Table of Contents

(VX31, 32, 33) 20 Model Minimum AC/DC Ambient temperature (C ) 40 10 Operating fluid temperature (C ) Temperature conditions Power source Sketch Air Vacuum 60 10 40 AC/DC Maximum AC/DC 20 Minimum Position ON X X P A P A X OFF X X A R (VP) A R X ON X X A R (VP) X A R OFF X X P A X P A ON Pq A A Pq Pq A Pq A A Pq OFF Pw A A Pw Pw A A Pw Pw A Note 1) An exclusive type set with

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Lead wire electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P=51 (Pitch) 2 6 [2] 1 71.5 2n x 1/2, 3/4 Stations (A, B port) 24 [23] 20 70 [71.5] 2n x 1/2 28 58 114 91 105.5 176.5 209 9 D side 179 Bottom ported: VV5FR5-10Station 2Port size

G15/G27

This will cause a malfunction. 3 9 Bleed port Model (Made to Order) (17) 13 Pressure range (1) Indication unit Connection thread Note Model MPa psi 0 to 150 G33--01 0 to 0.2 0 to 0.3 0 to 0.4 0 to 0.6 0 to 1.0 0 to 0.2 0 to 0.4 0 to 0.7 0 to 1.0 0 to 1.0 0 to 1.0 G33-2-01-X2 G33-3-01-X2 G33-4-01-X2 G33-6-01-X2 G33-10-01-X2 GA33-2-01-X2 GA33-4-01-X2 GA33-7-01-X2 GA33-10-01-X2 G33-10-01-X4

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Pressure Gauge Guide

This will cause a malfunction. 3 Bleed port (17) 13 Model (Made to Order) Pressure range Note) Indication unit Connection thread Note G33--01 Model MPa GA33 0 to 0.2 0 to 0.3 0 to 0.4 0 to 0.6 0 to 1.0 0 to 0.2 0 to 0.4 0 to 0.7 0 to 1.0 0 to 1.0 G33-2-01-X2 G33-3-01-X2 G33-4-01-X2 G33-6-01-X2 G33-10-01-X2 GA33-2-01-X2 GA33-4-01-X2 GA33-7-01-X2 GA33-10-01-X2 G33-10-01-X4 17.5 X2: Stud parts

SY

port P port P port P A1 B1 P A1 B1 A port (P port controlled A port regulated) A port (P port controlled A port regulated) B port (P port controlled B port regulated) B port (P port controlled B port regulated) Pressure gauge connection port Pressure gauge connection port 05 06 M1 Pressure gauge (G15-10-01) [for odd number stations] Pressure gauge (G15-10-01) [for even number stations] Plug

SYJ3000/5000/7000

B port) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 1 (Pitch) P = 12.5 19.5 5 B B 15 1 A A 5 B B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VR VH VHS Pilot port (A side) M5 x 0.8 sub-plate side 2 position double: VZA2241-1 2-01 Pilot port (A side) Body side 2-4.5 Mounting hole Pilot port (B side) Pilot port (A side) Sub-plate side Pilot port (B side) 2-M5 x 0.8 sub-plate side 5-3-3 4 Series VZA2000 Dimensions: Base Mounted 3 position closed center: VZA2341-1 2-01 Pilot port (A side) Body side 2-4.5 Mounting hole Pilot port (

Speed Controller with Indicator

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Fieldbus system EtherCAT compatible SI Unit

V 10%, 4 A 2 A Power supply (Output) 24 VDC +10/-5%, 24 VDC +10/-5%, 8 A DC24 V +10/-5%, 4 A 2 A Enclosure IP67 (With manifold assembled) 1 Operating temperature range -10 to 50 oC Environment Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.

CG5-S

Mineral oil A A A C A A 18 Sodium hypochlorite (2%, Room temperature) A C D A D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B D A A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

5-Port Solenoid Valve

(Pitch) P = 19 (Pitch) P = 19 33.9 26.1 42.2 4(A) port side: Blue (For rubber seal) : Gray (For metal seal) 2(B) port side: Yellow 85.8 With Residual Pressure Release Valve (Slide locking manual override) PE Vacuum Release Valve with Restrictor FREE LOCK 3/5E B A B A B A B A B A A 4 A 4 A 4 A 4 A 4 21 59.9 128.8 SY5000: 95.7 SY7000: 96.7 01: 16.2 C : 14.5 (SY5000) 1P 61.8 (SY5000) 77.1 22.6

Table of Contents

ZS-10-A With lead wire ZS-10-5ANote) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length Caution 0.6 m Nil Ex.) ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Regulated port P port P port P A1 B1 P A1 B1 A port (P port controlled A port regulated) A port (P port controlled A port regulated) B port (P port controlled B port regulated) B port (P port controlled B port regulated) Pressure gauge connection port Pressure gauge connection port 05 06 M1 Pressure gauge (G15-10-01) [for odd number stations] Pressure gauge (G15-10-01) [for even number stations

CG5-S

Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

V

(Except for 110VAC) C O I L V O LTA G E With indicator light and surge voltage suppressor. } 3 110VAC 5 24VDC 6 12VDC VVQ0-P-4-C4 I N D I V I D U A L SUP S P A C E R VVQ0-57A-4 DIN R A I L M O U N T E D B R A C K E T [-D] VVQ0-R-4-C4 I N D I V I D U A L EXH S P A C E R ACCESSORIES MANIFOLD OPTIONS 23 04 06 08 01 03 B U I LT I N S I L E N C E R, D I R E C T E X H A U S T [-S] 1 N A M E P L

5 Port Solenoid Valve Series VQZ1000/2000/3000

Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 978.

SYJ300/500/700

Type 40/Type 41 How to Order SS3YJ7 40 05 01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 A A F N T A A 01 1/8 A port size P port 1/8 P port 1/4 Courtesy of Steven Engineering, Inc.-230 Ryan Way,