25

silicon 100 m/s2 Ambient and fluid temperature Ambient humidity Material Impact resistance Standards/Directive CE (EMC Directive: 2004/108/EC) Note) When the air purge is performed between a charged object and an ionizer at a distance of 300 mm Number of emitter cartridges/Bar weight 340 5 590 740 860 Bar length symbol 400 6 640 790 910 460 7 690 840 960 580 9 790 940 1060 640 10 830 980 1100

Compact 5-Port Solenoid Valve

connector: IP40 IP65 IP67 I/O unit: partially IP40 Unit: g w Wiring Terminal block box Lead wire Serial wiring T type TC type L type (0.6 m) L type (1.5 m) L type (3 m) S6m type (EX600)*4 SAm type (EX245)*4 Sm type (EX250)*4 Sm type (EX260) S3m type (EX120) 680 471 404 514 698 829 520 448 367 689 480 413 523 707 838 529 457 367 709 500 433 543 727 858 935 549 477 391 914 705 638 748 932 1063 1100

KT10

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Industrial Filters

30 36 28 42 04 FGDTA 110 1000 13 32 36 46 32 57 06 FGDFA FGDCB 200 600 17 25 26 28 26 30 03 FGDEB 200 840 21 35 37 41 38 44 04 FGDTB 210 1200 23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100

energy saving effect

HEB Anchor bolt fixing position A Anchor bolt fixing position B HED 1100 (Dimension of anchor bolt fixing bracket) 756 136 1020 (Dimension of anchor bolt fixing bracket) HEA 12 x 12 670 43 670 138 8 x 12 IDH (850) (Thermo-chiller dimension) 700 (715) (Thermo-chiller dimension) 627 43 617 752 50 (954) (Thermo-chiller dimension) 19 76 984 19 (1035) (Thermo-chiller dimension) 1064 View A-A View

Refrigerated Air Dryer For Use in North, Central and South America

pressure dew point 50F (10C) 177 (300) 251 (426) 353 (600) 459 (780) Inlet air pressure [psi (MPa)] 100 (0.7) Inlet air temperature [F (C)] 100 (37.8) Ambient temperature [F (C)] 100 (37.8) Single-phase 115 VAC (60 Hz) Single-phase 230 VAC (60 Hz) Power supply voltage (Frequency)4 Maximum air flow capacity Air flow capacity calculated with the correction factors Power consumption5 [W] 1100

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Use flexible tubing in between to avoid such an effect. 1100

Slider Type Ball Screw Drive/11-LEFS Series

Operating condition Model LC3F2 A LEC-MR-RB-032 B LEC-MR-RB-12 Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm

•

(A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

AZ1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

C76

can be used according to buckling strength 100.0 Nominal symbol C76 Mounting bracket diagram 32 40 (MPa) Lateral load applied to the rod end fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100

ISO Cylinder

93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1 0.3 38 79 0.1 (40)1 (40)1 Head ( side ) 0.5 37 29 60 76 600 500 400 300 1000 1100

CHKD/CHKG

8078 50 414 551 902 1224 1731 2754 4846 8320 75 1117 1499 2101 3299 5661 9530 100 1332 1774 2471 3844 6476 10740 Unit: g CHKDL/Foot type Bore size (mm) Standard stroke (mm) 5 10 15 20 25 30 35 40 45 50 75 100 20 25 32 40 50 63 80 100 1505 2195 3310 5475 9150 14930 560 690 1060 1610 2515 4310 7410 12375 465 570 880 1375 2200 3845 6555 11355 490 600 925 1435 2280 3960 6725 11610 580 720 1100

Compact Hydraulic Cylinder

25014 7147 Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight Unit: g Male thread additional weight 5 Cylinder stroke (mm) Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 32 40 50 180 200 220 240 260 280 300 320 340 360 10 610 710 330 350 370 390 410 430 450 470 490 510 52 760 860 480 500 520 540 560 580 600 620 640 660 52 1250 1400 860 890 920 950 980 1010 1040 1070 1100

Cylinder

IO 28J3 3 38 10 5 , 1O,~ 25a 610 15 5.10,'5 450 I 1100 *' WeIght of hose nipple(.dgf) IS not included. lllSame spring force 1 0 f each stroke. Hose Nipple For Panel Mount Type(With Fixed Orifice) Stroke Bore size (mm) Stroke (mm) 6/4 '~ CJ-5H-6 . , I w'"" .Jt.'

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Use flexible tubing in between to avoid such an effect. 1100

Possible to transfer a workpiece at low-speed.

pattern sequencing II Weight S,W,X,T,J Reversed shaft XC8 to XC11 Change of rotating range (g) Change of angle adjustable range (0 to 100)" XC12 to XC15 Size Standard weight 90 180 S,W,Y Change of angle adjustable range (90 to 190)" XC16, XC17 10 X,Z,T, 120 150 15 J,K 220 270 XC18, XC19 Change of rotating range 20 600 700 Change of angle adjustable range (90 to 190)" XC20, XC21 30 900 1100

3

Max. operating pressure differential Note 3) (MPa) Flow rate characteristics Max. system pressure Note 3) (MPa) Weight Note 2) (g) AC DC Kv Cv Body material Size Port size (Nominal diameter) Orifice diameter (mm) Model Min. operating pressure differential Note 1) (MPa) VXH 2.1 2.4 3 1/4 (8A) 10 VXS235 600 3/8 (10A) 2.4 2.8 4 1/2 (15A) 15 VXS245 4.6 5.3 720 5 3/4 (20A) 20 VXS255 7.9 9.2 1100