ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D-K39 D-A3m D-A44 D-M9m(V) D-M9mW(V) D-M9mA(V) D-A9m(V) D-F5NTL D-A5m D-A6m D-A59W D-P4DW Bore size A B A B A B A B A B A B A B A B A B 32 14 10.5 10 6.5 10.5 7 15.5 12 4 0 8 4.5 7.5 4 4 0 7 3.5 40 14 14 10 10 10.5 10.5 15.5 15.5 4 4 8 8 7.5 7.5 4 4 7 7 50 15.5 14.5 11.5 10.5 12 11 17 16 5.5 4.5 9.5 8.5 9 8 5.5 4.5 8.5 7.5 63 16.5 15.5 12.5 11.5 13 12 18 17 6.5 5.5 10.5 9.5 10 9 6.5 5.5

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

NCM

Note 2) When setting an auto switch, confirm the operation and adjust its mounting position. 49 Series NCM Auto Switch Proper Mounting Position and Its Mounting Height (Double rod) D-M9(V)/M9W(V) D-A9(V) HS HS 0.66 0.66 A 0.88 B A 0.88 B (0.98) ( ):D-A93 HS D-C7/C8 0.66 HS A 0.88 B 0.63 1.02 A B D-H7/H7W/H7NF/H7BAL D-B5/B6/B59W HS HS 0.96 SMC SMC 0.63 1.30 A B B A (1.42) 1.14 D-G5NTL

Vacuum Unit

C E J K P Nil Without option V V V V B With DIN rail mounting bracket3 V V V V Example ZK2Q00R5NC1A-06 ZK2Q00R5NC1A-08 D With common release pressure supply (PD) port V V V V 4 ZZK204A-P2P-B 2 When more than one option is selected, list the option symbols in alphabetical order. (Example -BD) 3 The DIN rail should be ordered separately.

24

v v v v v v -XC89W v v v v v v v -XC91 v v v v v v -XC92 v v v v v v v -X144 -X867 D-X 429 B C O N T E N T S Compact Guide Cylinder MGP Series PCompact Guide Cylinder/Basic Type MGP-Z Series How to Order Page 432 Specifications Page 433 Clean Series Page 435 Water Resistant Cylinder Page 435 Cylinder with Stable Lubrication Function (Lube-retainer) Page 436 Guide Unit with Lube-retainer

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CDRB2BW10/15-S CDRB2BW20/30-S CRB2 Circumference divided in 6 equivalants CRBU2 Including CRB1 MSU A port B port CRJ A port B port CRA1 CRQ2 MSQ MRQ D20A port B port A port B port (34.5: Connector type) 1 Auto switch Auto switch 2 15 20.5 (26.5: Connector type) 1 The length is 24 when any of the following auto switches are used: D-90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1-B 270 LE-CA-3-B 520 LE-CA-5-B 870 LE-CA-8-B 1370 LE-CA-A-B 1710 LE-CA-B-B 2560 LE-CA-C-B 3400 U V W Red White Black Connector A2 terminal no. B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Cylinder with Lock

Mounting Symbol Description Single rod Double rod B Basic v v L Axial foot v v F Rod flange v v G Head flange v v C Single clevis v D Double clevis v T Center trunnion v v Pivot bracket Number of auto switches Nil No bracket N Pivot bracket Cylinder stroke [mm] Refer to page 26 for standard strokes.

Rotary Actuator

V V V V V V Single shaft with four chamfers X V V V V V V V V V Double shaft with key Y V V V V V V V V V Shaft type Standard Double shaft with four chamfers Z V V V V V V V V V Single round shaft T V V V V V V V V V Double shaft (round shaft, with four chamfers) J V V V V V V V V V Double round shaft K V V V V V V V V V Cushion None V V V V V V V V V Air cushion V V V V V With auto switch

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

J79W F7BA 200 V 100 V Relay, PLC Yes 2-wire 12 V Connector 24 V Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC 24 V Water resistant (2-color indication) 12 V 2-wire Grommet With diagnostic output

Table of Contents

Example: Analog output = 1 to 5 [V] F.S. = 5 [V] 1 [V] = 4 [V] 3 [% F.S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 0.12 [V].

CJ2

V 100 V 2-wire Yes Yes 12 V Relay, PLC Connector 24 V With diagnostic output (2-color indication) A79W Grommet 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F79W F7PW J79W F7BA F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indication

Magnetically Coupled Rodless Cylinder

Auto Switch Proper Mounting Position (mm) A B C D Auto switch model D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V K dimension (Switch rail height) Bore size 6 3 6 11 16 20 26 28 5.5 5.5 5.5 6 6 7.5 6.5 1.5 1.5 1.5

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

V100

110 VAC [115 VAC] VFN 220 VAC [230 VAC] Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Nil: Non-locking push type D: Push-turn locking slotted type G: 300 mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking

AC Servo Motor Driver (CC-Link Type ）

B1 B1 Electromagnetic brake Electromagnetic brake Switch Switch lock lock 24 V DC power supply for electromagnetic brake 24 V DC power supply for electromagnetic brake or VAR VAR U B U B lock lock B2 B2 The surge absorber (VAR) must be installed between B1 and B2.