3 Port Solenoid Valve Metal Seal Series VZ200 1

Ported/Base Mounted Series VZ400 Dimensions: Common Exhaust Common exhaust: VV3Z4-50 (G) (L) (M) (D) With light/surge voltage suppressor Max.10 93 87.5 With light/surge voltage suppressor 300 (Lead wire length) 79.9 300 (Lead wire length) 300 (Lead wire length) 2-M5 x 0.8 (Pilot EXH) 2-M5 x 0.8 (Pilot EXH) P = 20 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5 x 0.8 Manual override (Non-locking)

CXS

x 0.8 with depth 8 2-M6 x 1.0 (Through) 4-M5 x 0.8 with depth 7.5 30 (Z) 19 11.5 T 20 9 (30) (Z) 8 2-M5 x 0.8 with depth 8 2-M8 x 1.25 with depth 12 0.2 75 16 S SS ZZ Z Part no.

Thermo-chiller

Power consumption P: 7 [kW] Q = P = 7 [kW] Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] w Derive the heat generation amount from the power supply output.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Double acting type PB PB PB q q q PA PA PA e e e A B A B A B A B A B t y r w u t y With reducer With flow rate adjustment With bypass i PB PA i A B A B Description Material Parts list No.

Auto Switch Guide

Indication Type P. 10-20-23 Band, Rail, Tie-rod Mounting MK(2) RS Q G RS H A RZQ MI W S CEP1 P. 10-20-26 Solid State Switches CE1 CE2 General Purpose Type P. 10-20-27 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 10-20-37 Direct Mounting 2-color Indication Type P. 10-20-42 Band, Rail, Tie-rod, Direct Mounting 2-color Indication Type with Diagnostic Output P. 10-20-

Compact Type Dual-Rod Cylinder Series CXSJ

5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

8 i r t !4 @0 !7 e u @2 !5 @1 !9 w !3 !2 !0 !1 !4 @3 !9 20, 25 Component Parts No. No.

Soft Start-up Valve

specifications Model With bracket With built-in silence K L M N P Q R S T U V W X Y AVA2000-02--A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AVA3000-03--A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AVA4000-04--A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AVA5000-06,10--A 70 75 70 60 11

rep-modular-e

3 t !8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

3 t !8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

AS

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Material Note No.

Pin Cylinders Series CJP2/CJP

CS2 Panel mount type Embedded type i e u q r w t y Component Parts No.

VXZ

L With surge voltage suppressor H 100 VAC J 110 VAC K 200 VAC L 230 VAC M Conduit terminal 24 VDC With surge voltage suppressor N 100 VAC P 110 VAC Q 200 VAC R 230 VAC S Conduit 24 VDC With surge voltage suppressor T 100 VAC U 110 VAC V 200 VAC W 230 VAC Faston terminal Y 24 VDC Z Other voltages For other special options, refer to pages 20 and 21. 24 VAC 48 VAC 220 VAC 240 VAC 12 VDC Special

VXF2

NBR/POM A With A Direct piping type 40A 24 VDC 50A A B Direct piping type B C D E F G H J K L M N P Q R S T U V W 65A 5 100 VAC Grommet Flange type with surge voltage suppressor 110 VAC A B C D Direct piping type 200 VAC Flange type 230 VAC 80A 6 Flange body I type 24 VDC Flange body II type 24 VDC DIN terminal with surge voltage suppressor 100 VAC 7 8 90A B Flange type 110 VAC 100A 200

VXS

K C37 1 25 L Stainless steel G 24 VDC DIN terminal With surge voltage suppressor Note) H 100 VAC J 110 VAC K 200 VAC L 230 VAC N 100 VAC Conduit terminal With surge voltage suppressor P 110 VAC Q 200 VAC R 230 VAC T 100 VAC Conduit With surge voltage suppressor U 110 VAC V 200 VAC W 230 VAC Z Other voltages Note) For the class H type DIN terminal, use it in combination with the connector

Size/Valve Type: 6 (Size: 25A; Valve Type: N.C.), Body/Port/Orifice: P (Body Material: Stainless Steel; Port Size: 1, Orifice Dia.: 25), Voltage/Electrical Entry: T (100VAC; Conduit w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread)

IDG

for purge air discharge (Option: P) u t e q IN OUT i } r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

KP/KPQ/KPG

D1 M M A L1 MS D1 D2 T L2 H VMG Connection threads Male Branch: KPQU, KPGU (M5) H (width across flats) Effective area mm2 D Model L TPH TPS A (M5) 2-Applicable tubing Note1) Connection thread R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

2 r w e i !0 !5 t u y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR2 !4 q !3 @0 o !2 !1 !9 w !8 i !6 !7 i e r !5 !0 y u t Component Parts Note Description Material Note Description Material No. q w e r t y No. !1 !