,

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing August, 2003 D-YGA P-120 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

2–4

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing September, 2003 D-DN P-120 (DN) Printed in Japan.

CRJ

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing May, 2001 D-SMC.L.A. P-80 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global envionment.

CYV

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing January, 2001 D-SMC.L.A.

Electric Actuator with Integrated Guide

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

CYP

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing December, 1999 D-SMC.L.A. P-80 (D)

Pressure Relief 3 Port Valve With Locking Holes

Under the New Measurement Law, products for overseas use only (SI unit type for use in Japan). 02 1/4 X X X 03 3/8 X X 04 1/2 X 06 3/4 X X Options 10 1 X Nil B With bracket Handle / Bonnet material S Built-in Silencer (EXH port) A Flame resistant PBT B: Packed together S: Assembled for shipping B Aluminum # For connection of the modular type FRL combination, the spacer or the spacer with

ALF400 to 900, ALT-5/-9

lube Air Oil Auto feed tank PT ALF400 ALT-9 Oil distributor Auto feed tank 14-13-6 Auto Feed Lube, Auto Feed Tank Series ALF400 to 900, ALT-5, -9 How to Order Operating Pressure Range Tank and line pressure ALF 40 02 0 Tank pressure (MPa) (2) (1) Option Operating allowable range Operating allowable range Auto Feed Lube Port size Description Applicable model Symbol Nil 02 03

,

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing October, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Series VS

/04/06/10w SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 2 PORTS A,B, PORTS 2-1/8 PILOT EXH PORTS A A B A B C SIZE 2 7 SIZE 3 9 2 MOUNTING HOLES SIZE 2 3/8 SIZE 3 1/2 5 PORTS D D **I 37 **I 39 F J 4 14 2 12 E K G M12 CONNECTOR (OPTIONAL) L 1 5 3 M M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P

VX31/32/33

5 6 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) Table (2) Solenoid Valve Option AC Note) Note) Seal material Body material/ Shading coil material Note Note) Guide pin material Main valve poppet Coil insulation type Option symbol Fixed sealant Nil C37 Stainless steel Stainless steel DC NBR NBR G Note 1) Option S, Z are not available as surge

Industrial Filter FGD Series

Industrial Filter FGD Series How to Order FGD C A 03 B N 002 Made to Order Symbol Element length Description None With differential pressure indicator Symbol Nil Element length L250 L500 (L250 x 2) A B X77 With differential pressure indication switch X78 Symbol Port size Port size Rc 3/8 1/2 3/4 Accessory 03 04 06 Accessory None Bracket Symbol Nil -B Symbol Element category Symbol Element

AC20-A to AC40-A

Air Combination Air Filter + Regulator + Lubricator AC20-A to AC40-A JIS Symbol 2 1 L How to Order AC A 30 03 DG Option/Semi-standard:Selectoneeachforatom. Option/Attachment/Semi-standardsymbol:Whenmorethanone specificationisrequired,indicateinalphanumericorder.

High Precision Filter for Liquids FGH Series

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Element classification Note) Port size 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Compact Cylinder

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JO printing NZ 6000SZ Printed in Japan.

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Exhaust Cleaner Series AMC

Thread type Nil R, Rc N NPT F G 1 4 Port size 02 Female Female Male Female Female Male 10 1 2 14 20 1 1 Male Male Male VEX 03 3 8 1 AN 04 1 2 06 3 4 AMC Specifications JIS Symbol Ambient and fluid temperature Fluid Compressed air 5 to 60C 0.1 MPa or less Element inlet pressure Noise reduction Oil mist removal 35 dB or more 99.9% or more How to Order Oil Bowl Assembly Drain cock (Standard