Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

45 3 3 5.3 5.3 250.2 250.2 16 32 2-M3 x 0.5 through 6.5 counter bore depth 5 (Same on the opposite side) 3.4 through 3 3 45 45 5.5 M2.5 x 0.45 x 6L (Cap screw) M3 x 0.5 x 12.5L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2-M3 x 0.5 through Steel ball Plug 2-M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no.

New

53 58 22.5 26.5 29 22 27 31 52 62 67 26 31 33.5 30 35 40 47.5 50 52.5 36.5 45 50.5 23 25.5 28 42.5 51 56.5 C8, C10 C10, C12 Replacement Parts DIN Connector Part No.

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator

Stability of suction position,

ZP3EA-F4-AL12 [Weight: 122 g] 24.3 24.3 M12 x 1.25 4 Width across flats 19 4 M12 x 1.25 Width across flats 19 Seal washer 25 7 2 2 Seal washer 20 45 7 20 Width across flats 4 Width across flats 4 25 45 32 32 19 19 11.11) 11.11) 30 30 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-63BM (Rotating angle) (Rotating angle) Applicable pad part no.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

HRX-OM-X010

Figure 5-45 Menu screen 2. With the use of the arrow keys ([], []), move the cursor to 2. REMOTE MODE and press the [ENT] key. The Mode Selection screen is displayed. Figure 5-46 Mode Selection screen 3. Press the [ENT] key The name of current mode LOCAL flashes and enable to switch the setting. Figure 5-47 Mode Selection screen 4.

Regulator

45 42.5 82.5 42.5 82.5 42.5 82.5 AR60-D 1/8 95 155 45 45 45 42.5 82.5 42.5 82.5 42.5 82.5 3/4 M421.5 3/4, 1 1 Bracket mount Model Optional specifications Panel mount Q R U AR20-D 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 AR40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40-06-D 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50-D 70 75 66 11 22 113

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

24 27 30 8 2 +0.2 +0.1 17 26H9 +0.052 depth 3 0 30 40 21 4-M5 x 0.8 thread depth 6 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 30.3 45 20 O S 16 4.5 4.5 23 10 M5 x 0.8 (Finger operating port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting attachment) 30 45 21 12-10-20 20 180 Angular

3

MM M 4.5 (2 locations) M4 x 0.7 (4 locations) (Special cap bolt) FX FZ Arm 5.5 FV (mm) Rod Flange M MM Model Rod state 10 mm Clamp stroke 20 mm 30 mm 10 mm Clamp stroke 20 mm 30 mm Head Flange DModel (mm) Retracted Extended Retracted Extended 23 40.5 26 43.5 33 60.5 36 63.5 17 34.5 17 34.5 43 80.5 46 83.5 27 54.5 27 54.5 37 74.5 37 74.5 MKF12-Z FV FX FZ 25 30 45 45 55 55 MKG12-Z MKG16-Z -

CG1

7 7 8 47 52 53 63.5 75.5 75.5 95 95 110 (118) 130 (138) +l 45 (53) 22 38.5 45 3.5 115.5 (123.5) 137.5 (145.5) +l 45 (53) 25 3.5 4 5 5 5 7 6.6 117.5 (125.5) 139.5 (147.5) +l 51 (60) 30 6.6 9 11 11 14 54.5 16.5 22 22 8.5 11 13 14 16 135 (144) 155 (164) +l 55 (67) 40 70.5 4.5 17.5 157.5 (169.5) 177.5 (189.5) +l CJ1 55 (67) 45 82.5 4.5 17.5 20 20 106 157.5 (169.5) 177.5 (189.5) +l 60 (74) 55

Table of Contents

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

24 27 30 8 2 +0.2 +0.1 17 26H9 +0.052 depth 3 0 30 40 21 4-M5 x 0.8 thread depth 6 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 30.3 45 20 O S 16 4.5 4.5 23 10 M5 x 0.8 (Finger operating port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting attachment) 30 45 21 12-10-20 20 180 Angular

MHY2/MHW2

24 27 8 2 20 +0.2 +0.1 17 26H9 +0.052 Depth 3 0 30 21 40 4-M5 X 0.8 Depth 6 (Thread for mounting attachment) M5 X 0.8 (Finger closing port) Auto switch mounting groove position 30.3 45 16 O S 4.5 4.5 23 10 M5 X 0.8 (Finger opening port) 5 6.45 MHW2-25D1 5.5 Right angle finger 37 18 12 6 15 16 4-M5 X 0.8 (Thread for mounting attachment) 30 21 45 MHW2-25D.SMHW2, #2 MHW2-25D1.SMHW2, #6 2.8-

MK

Note 3) When the rod is extended, the clamp stroke and rotary stroke are added to the appropriate dimensions. 4.1-18 Rotary Clamp Cylinder/Heavy Duty Series MK2 32, 40, 50, 63 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B Rear flange With arm Model E D C B G A C F A B F G D E Model ML1C 39 46 58 57.5 45 45 65 65 20 20 22 22 67 67 88 88 18 18 22 22 48 54 67 80 5.5 5.5 6.6 9 8 8 9 9 65 72 89 108 25 25 40

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

VZ100/300/500

DXT201-19-1A Note With screw (For VZ52) Refer to pages 4-6-34 to 4-6-45 for manifold use.

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

Vacuum Module Series ZX

Common pilot pressure SUP port (PS) Common vacuum pressure SUP port (PV) 106.6 61 4 x 5.5 (Mounting hole) 45 32 A: Release flow rate adjusting needle with lock nut 16.4 22.7 10 6.5 6 22.70 8 (Needle fully open) SMC SMC SMC SMC 4 20 Pitch = 21 L1 L2 L3 Manual override (Push and turn the locking type override.) Pilot valve for supply (N.O.)

Air Slide Table Series MXW

Max. collision speed (m/sec) 0.05 to 5 Max. operating frequency (cycle/min) 80 25 80 45 70 Stroke adjustment Max. allowable thrust (N) 1961 245 245 814 422 1.

180° Angular Style Air Gripper Series MHY2/MHW2

for mounting attachment) 30 45 21 673 Series MHW2 Dimensions MHW2-32D Flat finger type (Standard) 24 2 x M6 x 1 thread depth 10 (Mounting thread) 21 61.5 83.5 4 x M6 x 1 thread depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 2 x M6 x 1 thread depth 12 (Mounting thread) 47 29 42 58 45 30 32 9 +0.2 +0.1 23 2 34H9 +0.062 depth 4 0 27 30 4 x M6 x 1 thread depth 7 Rc 1/