Peltier-type Chiller Thermo-con/ Compact Type

D-G

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

Thermo-chiller

D-G

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

AMD

Local Area: (800) 258-9200-www.stevenengineering.com Label Model Connection (Flange) 2B 2B, 3B, 4B 400 A 280 B 760 D 150 E 270 F 1033 G 3 H 887 J 6B C 620 AMD801 AMD901 445 795 300 520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900

High Vacuum L Type Valve

E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87

High Vacuum L Type Valve

E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87

VDW Series

Enter together in order, counting from station 1 on the D side.

Heavy Duty Stopper Cylinder Series RSH/RS1H

, D-Z76, D-Z80 Auto Switch Specifications Grommet D-Z7 (with indicator light) D-Z73 D-Z76 Auto switch part no.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

BBA1: D-A5/A6/F5/J5 types *"D-F5BAL" switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, "BBA1" screws are attached.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500

Magnetically Coupled

JM-025 NSNJ-015 JM-08 NSN-03 NSN-04 0.26 0.30 0.30 0.39 0.39 0.51 0.51 1.00 1.13 1.50 2.00 2.00 2.13 2.50 2.50 3.00 0.47 0.59 0.71 0.91 1.08 1.36 2.44 2.50 3.25 4.17 4.38 4.88 5.88 7.00 7.50 1.18 1.26 5/16-24UNF 3/8-24UNF 3.07 3.24 3.99 5.19 5.38 6.14 7.14 7.16 7.66 C H B d 1/4-28UNF 3/8-24UNF 5/8-18UNF 1-12UNF 1-1/4-12UNF H 0.16 0.12 0.38 0.31 0.43 B 0.44 0.55 0.94 1.22 1.61 C 0.51 0.64

Large blow and

ZH--X185 Series Dimensions ZH10 20--X185 Fluid passage dia.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28

PFxx-OMP0001CN

d.

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

218 210 to 420 Max. speed[mm/s] *1 *3 400 200 100 400 200 400 200 Actuator specifications Pushing speed[mm/s] 20 to 30 10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line

XLA- ∗ -F7NJ ∗ - ∗ Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.

Air Slide Table/Long Stroke Type Series MXY

50 300 350 400 100 150 Stroke MXY6 2 3 3 4 54 39 34 59 MXY8 2 44 2 3 4 5 5 39 64 54 34 59 MXY12 2 2 67 3 3 4 4 5 5 37 62 42 47 72 52 77 224 Series MXY Air Slide Table Long Stroke Type Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch D-A90(V), D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Auto switch operating range A B A B A B

IP8001 Series

Mode button 1s Set button 1s or Mode button 1s Set button 1s Fig. 41-1 No.IP8S-OM09 57 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 41-2 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 41-3 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant

CYV

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Enter together in order, counting from station 1 on the D side.