SMC Corporation of America
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Port A Port B M5 port block assembly Features 2 TUV Approved Product Conforms to standards necessary to satisfy EC directives. BAUART GEPRUFT TYPE APPROVED TUV Rheinland The SZ series has received approval for conformity to standards related to EMC Directives and DIN VDE 0580, from TUV Rheinland, an EC Notified Body (EC authorization No. 0197).

Circulating fluid set temperature 20 oC READY band width (upper/lower temperature range) 2 oC READY time 60 sec. Preparation is completed 60 seconds after the circulating fluid temperature reaches 18oC to 22oC.

Table 8-15 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 HRZ Series 8.7 Compliance 8-25 HRX-OM-I051 Chapter 8 Appendix Serial No. Model: Judgment 8.8 Thermo Chiller Daily Inspection Sheet Circulating fluid supply port cap Looseness IN press.

Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240VAC (50/60 Hz) Other D: Type D DIN terminal (With connector) Option Nil G None With pressure gauge How to Order Pilot Valve Assembly DO: Type D DIN terminal (Without connector) Y: Type Y DIN terminal (With connector) SF4 1 G 80 Soft start-up valve Rated coil voltage 1 2 3 4 5 6 7 9 100 VAC (50/60 Hz) YO:

Features 2 " TUV Approved Product Conforms to standards necessary to satisfy EC directives. BAUART GEPRUFT " TYPE APPROVED " TUV Rheinland " The VQ7-6/7-8 series has received approval from TUV Rheinland, an EC Notified Body (EC authorization No. 0197), for conformity to DIN VDE0580: 1994 Standards. " When ordering TUV approved products, add " Q" at the end of the standard part number.

(VJ314) ZX1051-K15LZ-EC Related 0.5 Equipment ZX1051-K35MZ-EC General vacuum switch (ZSE2) Plug connector type With light/surge voltage supressor ZX1071-K15LZ-EC Connector type With silencer 24 VDC 0.7 ZX1071-K35MZ-EC ZX1101-K15LZ-EC 1.0 ZX1101-K35MZ-EC ZX1-K15LZ-E ZX1-K35MZ-E 867

Time Failure predict number (EC) Since it is normal, the number count is reset EC = 0. Abnormal EC = 1 Abnormal EC = 2 Abnormal EC = 3 884 Technical Information Auto shift function 12 The auto switch function is the function to regard the pressure value at the point of this signal being input as the benchmark and to display and conduct switching.

Circulating fluid set temperature 20 oC READY band width (upper/lower temperature range) 2 oC READY time 60 sec. Preparation is completed 60 seconds after the circulating fluid temperature reaches 18oC to 22oC.

Circulating fluid set temperature 20 oC READY band width (upper/lower temperature range) 2 oC READY time 60 sec. Preparation is completed 60 seconds after the circulating fluid temperature reaches 18oC to 22oC.

Inlet Air Temperature Data B: Ambient Temperature AMH Inlet air temperature (C) Inlet air temperature (C) Ambient temperature (C) Ambient temperature (C) Correction factor Correction factor Correction factor Correction factor IDFA3E to 11E IDFA15E1 to 75E IDFA3E to 37E 1.33 IDFA55E to 75E IDFA100F to 150F IDFA100F to 150F AME 20 25 30 35 40 5 to 25 30 35 40 45 50 5 to 30 35 40 45 50 55 60

Weight9 kg 35 For option T : 42 EMC Directive 2004/108/EC Standard CE Mark Machinery Directive 2006/42/EC *1 Use the product in conditions where freezing will not occur.

Such vessels require EC type examination and then CE marking. 17-6-12 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

Such vessels require EC type examination and then CE marking. 15-18-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

Such vessels require EC type examination and then CE marking. 15-18-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

Such vessels require EC type examination and then CE marking. 15-18-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

Such vessels require EC type examination and then CE marking. 15-18-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

Such vessels require EC type examination and then CE marking. 15-18-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

Such vessels require EC type examination and then CE marking. 14-21-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

Such vessels require EC type examination and then CE marking. 16-14-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

operation of the compressor which can cool down 9.5 kW at 60 Hz.