0.

N1 N3 N7 N9 N11 NM Note 1) M5 01 02 Symbol Nil N T F Rc 1/8" 5/32" 1/4" 5/16" 3/8" Mixed M5 thread 1/8 thread 1/4 thread NPT P P P P P VQZ100 NPTF Cylinder port P P P P P VQZ200 G P P P P P VQZ300 Note 1) Except VQZ100, mixing one-touch fittings and thread types is impossible. Note 2) Metric size one-touch fittings (Cl) are also available.

Fieldbus System

P P P P P P P P SY5000 P P P P P P P P SY5000 P P P P C2 C3 C4 C6 C8 CM N1 N3 N7 N9 CM 2 One-touch fitting 1/8" One-touch fitting 3.2 One-touch fitting 5/32" One-touch fitting P P P P P P P P P P P P P P Straight Elbow Straight Elbow 4 One-touch fitting 1/4" One-touch fitting 6 One-touch fitting 5/16" One-touch fitting 8 One-touch fitting Straight port, mixed sizes LN3 LN7 LN9

5 Port Solenoid Valve

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC4200 VQC4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w r e q w r (A) 4 (B) 2 (A) 4 (B) 2 VQC4300 VQC4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4400 VQC4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4500 VQC4501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component

Air Cylinder Series CM2

Grease pack part no.: GR-S-010 (10 g) Basic Style (B) 20 P 20 25 Bore size Stroke P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 H1 Width across flats B1 32 to 40 H2 Width across flats KA P E (Head side pressure port) I G G NA D Q MM NN AL N ZZ + Stroke S + Stroke N F K H A P QY

Fieldbus System

9 P. 11, 12 P. 17 P. 19 How to Order Specifications Parts Description Dimensions Series SY (IP67) Digital Unit Unit to input or output digital (switch) signals P. 9 P. 13, 14 P. 18 P. 20 How to Order Specifications Parts Description Dimensions P.27 Series SV (IP67) Analog Unit Manifold solenoid valves Unit to input or output analog (voltage/current) signals P. 10 P. 15, 16 P. 18

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

Digital Flow Switch

setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 1 Every 2 minutes or every 5 minutes Rated pressure range 0 to 0.8 MPa Proof pressure 1.2 MPa Pressure Pressure loss Refer to the pressure loss graph Pressure characteristics 2 5%F.S. (0 to 0.8 MPa, 0.6 MPa standard) Power supply voltage 12 to 24 VDC 10% Ripple (p-p

Digital Pressure Switch

. -12No.PS-OMM0003-J Terms Meaning P Peak value display Displays the maximum pressure reached up to that moment. Piping-port size The size of the port on the switch body with which a device can be connected. PNP (open collector) output The switch output that uses the PNP transistor for output.

Digital Flow Switch (Remote type sensor unit)

P Part in contact with fluid (wetted part) A part that comes into physical contact with the fluid. POWER indicator Used to confirm the power supply status. It turns on when the power supply is applied. (It may display the output specification) Pressure characteristics Indicates the change in the display value and analogue output when fluid pressure changes.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Thermo-chiller

V: Power supply voltage Power consumption P: 7 [kW] Q = P = 7 [kW] P Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

PSxx-OMU0005CN

5m 12 1015 10 SI (kPaMPa) ( ) SI kPa,MPa 13 14 15 16 FUNC 17 -73No.PS-OMU0005CN-C No. 4m 4m FUNC 18 (Er13) 10 10 () 19 ( ) / () -74No.PS-OMU0005CN-C 80mA 7F.S.(3.5F.S.) 1 1 F.S. 1 -75No.PS-OMU0005CN-C ZSE20B() ZSE20BF() ISE20B() 0.0-101.0 kPa -100.0100.0 kPa -0.1001.000 MPa / 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050 MPa / 0.1 kPa 0.001 MPa 500 kPa 1.5 MPa DC1224 V10 (p-p

Digital Pressure Switch

X578 X579 X580 Rated pressure range 500 Pa 1.000 kPa 2.00 kPa 5.00 kPa 10.00 kPa Set pressure range (Refer to page 60) 525 Pa 1.050 kPa 2.10 kPa 5.25 kPa 10.50 MPa Withstand pressure 2.5 kPa 5 kPa 10 kPa 25 kPa 50 kPa Smallest settable increment 1 Pa 0.001 kPa 0.01 kPa 0.01 kPa 0.01 kPa Applicable fluid Air, inert gases and incombustible gases Power supply voltage 12 to 24 VDC 10%, ripple (p-p

Digital Gap Checker

.: 600 kPa 1: Compared with the ISA2 with 0.2 MPa pressure gauge.

HRS100/150

V: Power supply voltage Power consumption P: 7 [kW] Q = P = 7 [kW] P Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Refrigerated Thermo-chiller

P. 192 Refrigerator P. 192 Relay P. 198 Relief valve P. 195 RS232C P. 198 RS485 P. 198 RTD (Resistance Temperature Detector) P. 196 S Sealing mechanism P. 194 SEMI F47 P. 199 SEMI S2 P. 199 SEMI S8 P. 199 Signal input/output, I/O P. 199 Solenoid valve P. 195 Solid state relay (SSR) P. 198 Specific heat/Specific heat capacity P. 195 Specific resistance P. 195 Specified CFC P. 192 SV P. 196

VQ7-6/7-8

Series VQ7-8: Manifolds P.22 How to Order Manifolds P.23 Manifold Dimensions (DIN Connector Type) P.24 Manifold Dimensions (Prewired Connector Type) Manifold Options P.25 to 27 Option Dimensions P.28, 29 Manifold Option Mounting Bolt Part Numbers P.30 Manifold Exploded View P.31, 32 Manifold Specifications Sheets P.33 to 36 Safety Instructions P.37 5 Port Solenoid Valve/Precautions P.38

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5351 (A) 4 (B) 2 VQ5350 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5451 VQ5450 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5551 (A) 4 (B) 2 VQ5550 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1 2 3 Description Material Note No. 1 2 3 Body