MRQ

(mm) (mm) 5 20 25 30 10 15 Stroke 50 40 75 100 Y 15 15 20 20 25 12.5 12.5 17.5 15 30 Q 30 20 20 20 73.5 E 66 71 63.5 63.5 63.5 58.5 61 61 61 MRQFS32SMRQ32, #3 (Flange only) 1.5-13 Series MRQ Size40 Basic Style/MRQBS40 The dimensions below shows an actuator with a rotation angle of 80 to 100 style.

ZR

Example) ZR100-K15MZ-E . 1 ZR1-RV3 . 1 13-3-37 37 Series ZR Valve Unit: ZR1-V Specifications ZR1-V Valve unit part no.

RQ

End Male Thread Bore size (mm) X C1 H1 L1 63 80 100 26 28.5 M18 x 1.5 33.5 32.5 35.5 M22 x 1.5 43.5 32.5 35.5 M26 x 1.5 43.5 Basic Style Stroke range (mm) Bore size (mm) 63 80 100 A B C D E F H I J K L M N OB P 63 55 15 20 77 31 M10 x 1.5 103 7 17 8 60 9 14 Rc 1/4 30 to 100 73.5 63.5 21 25 98 35.5 M16 x 2.0 132 6 22 10 77 11 17.5 Rc 3/8 40 to 100 88 76 27 30 117 40 M20 x 2.5 156 6.5 27 12

XLA Series

(KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E

JXCx-OMY0008

J X C E H Electric equipment Actuator Model Controller Stroke example: Controller type For LEFS25FB-100B-S1CE17, E EtherCAT specify LEFS25FB-100.

Air Fittings & Tubing

H w H w H e e H H r 2.2-2 Series KJ Male connector: KJH Thread (T) UNF NPT 10-32UNF <10-32UNF> <10-32UNF> Tube O.D. (inch) H (Hex.) Min. hole dia.

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Sine Rodless Cylinder Series REA/REB

Models suitable to satisfy the requirement of 100 (N) are REA32 or REA40.

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y A Connection thread S 10 94 60 23 20 132 70 51 30 142 80 40 178 90 77 50 188 100 E D C B 10 49 32.9 24 P 10 8 M5 x 04 06 2.5 Applicable tubing O.D.

Compact Manifold Regulator

0 50 100 150 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate L/min

E-ITV-STD-RF-A

i s not out put , even i f F_1 i s adj ust ed t o l ess t han 0% . ( N ot e 3) : F_2 i s adj ust abl e i n a range f rom 10 t o 120% of t he rat ed val ue. ( D EFAU LT VALU E: 100% ) ( N ot e 4) : D o not i nput t he si gnal as l i ke out put t he pressure of m ore t han 100% .

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

MQQ

L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5

Direct Operated

E B1 A A B2 B2 B1 Conduit terminal: T DIN terminal: D F J D Cable 6 to 12 F M J 34 G1/2 D 25 Width across flats H Width across flats H N 44 K K C C M Port size 3 x P Port size 3 x P E E A A B2 B2 B1 B1 G1/2 With bracket T 4 Q (mm) Grommet Conduit DIN terminal Electrical entry (AC/Class B) Model Orifice diameter Port size P Conduit terminal J K J K J K M J K M N N.C., N.O., COM.

Digital Gap Checker

ISA3-A ISA3-B Refer to the VX2 series Operation Manual for wiring details of the VX2 series (2 port solenoid valve). -38No.PS-OMT0002-E 3 Installation Part structure Without control unit -39No.PS-OMT0002-E 3 Installation With control unit (Supply port: Left side) -40No.PS-OMT0002-E 3 Installation With control unit (Supply port: Right side) -41No.PS-OMT0002-E 4 How to use Outline of setting

Step Motor Driver （ Pulse input type ）

2000 2000 2000 2000 Step data default Deceleration 2000 2000 2000 2000 Pushing force 100 100 100 100 Trigger LV 100 100 100 100 Pushing speed 50 50 50 50 Moving force 100 100 100 100 Area1 0.00 0.00 0.00 0.00 Area2 0.00 0.00 0.00 0.00 In position 0.50 0.50 0.50 0.50 100 - LEHS Basic parameter default Model LEHS10 LEHS20 LEHS32 LEHS40 Lead [mm] 255 / 76 235 / 56 235 / 40 235 / 40 Controller

Compact and Lightweight

100 100 100 100 100 Vacuum pressure Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 80 80 80 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure Air consumption 60 60 60 60 60 60 Suction flow rate Air consumption 40 40 40 40 40 40 Suction flow rate 20 20

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

HRL

Technical Data HRS-R HRS HRS090 HRS 100/150 HRS200 HRSH090 HRSH HRSE HRR HRL HRZ HRZD HRW HECR HEC HED HEB Lots of variations are available according to the users requirements.