Micro Mechanical Valve Series VM1000

, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port) Symbol (B) 2 (A) 4 12 14 3 (EB) 1 (P) 5 (EA) 0.5 MPa supply 3.5 mm T.T. 2.0 mm O.T. 1.5 mm P.T. 20 N F.O.F. 3 x 4.5 mounting hole 5 x Rc 1 4 Roller plunger VFM250-02-06 VFM250-02-06S Panel mounting hole 15 polyacetal or head steel roller M18 x 1 Hexagon nut thick 11, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

D5080 72 36 5 20 10 45 16 16 11 11 95 90 50 100 D5100 89 41 5 25 10 55 20 20 11 12 115 110 60 * Supplied with 4 mounting screws, clevis pin, and clevis pin bracket.

Fieldbus System

Note 2) Only direct mounting is available for Type 11 (Bottom ported). * Bottom ported type of the SY3000 uses the manifold base of the SY5000.

Applicable Auto Switch Model

9 9 10 10 11 11 11 11 11 10 10 10 10 OUT() 2nd terminal 9 9 9 10 10 11 8 9 9 Note) Average value at normal temperature including hysteresis.

MQQ

6 Mounting 15, 30, 45, 60, 75, 100 10 15, 30, 45, 60, 75, 100 16 Standard type Foot type Front flange type Rear flange type (except 6) Single clevis type (non-integrated type) Double clevis type B L F G C Note) 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

0.55

Y type D type 2) Loosen the terminal screws on the terminal block, insert the core of 11 10 the lead wire or crimped terminal into the terminal, and attach securely with the terminal screws.

3 Port Air Operated Valve Series SYJA300 1

Refer to page 5-11-4.)

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2.20 0.30 1/2 (15A) 10 11 2.20 0.30 Note) Weight of grommet type.

JXCx-OMY0008

Settings and Data Entry 38 10.1 Step Data 38 10.2 Basic parameters 41 10.3 Return to origin parameter 43 11.

LJ1H

(S2) 200 to 230 VAC encoder) Absolute Power supply voltage 50/60 Hz AC servo motor (S7) AC servo motor (S3) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz AC servo motor (S6) 100 to 120 VAC Pulse input type 50/60 Hz AC servo motor (S7) (For absolute AC servo motor (S6) 200 to 230 VAC encoder) 50/60 Hz AC servo motor (S7) Dimensions LECSA 2 x 6 Mounting hole 40 135 (Bearing surface

HRX-OM-T004

This product Your system Write or read Monitoring 60 sec. time Write or read Monitoring 60 sec. time Passage of 180 sec. Excess at no 60 sec. Broken communicatio wire n monitoring o r time. coming 60 sec. off AL19 Communication error is generated.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

87 60 112 112 17-5-129 34 Series LQ 1 2 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

HRX-OM-Q033

This product Your system Write or read Monitoring 60 sec. time Write or read Monitoring 60 sec. time Passage of 180 sec. Excess at no 60 sec. Broken communicatio wire n monitoring o r time. coming 60 sec. off AL19 Communication error is generated.

HRX-OM-S010

This product Your system Write or read Monitoring 60 sec. time Write or read Monitoring 60 sec. time Passage of 180 sec. Excess at no 60 sec. Broken communicatio wire n monitoring o r time. coming 60 sec. off AL19 Communication error is generated.

RSQ

QA F Q QB QU QW QW QU Bore size (mm) 29 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 32 to 50 20 O counterbore 6.5 depth 4 9 depth 7 9 depth 7 9 depth 7 11 depth 8 A 59.5 67 68 80.5 82 B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 18 22 20 28 28 I 60 69 86 J 4.5 5 7 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 P M5 x 0.8 Rc 1/8 Rc

HRX-OM-X071

Item No Remarks Ethylene glycol aqueous solution 60% HRZ-BR001 Please dilute to 15% with tap water and use it.

Rotary Gripper Series MRHQ

80 0 20 40 60 80 100 Gripping point L mm Gripping point L mm MRHQ25 MRHQ25 120 100 Pressure 0.2MPa 100 Note: 1in = 25.4mm 1MPa = 145psi 80 Pressure 0.2MPa 80 Overhang H mm Overhang H mm 60 0.3MPa 0.5MPa 0.6MPa 0.7MPa 60 0.7MPa 0.4MPa 0.3MPa 0.4MPa 40 0.5MPa 40 0.6MPa 20 20 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point L mm 4 Rotary Gripper Series MRHQ Effective

VQ7-6/7-8

2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R 3.3 0.27 13 2.8 0.26 11 Rubber seal 50 or less VQ7-8-FPG-D7.0 7.2 Metal seal 60 or less Double check 1.98 VFR VQ7-8-FPG-D-R 7.0 7.2 Rubber seal 60 or less VQ7-8-FIG-D2.8 0.25 11 2.4 0.26 10 Metal seal 45 or less Pressure center VP4 0.75 VQ7-8

HRX-OM-W032

An example is shown below: Set circulating fluid temperature: 20 oC READY bandwidth (range between the upper and lower limit temperatures): 2 oC READY time: 60 seconds Preparation for operation will be completed 60 seconds after the circulating fluid temperature reaches the range of 18 oC to 22 oC. Shorter than 60 sec. 60sec.

Step Motor Driver （ Pulse input type ）

Operation instruction . 56 (1) Power on Return to origin . 56 (2) Positioning operation . 57 (3) Pushing operation . 58 (4) Alarm reset. 59 (5) Deviation reset . 59 (6) Stop (EMG) . 59 (7) Area output . 60 11.