E-ITV-STD-RF-A

S. .

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

J L Bracket part no.

ZSE5/ISE5

Jf Sl.W') GNOI~1 : ~EDiM,> I OIlC\ ~SlW< ::HJ1eIma ~ __ _ ___ J !... ___ _ _ J !... _ _ __ J Precautions Construction/ Parts List Piping (DBe sure to apply a wrench to the metal seclion (17mm) during piping. Never apply a wrench to the resin section of the main unit. , ::g}Clean tube fittings by air-blow (0 remove foreign matter from inside.

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

Compact Manifold Regulator

S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

S Couplers Series KK/KKH/KK13

Couplers Able to absorb drop impact (equivalent to impact energy of 0.5 J).

Oil Filter FH150 Series

(kg) Model FH150-02 FH150-03 FH150-04 1/4 80 168.5 197.5 259.5 50 15 25 7 6.5 0.7 3/8 1/2 524

AMR3000 to 6000

R S AMR 4 0 00 02 E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR300-02 to 03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.) 8 3 standard standard standard Pressure switch 1 2 E2 E3 E4 E6 E10

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

S S OUT IN OUT IN IN IN Bottom With display rotating function One-touch fitting 8 Female thread Rc, NPT, G 1/4 OUT IN OUT IN S S IN 1 IN 1 Functions Bypass structure Sensor unit Protruding part (Refer to page 15 and 16 for details.)

PF-OMN0009_C

69.5 67.5 PF3W520S--T 123 54 85.2 73.5 71.5 PF3W540S--T 153 71 105.5 90 89 -45No.PF-OMN0009CN-F PF3W511-U25/PF3W521-U30(PVC ) 2X A B D E F J K L N P Q 25 A 154 46 77 57.6 23 77 63 28 18 3.5 14 32 30 A 146 56 91 71.6 28.5 73 60.5 25 27.5 3.5 14 38 S T U V W Y Z 25 A 59 36 48 58 70 7 2 -46No.PF-OMN0009CN-F M8 (ZS-40-A) ()4 ()3 1() -47No.PF-OMN0009CN-F EPDM EPDM 11 11 PVC 420 mA 2

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

D. P. Lube ALD600/900 Series

Lube Unit/ALDU600-06 to 10, ALDU900-12 to 20 Float switch mounting position Mounting thread M12 R 3.2 S 40 Q IN P M N M L A B C E E F G K J (Bracket mounting dimensions) H D S Bracket (Option) Panel (Option) 6 x 17 A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 289 291.2 453 453 476 24.5 13.6 51 45.5 14.5 69.5 78.2 89 94.5 102.5 4

AME

It cannot be used if connected in the opposite direction. 4.6-24 Series AME Dimensions: AME150 to AME350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4, 3/8

Industrial Filter FGD Series

seal material Note) Material Bronze Stainless steel Polypropylene Glass fiber Cotton Cotton Stainless steel 304/Epoxy Stainless steel 316 Polyester/Polypropylene Element type Element seal material Non-asbestos Fluororesin NBR FKM B S T G H P M L J Sintered metal A T N V Fiber (Honeycomb) Note) Refer to the below table for the element seal material types by the element category.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

AME

Dimensions Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size (Option) HA Maintenance space AT ID AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G AM I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

(N specifications) AS4200-04 How to Order 01 S AS 2 2 0 0 AS3200-03 Body size AS2200-02 1 2 3 4 M3, M5 standard AS2200-01 AS1200-M5 Made to Order Refer to page 647 for details. 1 8 1 4 , standard standard standard 8 3 2 1 Lock nut option J Hexagon lock nut Round lock nut Nil Type AS1200-M3 Direct cylinder elbow type 2 Option AS1400-M3 Direct cylinder flat elbow type 4 Nil None With seal S

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

F K A N NB lB H S + Stroke ZZ + Stroke Locking at rod end: MBBB Rl Bore size Stroke Locking at both ends: MBBB Wl Bore size Stroke Hl/Rl (mm) Width across flats Bore size (mm) Effective thread length Stroke range (mm) MM MB MA LL K J HN HR H GB G F E DL D lC lB A 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 19.5 27 32 32 37 37 M10 X 1.25 M14 X 1.5 M18 X 1.5