IDU/IDF

dryer Applicable dryer Port size Rc E D D C A B Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (

VDW Series

Enter together in order, counting from station 1 on the D side.

PFxx-OMA1007

Silencer Compact resin type Metal body type High noise reduction type Part Part number number AN20-02 AN30-03 AN40-04 AN500-06 AN600-10 AN202-02 AN302-03 AN402-04 ANA1-06 ANA1-10 Piping size 1/4 3/8 1/2 3/4 1 1/4 3/8 1/2 3/4 1 AMA20#-##C-#-#L# NC AMA20#-##D-#-#L# NO AMA30#-##C-#-#L# NC AMA30#-##D-#-#L# NO AMA40#-##C-#-#L# NC AMA40#-##D-#-#L# NO AMA60#-##C-#-#L# NC AMA60#-##D-#-#L# NO -147No.PF-OMA1007

Slider Type/Ball Bushing Bearing

B A (mm) Applicable auto switch D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV D-F79F Other than the models listed in How to Order, the following auto switches are applicable. For detailed specifications, refer to page 1627.

Shock Absorbers and Rate Controls

l o E g ::.: # 2A 1 0 0 : 0 0.2 0.4 0.6 0.8 I 1.2 1.4 1.6 TOTAL ENEFIGY (in bs/c) (Ihousaids) TOTAL ENEFGY (inrbs,t) .,,' 9 . . ' . r n I c { d E o 8 E , d o . i E i d TOTAL ENEFIGY (iN]bS/C) (Thousands) TOTAL ENERGY (rnlbsc) |o c{ N 0 E o. 5 5 m TOTAL ENERGY (in'lbebJ rTho!sands) l{ote Minimum impact velocity fol PRO modls is 10 in./sec.

MX-OMP0051

RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A) 5.5 5 MXQ25(A) 10 8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

0 D 2 kPa F 0.2 kPa Range 1 0.6 4 2.4 A C E F B D A C E F B D Pressure Differential pressure Pressure Differential pressure 848 Pressure Sensor Controller Series PSE300 Internal Circuit PSE30 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k PSE33 PNP open collector output (2 outputs), Max. 80 mA,

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

SMC Pneumatic Clean Series

type 10 C D J 2 W L 16 60 H7B 21 C D J 2 W L 16 60 H7B Number of auto switches 2 pcs. 1 pc. n pcs.

VQ7-6/7-8

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

Digital Gap Checker

Description 1 DC (+) 18 6.5 2 N.C. 24 Supply port ISA3-C: Rc1/8 ISA3-F: G1/8 1 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 1 3 DC () 36 4 OUT1 Unit: mm 1: Conforming to ISO1179-1 Stations 1 2 3 4 5 6 (49) 47 L1 38 76 114 152 190 228 18 2 Piping type C (4 One-touch fitting) C (6 One-touch fitting) F (G thread) H 13 13.6 19 ISA3-mm (DIN rail mounting) 2 1 3 1.8 L1 (23) 7 (41.1) 38

VZ1000

DIN Rail Manifold Type 25F DIN Rail Manifold (Plug-in) VK VV4Z1-25FDStation -00C (2 to 10 stations) VZ One-touch fitting (P, R port) Applicable tubing model: T0604 VF (A, B port) (A port) VFR VP4 D side U side VZS DIN rail holding screw No. 1 terminal Applicable connector D-SUB { } JIS-X-5101 MIL-C-24308 (Pitch) Manual override (Non-locking) VFS (Rail mounting hole pitch 12.5) VS4 D side

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

Rotary Cylinder Series MRQ

Model: MRQBS32-50CA-A73 Operating pressure: 0.5MPa Calculate the amount of air requirement for A, B, C and D respectively. A = 0.06 x 40.2 x {(0.5 + 0.1)/0.1}/0.5 = 28.9L/min B = 0.06 x 4.88 x {(0.5 + 0.1)/0.1}/0.5 = 3.5L/min C = B = 3.5L/min D = 0.06 x 33.7 x {(0.5 + 0.1)/0.1}/0.5 = 24.3L/min Since operation is simultaneous at C and D, total the respective amounts of air requirement.

CKZ2N

A B C D E F G H I J L M Part no.

Digital Flow Switches

Do not connect the white wire of the sensor to c of the display unit.

Large Size Vacuum Module: Series ZR

for vacuum (ZSE2) + Filter Filter Caution ZL D Lead wire specifications Digital pressure switch for vacuum (ZSE30A) specifications (D) E F 1.

EX510

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-