Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

9.5 9.5 10.5 D-G5l/K59/G59F D-G5lW/K59W D-G5NT/G5BA 5 6 6.5 6.5 7 D-A3l/A44 D-A3lC/A44C 9 10 11 11 11 D-A5l/A6l D-B5l/B64 D-A59W 13 13 14 14 15 D-B59W 14 14 17 16 18 D-G5NB 35 35 40 40 40 D-G39/K39 D-G39C/K39C 9 9 10 10 11 D-P3DWA 4.5 4.5 5.5 5.5 5.5 D-P4DW 4 4 4.5 4 4.5 * Values which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30%

Table of Contents

Minimum Stroke for Auto Switch Mounting (mm) Applicable auto switch No. of auto switches mounted D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 5 5 1 pc. 10 5 10 2 pcs.

MGP

b a X 0.02 c d X 6H7 e 7 (mm) e 22.5 30 Bore size (mm) 80 100 d 8 10 c 12 13.5 b 20.3 23.3 a 13.3 15.3 6H7 5 10 Section XX Section XX detail WB WA Z Section XX 4-MM depth ML Bottom view HA: T-slot for hexagon bolt 4-OA through L Z WA 4-NN through 4-OB depth of counter bore 8 Section XX X 0.02 X 0.02 DA VB VA R H U T X PW DB 6H7 depth 10 GC 6H7 depth 10 2-Rc 3/8 PB GB GA 2-Rc 3/8 Q 10 (Plug

C95

sides) 10 10 1, 2 Z7/Z80 n 10 10 1, 2 Y59/Y7P Y7W n 10 10 1, 2 Y69/Y7PV Y7WV n 10 10 1, 2 Y7BAL n 6-12-40 41 ISO/VDMA Cylinder: Large Bore Size Type Double Acting, Single Rod Series C95 Auto Switch Mounting Position and Mounting Height [First angle projection] CJ1 CJP Auto Switch Mounting Position CJ2 D-Z7, D-Y59, D-Y7BAL D-Z80, D-Y69 D-Y7P(V), D-Y7W(V) D-F5NTL D-A3, D-G39 D-A44

MY1

22.5 23.5 22.5 MY1B50 75 92 100 8.5 15 23.5 47 74 92 400 140 60 10 440 37.5 92 29.5 44.5 13.5 27 29 28 MY1B63 95 112 115 9.5 16 25 56 94 112 460 Y 2-d S D WX Bottom ported (Applicable O-ring) Hole Size for Centralized Piping on the Bottom WX Y S d D R Model Applicable O-ring 47 15.5 14.5 10 17.5 1.1 MY1B50 56 15 18 10 17.5 1.1 MY1B63 C15 (Machine the mounting side to the dimensions below

CL

Same side Same side 110C Heat resistant tarpaulin K D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 D-B5 D-B6 n2 2 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

MHZ2/MHZJ2

D-Y59A, D-Y69A Auto Switch Weight Table Unit: g DC (+) Brown [Red] Model D-Y7P/Y7PV D-Y59B/Y69B D-Y59A/Y69A Main switch circuit Main switch circuit 10 9 10 Lead wire length 0.5m OUT Black [White] 53 50 53 Lead wire length 3m Auto Switch Dimensions DC () Blue [Black] D-Y59A, D-Y7P, D-Y59B D-Y7P (V) DC (+) Brown [Red] Main switch circuit OUT Black [White] DC () Blue [Black] D-Y59B, D-Y69B OUT

Stability of suction position,

D D D 48.9 37.6 37.6 48.9 5 5 Width across flats 10 66 63 10 Width across flats 10 83 80 10 D-D D-D 28 28 24 24 12.5 12.5 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-Y63UMJB10 88.1 148.1 424 421 445 ZP3E-Y63UMJB30 113.1 173.1 453 451 474 ZP3E-Y63UMJB50 133.1 193.1 476 473 497 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-Y80UMJB10 88.1 148.1 478 473 513 ZP3E-Y80UMJB30

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Operating Range (mm) Auto switch model Bore size 32 40 50 63 80 100 125 D-A9/A9V 7 7.5 8.5 9.5 9.5 10.5 12 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 4 4.5 5 6 6 6 7 D-Z7/Z80 D-A5/A6 D-A59W D-A3/A44 7.5 8.5 7.5 9.5 9.5 10.5 13 9 9 10 11 11 11 10 13 13 13 14 14 15 17 9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 7 D-F5/J5 D-F5W/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5

CQS

12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30,

Proposals for Energy Saving

-400 KN-R04-600 KN-R06-600 KN-R06-800 KN-R10-800 D H1 A L1 Copper extension nozzle/KNL (mm) Model Nozzle size D Outside diameter L1 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6

MB

/Z80 13 10 17 7.5 8.5 7.5 9.5 9.5 10.5 9 9 10 11 11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13 13 14 14 15 D9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 -X D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 Data D-G39/K39 D-P5DWL 9 4 9 4 9 4 10 4.5 10 4 11 11 4.5 4.5 These values are given as guidelines including the hysteresis

Tie-rod Type Hydraulic Cylinder

D-G5, K59, G5W, K59W, G5BA, G59F, G5NT, B5, B64, and B59W Operating Range (mm) Auto switch model Bore size 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F D-F5W/J59W D-F5BA/F5NT 3.5 3.5 5 4.5 5.5 4.5 4 4.5 4.5 4.5 D-G5/K59/G59F D-G5W/K59W D-G5BA/G5NT D-G39/K39 D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 5 5 6.5 6.5 9.5 9.5 10 10 10 7.5 8 8.5 9 9 9 9 9.5 9.5 9.5 13.5 13.5

RSQ

For detailed specifications, refer to page 10-20-1. Auto switch model 50 D-C7/C80 10 10 Type Model Features Electrical entry D-C73C/C80C D-H7/H7W D-C80 D-C80C Grommet Connector Reed switch 5 6 Without indicator light D-H7BAL/H7NF 10 9.5 D-H7C Since this is a guideline including hysteresis, not meant to be guaranteed.

CHKD/CHKG

Minimum Auto Switch Mounting Stroke (mm) D-M9 D-M9V D-Y59 D-Y69 D-Y7P D-Y7PV D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-Z7 D-Z80 Auto Switch Mounting Number D-Y7W D-Y7WV D-Y7BA 1 pc. 2 pcs. 5 5 10 10 15 5 10 10 15 15 Operating Range (mm) Auto switch models Bore size 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 6 5.5 4.5 5.5 5.5 6.5 8.5 9.5 D-Y59/Y69 D-Y7/Y7V D-Y7W/Y7WV D-Y7BA 8 9.5