MHZ

12 V IC circuit 3-wire (PNP) Solid state switch Relay, PLC 2-wire 24 V Grommet Yes 12 V 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Diagnosis (2-color indicator) 2-wire 12V Note 2) Add -61 at the end of the part number for the flexible lead wire.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

1 ("," (23 MM *" ML NN $+, -& DA DB U R H V T L CV C ' ()" J K Q E B ' ()" G MVGQ TA TB S A ' ()" 4" 5," + +"/ 00."* (23 6 1 7"/" 8 MVGQM, MVGQL Common Dimensions $%%& B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z -,.09-" -"/,* !0-!" !"

Digital Flow Switch

Symbol Model S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0002-B Lead wire with M8 connector (ZS-40-A) -72No.PF-OMS0002-B Revision history A: Contents revised in several places.

Mechanically Jointed Rodless Cylinder Series MY1

MY1H40 MY3M B MY-S16A B MY-S20A B MY-S25A B MY-S32A B MY-S40A B A set of side supports consists of a left support and a right support.

3 Position Cylinder Series RZQ

O 2 x N 4.2 b Section b-b Use two through-holes for mounting. 50, 63 Flat washer: 4 positions (Included) 4 x RR 4 x RH Washer b' 4 x O 4 x N b' Section b'-b' Use four through-holes for mounting.

HRS100/150

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 97 Thermo-chiller Standard Type HRS100/150 Series

Electric Actuators

B 89 A A B Section BB Coupling P.C.D.

Compact Cylinder

Hs B A Reed switch Solid state switch D-A9 V D-M9 V D-F9 WV 20, 25 Hs B A 32, 40, 50, 63 Figures in the table below are used as a reference when mounting the auto switches for stroke end detection. In the case of actually setting the auto switches, adjust them after confirming their operation.

Compact Cylinder/Guide Rod Type Series CQM

A96V A96 IC circuit 5 V Yes A72 A72H Grommet Reed switch 12 V 200 V 100 V A93V A90V A93 A90 IC circuit 5 V,12 V 12 V 100 V or less No Relay, PLC 2-wire 24 V A73C A80C A79W Yes No Connector IC circuit 5 V,12 V 24 V or less Grommet Yes With diagnostic output (2-color indication) Solid state auto switches marked with a "" are produced upon receipt of order.

NCA1

Female Rod End B .

Air Cylinder NCA1 Series

Female Rod End B .

Compact

BMY3-016 Auto switch model Tightening torque D-M9l(V) D-M9lW(V) 0.10 to 0.15 210 Solid State Auto Switch Direct Mounting Type D-M9N(V)/D-M9P(V)/D-M9B(V) RoHS Refer to SMC website for the details of the products conforming to the international standards.

Compact Type Dual-Rod Cylinder Series CXSJ

-color display) 5 V,12 V 2-wire 12 V Water resistant (2-color display) . . .

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

Compact Cylinder with Air Cushion Series RQ

A96V A96 IC circuit 5 V Yes A72 A72H 12 V 200 V 100 V Grommet A93V A90V A93 A90 IC circuit 5 V,12 V 12 V 100 V or less No Relay, PLC 2-wire A73C A80C A79W 24 V Yes No Connector IC circuit 5 V,12 V 24 V or less Grommet Yes Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ

Compact Vacuum Unit

V B 0.185 6 ZB0020-K1Vacuum pump system Release pressure SUP (PD) port 1 M5 thread depth 0.158 Port open to atmosphere Air pressure SUP Vacuum pressure SUP (PV) port Supply valve M5 thread depth 0.158 PV Release valve 0.04 PD 0.287 0.394 Silencer cover (Detachable) V (inch) 10 11 J1 Q2 L(O) M(O) ZB Port type A B C2 C4 N1 N3 L2 L4 LN1 LN3 0.16 0.3 0.29 0.3 0.33 0.33 0.33 0.33 3.09 3.22 3.22

CXS

IC circuit A96V A96 5 V Reed switch Yes Yes Grommet 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC 3-wire (NPN) IC circuit 5 V,12 V 2-wire 3-wire (PNP) 12 V Solid state switch Relay, PLC Grommet 5 V,12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color

CXS

IC circuit A96V A96 5 V Reed switch Yes Yes Grommet 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC 3-wire (NPN) IC circuit 5 V,12 V 2-wire 3-wire (PNP) 12 V Solid state switch Relay, PLC Grommet 5 V,12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color

Plug-in Unit

65.5 P=25 A A A B A B A B A B A B 21 21 63 9 A A A A A A A 143 163 66 41.5 9 B B B B B SI unit Input block 10 n 1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas L1 = 25n + 106 (Maximum 16 single wiring stations) L2: For one input block.