2 84.3 Cable type (TT) 3 52-SY5420-TT-01 (-F2) 5 Max.10 L (Lead wire length) 189.6 Lead wire marking No.1 (+), No.2 () 0.75 mm2 101.1 7 ATEX Compliant Body Ported Type Series

Air Catch Sensor Series ISA

DIN rail: ISA-2-1 to 7 Gauge: G33-3-01 Bracket: ISA-1-A DIN rail: ISA-2-1 to 7 10 (Hexagonal) Material: SPC (Nickel plated) Material: Aluminum 100 110 q we r t L 90 4 x 4.5 10 25 5 7.5 30 R 1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model ISA -1 ISA -2 ISA -1 ISA -3 ISA -2 ISA -4 ISA -3 ISA -5 ISA -4 ISA -6 ISA -5 ISA -6 Part no. 105 140 175 210 245 280 315 Description ISA

Guide Cylinder/Compact Type Series MGC

7 i !3 o !6 u !9 w #9 @5 $1 @7 @4 #8 #0 @9 @8 r !4 #6 #7 @3 #5 $0 #4 $4 !1 !2 !0 $5 A View A-A' A' Ball bushing bearing Front mounting flange type B B' @6 @0 !8 $3 y !

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

•

N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

3 Port Solenoid Valve Base Mounted and Body Ported VQZ Series Choice of Rubber or Metal Seal Compact Design With Large Flow Long Life Interchangeable One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Product Features .pages 4-5 Preferred Options Guide.page 7 Q Q Base Mounted Valves and Manifolds.page 9 Specifications.pages 10-11 How To Order .pages 12-15 Options

Digital Pressure Switch

(only for kPa and MPa unit indication). -10No.PS-OML0003-J Definition and terminology Terms Meaning 2 2-colour display 2 colours are used to indicate a value, which change according to the output status. 7 7-segment display When "8" is shown on the display. It is called 7-segment because 8 consists of 7 pieces of "(segments)".

Precision Regulator Series IR1000/2000/3000

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge2 G33-4-01 G43-4-01 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached two

VSA4

Mounting hole 3-7 Mounting hole 3-7 Mounting hole 5-3-32 3 4/5 Port Air Operated Valve Series VSA430 Model Valve model Body size Function Flow characteristics P A/B C[dm3/(sbar)] 6.4 8.7 9.2 6.4 8.7 9.2 6.2 8.1 10 6.6 8.9 11 Port size Rc 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 Note) Weight (kg) A/B EA/EB Pilot port size SA C[dm3/(sbar)] 6.3 8.2 9.6 6.3 8.2 9.6 5.8 7.5 9.5 5.5 6.7

HRX-OM-T002

alarm ---(AL.01)7 Contact output signal 2 function RMT Contact output signal 2 operation A Contact output signal 2 selected alarm ---(AL.01)7 Contact output signal 3 function ALM Contact output signal 3 operation B Contact output signal 3 selected alarm ---(AL.01)7 7: Regarding the detail of the default setting, refer to 5.20Communication function. 5.2 Function HRS090 Series 5-6 HRX-OMT002

Speed Controller: Standard Type Series AS In-line Type

2 U seal Retaining ring for hole type C HNBR Tool steel y !

HRX-OM-M090

Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months

HRX-OM-W058

Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 HRS-R Series HRX-OM-W058 Contents 7.3 Troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months

HRX-OM-R016

Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months

Ionizer Gun

Loosening or damage of the nozzle c. Squeezing or twisting of the tubing that is connected d. Hardening or deterioration of the tubing that is connected e. Air leakage 8 Doc. no.IZ*-OMX0012-B 1. How to Order 1-1. Ionizer IZG10 08 01 01 Ionizer Gun One-touch fitting Nozzle type Symbol Applicable tube O.D.

EtherNet/IP TM Compatible Fieldbus System

COM C) 7 Branch port D(COM D) 8 Display window Displays the status of the power supply and the communication with the PLC. 2 9 Switch cover Sets the address, etc. with the switch inside. 2 10 Grounding terminal (FE) Used for functional grounding.

HRX-OM-O021

9.3.1 HRS050-A-20-(BJM) . 9-5 9.3.2 HRS050-W-20-(BJM) . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS050--20-(BJM) . 9-7 9.5 Heating capacity . 9-7 9.5.1 HRS050-A-20-(BJM) . 9-7 9.5.2 HRS050-W-20-(BJM) . 9-7 9.6 Pump capacity. 9-8 9.6.1 HRS050--20-(BJM) . 9-8 9.7 Required facility water flow (For water-cooled type) . 9-8 9.8 Compliance . 9-9 HRS Series HRX-OM-O021 Contents 9.9 Sample DoC. . 9-