MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 42 29 11 7.5 8 8.5 9 M4 x 0.7 10 12 13 15 M4 x 0.7 4.3 4.3 5.6 5.6 M5 x 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 8 8 10 10 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 5 5 6 6 13 15 18 21 18 26 30 36 42 13 15 18 21 18 22 24 30 12 16 20 25 10, 20, 30, 40, 50, 75, 100 125, 150

ZP

Hexagon width across flats 21 J Width across flats 37 4-M4 x 0.7 Width across flats 24 28 45 I I 3-M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) Model B A C D E F G H I J Y Model B A C D E F G H I J Y ZPX40HBJ25-B01-A18 ZPX63HBJ25-B01-A18 109 160 120 171 50-B01-A18 50-B01-A18 40 41.4 28.4 43.2 20.5 32 47 69 13 63 65.1 45.5 67.6 31.5 43 58 80

RSH/RS1H

G5-S 20 is socket set screw CV MVGQ CC 20, 32 only RB J Replacement Parts: Shock Absorber Replacement Parts: Seal Kit DKit no.

Metal Seal/Rubber Seal Series VQ Body Ported

VVQ1000-3A-3Option Nil: Common exhaust S: Built-in silencer, direct exhaust Electrical entry F: For F kit P: For P kit J: For J kit L: For L kit S: For S kit VQZ VQD Applicable for L kit only The housing assembly and SI unit of F/P/J/S kit are not included. Separately place an order for q, w, and e. The !

24

MGT MGPM, MGPL, MGPA Common Dimensions [mm] Bore size [mm] Standard stroke [mm] B C DA FA FB G GA GB GC H HA J JA JB JC K L MM ML NN OA OB OL P Nil TN TF 80 25, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 96.5 56.5 22 16 24 91.5 19 16.5 14.5 202 M12 45.5 38 7.5 15 46 54 M12 x 1.75 25 M12 x 1.75 10.6 17.5 3 Rc3/8 NPT3/8 G3/8 100 116 66 26 19 31 111.5 22.5 20.5 18 240 M14 55.5 45 10.5

VDW

Please consult with SMC regarding other voltages. 30 Manifold Options Blanking plate assembly P Series 10, 20 VVCW20 3A P Series 30 VVDW 0 3A 2 Series Material 1 2 Material 10 20 Plate material Seal material NBR FKM EPDM Symbol G H J Plate material Seal material NBR FKM EPDM Symbol G H J Stainless steel Stainless steel Plate material is stainless steel only. 248 Series VDW10/20/30 Compact

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

RSH/RS1H

G5-S 20 is socket set screw CV MVGQ CC 20, 32 only RB J Replacement Parts: Shock Absorber Replacement Parts: Seal Kit DKit no.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J Ideal for separating and feeding individual parts from vibratory feeders, magazines, and hoppers.

Free Mount Cylinder

Series CU comparison Allowable kinetic energy (J) : with air cushion Noise reduction of more than 11dB is possible (compared to Series CU20 with rubber bumper). : with rubber bumper 3 Interchangeable mounting Mounting dimensions (J, K, R, and E) are the same as the rubber bumper type Series CU. 2 1 0.70 0.44 0.11 0.28 0.29 0. 18 R 20 25 32 E Bore size (mm) Improved repeatability K J When

MG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com WA Z Bottom view Section XX Z WA L 4-MM depth ML Section XX HA: T-slot for hexagon bolt 4-NN through 4-OA through 4-OB counterbore depth OL X 0.02 X 0.02 DA VB VA R U T X H PW DB XA depth 6 H7 XA depth 6 H7 2-P (Rc, NPT, G) GA 2-P PB (Rc, NPT, G) J K

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

steel L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Insert pin (Single) Insert pin material (J/K type only) Type Nil S Resin Stainless steel LQ-GH J 07 Holder (Single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

LVQ

Stainless steel L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Insert pin (single) Insert pin material (J/K type only) Type Nil S Resin Stainless steel LQ-GH J 07 Holder (single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

Stopper Cylinder

Q F Z Stroke 32 40 50 RSQB -DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT, G) T 0 0.1 D Q F Z Stroke M E J T 0 0.1 D Width across flats K A + 2 stroke B + Stroke V H + Stroke 2 x P (Rc, NPT, G) E M 4 x N through 8 x O counterbore Q F Z Stroke T 0 0.1 Width across flats K A + 2 stroke B + Stroke V H + Stroke D M E J E M 4 x N through 8 x O counterbore Width across flats K A

7.5

X, PE port F: D-sub connector (25 pins) P: Flat ribbon cable (26 pins) PG: Flat ribbon cable (20 pins) PH: Flat ribbon cable (10 pins) J: PC wiring (20 pins) Elbow fitting (Downward) B With external pilot spec. X, PE port PCW type There is no need to enter anything when the SUP/EXH block mounting position M is selected. Pilot spec.

Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q B Pressure gauge (Option) K H OUT Pressure gauge port size Square embedded type pressure gauge (Option) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D A N F AC30A, 40A E P K C G G OUT IN Q B Pressure gauge (Option) K OUT Pressure gauge port size J L Square embedded type pressure gauge (

HRX-OM-T002

HRS090 Series 6.1Option M [DI water (Pure water) piping] 6-1 HRX-OMT002 Chapter 6 Option 6.2 Option J [Automatic fluid filling] 6.2.1 Option J [Automatic fluid filling] This function is available for customers who selected automatic fluid filling. Refer 3.6 Option J Piping ofAutomatic fluid filling for the installation of the automatic fluid filling.

53

Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

CV/MVGQ

O.D. of cover : 1.7 mm Socket Coil ML2B Cover Hook For DC C J G5-S 3.