ITV

0 10 NBR Seal 11 Stainless steel Bias spring !9 u 12 NBR O-ring 13 NBR Seal q Resin 14 Bowl assembly @2 Silicone rubber y 15 Resin Sub-plate OUT SUP 16 NBR Seal !

Fieldbus system EtherCAT compatible SI Unit

Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V Selects the analogue input range. (AXB cannot select the following ranges. -10..10 V/ -5..5 V/ -20..20 mA) -5..5 V -10..10 V -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

Free Mount Cylinder Series CU

10 11 8 8 8 8 10 12 9 12 17 20 22 29 11 12 13 16 20 24 20.5 22 28 33 43.5 51.5 15 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 DNN P Q QA R T Y S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40

VCL

(mm) 2 3 4 5 7 10 Class 4 v v v v v Symbol 2 3 4 5 7 10 VCW Refer to the below table for orifice and port size combinations.

5 Port Solenoid Valve Series VQZ1000/2000/3000

or less 10 or less 25 or less 30 or less 25 or less 30 or less 30 or less 18 or less 20 or less 10 or less 12 or less 28 or less 30 or less 28 or less 30 or less 28 or less 30 or less 21 or less 33 or less 10 or less 15 or less 33 or less 35 or less 33 or less 35 or less 33 or less 35 or less 12 or less 12 or less 10 or less 10 or less 20 or less 25 or less 20 or less 25 or less 25 or less

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

High Purity Chemical Valve

1/4, 3/8 LVC4m 10 10, 12 3/8, 1/2 LVC5m 16 12, 19 1/2, 3/4 LVC6m 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

Air Slide Table Series MXP

10 J 28 27 3 0 +0.030 , depth 1.5 4 6 10 9.5 Section AA 3 0 +0.030 , depth 1.5 Q QL Mounting datum level D B MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 DL 6 x M3 x 0.5, depth 4 2 x M3 x 0.5, depth 3.5 15 15 -X (mm) Individual -X G H J K L M N Q QL S V W Z Model MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20

MQQ

Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23

MQQ

B FD FT FV FX RS Q G 10 10 to 40 61.5 79.5 4.5 5.5 30 45 FV 16 10 to 60 70.5 90.5 6.6 8 39 48 RS H A 20 10 to 60 79 99 6.6 8 42 52 FT FX 25 10 to 50, 75, 100 84.5 106.5 5.5 8 48 56 L B + Stroke RZQ FZ 28 10 to 50, 75, 100 104 126 5.5 8 54 62 A + Stroke 2-FD MI W S Bore size (mm) FZ L M 25, 28 CEP1 10 55 18 16 60 20 FV CE1 20 64 20 25 65 22 34 CE2 28 72 22 40 FT FX L B + Stroke FZ ML2B

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

Fieldbus system PROFINET compatible SI Unit

Parts and description Fig. 10-1 Allocation of parts on the EX245-EA2-1 Fig. 10-2 Allocation of parts on the EX245-EA2-2 70 No.EX-OMW0011-B Fig. 10-3 Allocation of parts on the EX245-EA2-3 Fig. 10-4 Allocation of parts on the EX245-EA2-4 71 No.EX-OMW0011-B Fig. 10-5 Allocation of parts on the EX245-EA2-5 72 No.EX-OMW0011-B 10.2.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

2/3 Port Valve

effective area Q=11S P(P2+1.033).kg/h Equation in the domain of sonic flow Calculation by Cv factor Q=98.9Cv(p1+1.033).kg/h Calculation by effective area Q=5.51S(P1+1.033).kg/h 4.2-38 VND Flow Characteristics Water/VND 2 to 7 should be N.O. to suppress water hammer.

VM

I 10 I G H F E X H .

Compact Rotary Actuator Series CRQ2

A grease pack (10 g) is included. When only a grease pack is needed, order with the following part number. Replacement parts/Grease pack part no: P523010-21 (10 g) 321 Series CRQ2X Construction With auto switch Size 20/30/40 With auto switch Size 10/15 !0 !3 !3 !0 !4 !7 !1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !

Booster Regulator/Air Tank

V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 3 Booster Regulator Series VBA VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.

CM2

SCM232A, #10, #19 CM2E40SCM240A, #10 SCM240A, #10, #19 The data shows auto switch equipped styles.

REA/REB

Speed 600 mm/s REAS25 8 4 7 10 11 6.5 26.4 16 8.5 70 54 40 20 14 REAS32 8 5 7 12.5 14 8 33.6 20 9.5 86 66 46 24 16 REAS40 10 5 10 12.5 14 8 41.6 25 10.5 104 76 57 25 20 J x K HP HS HT L LD M MM N NN Model REAS15 M8 x 1.0 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5 x 0.8 7.5 REAS20 M10 x 1.0 45 25.5 10 M6 x 1.0 x 9.5 70 5.6 10 M6 x 1.0 9.5 REAS25 M14 x 1.5 53 23 10 M8 x 1.25 x 10 70 7 10 M6 x 1.0