5 Port Solenoid Valve Series SQ1000/2000

of actuation MB Note 2) 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C.

VCS

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Symbol 01 02 Port size 1/8 (6A) Stations 2 3 4 5 n Uside D side 1/4 (8A) Material All IN ports are 3/8.

ZL3-OM00801

H 0.50 MPa 4 M4x110 2)1 :0.760.84Nm V * 1 3 ZL3 ZL3-SC1-A 4 ZL3 ZL3-SE1-A 1 2 18 No.ZL3-OM00801-A 5 ZL6 ZL6-SC1-A () * 6 ZL3/ZL6 ZL3-EP1-1 -A 1 1 Rc F G N NP 7 ZL3/ZL6 GZ33-K1K-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19 No.ZL3-OM00801-A 8. 8.1 ZL3 12 1 22 3(0.760.84Nm) (ZL3-SE1-A) 1 2 8.2 ZL6 ZL6 P6 8.3 1) 2) 3)2 4) 5kPa 5)

VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly.

Ionizer

Perform this detection procedure in the absence of workpieces. 655 A Series IZS31 Model Selection and Settings 3/DC Mode 3.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.

Speed Controller with Uni One-touch Fitting AS Series

ASD None Electroless nickel plated N Nil Option AS Type Elbow Universal 2 3 AS-FE Applicable tubing O.D. Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 Control type 5 32" 04 06 08 10 12 03 05 07 09 11 13 3 16" AS-FG Meter-out Meter-in 0 1 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630.

PSxx-OMU0008CN

12 V 300 24 V 600 DC(-) 50 DC(+) -V/-T () OUT1 PNP 2 OUT2 Max.80 mA 1 V DC(-) DC(+) -Y () -V/-T () OUT1 PNP 2 OUT2 Max.28 V80 mA 1 V DC(-) -23No.PS-OMU0008CN-D [] 3 0.2 [] / / OUT1 OUT1 OUT2 OUT2 [F10]30 () 1 3 1 3 5 (63 ) (3 ) () () (26 ) (28 ) (30 ) 3 () 3 -24No.PS-OMU0008CN-D ON OFF ON P_1 H_1 ON OFF [] ISE20C [P_1] OUT1 0.500 MPa [P_2] OUT2 0.500 MPa [

,,: ,.

/t08 c/6 3/8 718-14 7ls t.79 .408 5/8 1t2 718-14 7t8 1.98 .501 Tube To Male Pipe: 90' ELBOW 1i8 1ts 3/16 1t8 3/16 'v4 Consult factory for iniormation 114 1t8 114 114 114 3/8 1t4 1t2 vl6 1/8 112-20 .90 .220 5/16 114 1t2-20 qt .vc .220 5/16 318 1t2-20 .98 1 .01 .219 5/16 'v2 Consult iactory lor iniormation 3i/S 1/8 5/8-18 1.01 .220 3/8 1t4 5/8-18 1.01 1.O5 .283 3/8 3lS y8-18 1.O4 1.07 .28'l

AMR3000 to 6000

Model Description AMR3000 AMR4000 AMR5000 AMR6000 : E4-l02 : E4-l03 : E4-l04 1 4 3 8 1 2 1 4 1 2 : E6-l06 : E6-l10 3 4 1 : E5-l04 : E5-l06 : E3-l02 : E3-l03 Adapter assembly (6) 3 8 3 4 AD33-X203 AD33-X202 AD33-X210 AD33-X201 Float style auto drain (Bowl assembly) IS1000-01 (Set at 0.4MPa) Compact pressure switch PT elbow (7) 135510 135613 Note 5) l in the gauge part number (e.g.

BP1000

) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 100 psig (0.034 to 0.7 MPa) 15 to 200 psig (0.1 to 1.4 MPa) 15 to 300 psig (0.1 to 2.1 MPa) Code Bonnet Standard Panel installation 3) 01 02 06 10 20 30 No code P Connections (Inletq, Outletw) 3) Panel mounting hole: dia. 1.42 inch (36.1 mm).

AMD

Element NBR 63174 63174 63174 3 pcs. 63174 3 pcs. 63174 5 pcs. Element r Packing e 63148 63148 63148 3 pcs. 63148 3 pcs. 63148 5 pcs. x T3 O.D.112 x I.D.90 O.D.112 x I.D.90 NBR O.D112 x I.D90 x T3 3 pcs. x T3 5 pcs. t Packing Drain V#6500 y Gasket AL-62S AL-63S AL-60S AL-61S AL-31S NBR JIS B 2401G35 1 pc. JIS B 2401G35 1 pc. JIS B 2401G35 3 pcs. JIS B 2401G35 3 pcs.

CG1

3 !4 !5 !6 !7 !8 !

ZB-OM00301

JIS B 8370: JIS B 8361: JIS B 9960-1: -((1 :) JIS B 8433-1993: *2) : : : 1 2. 3. 1. 2. 3. 4. 2 2 - No.ZB-OM00301 3 1 1 *3) 1 1 () () () 3 - No.ZB-OM00301 () () 4 - No.ZB-OM00301 () * JIS B 8392-1 2.4.32.6.3 () 5 - No.ZB-OM00301 * F.G.

High Speed Pilot Operated

frequency [Hz] 70 50 150 100 Valve Construction 2-position single 2-position single Standard 5-port specification Made to Order 3-port specification (-X1) q w 3 (EB) 1 (P) 5 (EA) 3 5 1 3 5 1 2 4 2 4 Component Parts No.

PF-OMN0011_C

1. 2. 3. 4

IR30-OM00013

Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

It should be used as prefilter of compressed air for precision instruments or clean room required for higher clean air. (1) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa