2.0

Inscribed number 3 3 x 1 3 3A 1/8" x 1/16" 4 4 x 2 4 4A 5/32" x 1/32" 6 6 x 4 6 6A 1/4" x 1/8" KO Plug connector, Without connector G (Option) Grommet, 300 mm y Lead wire length Nil 300 mm 6 600 mm 10 1000 mm The plug connector is included but does not come assembled.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Dimension in parentheses shows Q5 (M5 x 0.8). 13-4-11 11 Series ZM For Single Unit/With Valve Basic Type with Switch and Valve ZM1 -K-E H M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-4.5 Release flow adjusting needle Release valve Supply valve

IIIIIII

AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

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Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.

Mechanical Valves Series NVM, NVFM, NVZNI

AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

Low Profile

2.45 1.5 2.3 (Lead wire AWG#26) 300 54 3.4 10 5 3 3 1.7 10 Base hole dimension w Mounting screw (Included) M2 x 11 2 x M2 x 0.4 Thread depth: 6 or more Tightening torque: 0.1 to 0.14 Nm 3 4 4 (11.6) 4 4 2.1 1.7 1.7 3 2.45 Universal 0.8 4.9 10 2 (OUT) 1.5 2.3 1 (SUP) 3 (EXH) 3 3 1.7 3 (EXH) port 1 (SUP) port 2 (OUT) port Specific Product Precautions Be sure to read this before handling the

3

Please contact SMC to check if the valve can be used in the application by providing the relevant fluid circuit. 223 VXS Series For Steam Dimensions/Body Material: C37, Stainless Steel Grommet Conduit terminal 34 D Q2 S2 F F Q 300 D 40 (42) 32 25 a h e Built-in full-wave rectifier type T R E (With surge voltage suppressor) C R E d g J C G1/2 f j J 2 x M depth 5 H B1 B 2 x M depth 5 H B1

NCA1

/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2 3/8 1.69 M16x1.5 325 (3.25") 1 3/4-16 1 1/8 3.9

NCA1

/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.30 1.06 11/32 11/32 2.19 1 1.75 3 3/4 2.48 6.44 1 1/4 1 15/16 2 3/8 1.69 M16x1.5 325 (3.25") 1 3/4-16 1 1/8 3.9

A_HEC-OM-K001

<9> Overload judging time setting Sets time for judgment of overload <10> Output ratio indication Indicates output ratio of controller <11> Temp. upper/lower limit alarm sequence setting Determines whether or not temp. upper/lower limit alarm is output when power is turned on.

Direct Solenoid

Choo6e Manffold Block porling desired. e.g. # 11, # rg or # 15. 4. To specify a valve hountsd on a manitold blo,ck Inlen manilold numbr into valv numbr i.e. NVS 411+tt09D b a NVS 4114-0O0gD valv6 ,nount6d oo a # 11 blc'*,. 5.

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 1000mm, Motor Option: B (Lock), Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m

Accuracy: Basic Type, Size: 40, Motor Type: 100W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 1200mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 2m, Driver Type: -, I/O Connector: -, Option: -

Accuracy: Basic Type, Size: 40, Motor Type: 100W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 1000mm, Motor Option: Lock, Cover: w/o Cover, Cable Type: Standard, Cable Length: 2m, Driver Type: -, I/O Connector: -, Option: -

VQ4000

: Rc3/8 VQ4 0 1 G H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5

EX600-SEN7_8eng

(PORT2) 11 The power supply for output is properly. Green ON PWR(V) The power supply voltage for output is below 19 VDC. (When diagnostic parameter is enabled) Red ON Assembly Either of the following conditions are detected: The unit has not been configured correctly. The PLC is idle state.

MHx-OMZ0005

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 3 4M40.7 8 3.4 8 2 14 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 15 - 4-3.

PSE100

Insulation resistance Between external terminal and case 2M (500V DC by megameter) Vibration resistance 10 to 500Hz Width: 1.5mm or acceleration 98m/s2 (at the smaller vibration) to X, Y, Z direction (2 hours) Shock resistance 980m/s2 to X, Y, Z direction (3 times for each direction) Protective construction Panel mounting type: IP66 (Used gasket at panel mount part only), Wall mounting, DIN

High Vacuum L Type Valve

11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0007 6.