Process Pump Series PA3000/5000/PAX1000 Series PB1000

(FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

VM

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material PBT ADC Material Note No. q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

energy saving effect

Applicable model Rated current [A] Sensitivity of leak current [mA] Short circuit display method HRSH100--20-B 30 Earth leakage breaker HRSH150--20-B HRSH200--20-B 40 HRSH250--20-B 50 HRSH300--20-B 30 Mechanical button * 400 V type is equipped as standard.

Refrigerated Air Dryer

D A B Grommet with membrane Power cable outlet (17) Dimensions (mm) A 230 B C D Circuit breaker Model 32 B D IDFA4E, 6E, 8E, 11E IDFA15E1 67 179 43 258 77 158 C E A IDFA22E to 75E Power cable outlet (17) (Wire diameter 9 to 11) F (mm) Dimensions E D C B A F Model Signal cable outlet (Wire diameter 17) Grommet with membrane IDFA22E IDFA37E IDFA55E IDFA75E 59 125 40 25 46 39 60 Terminal block

PFxx-OMA1007

(page 141) -142No.PF-OMA1007-B Air Management Hub Base type EXA1-20/30/40-PN/EN/EC-# Model A B C D E F EXA1-20 236.2 35 42 19.1 65.1 30.5 EXA1-30 236.2 43 53 13.6 65.1 30.5 EXA1-40 240.4 51 64.4 4.6 71 35.5 -143No.PF-OMA1007-B EXA1-60-PN/EN/EC-# -144No.PF-OMA1007-B Remote type EXA1-20/30/40-SA-# Model A B C D E F G EXA1-20 236.2 35 42 19.1 65.1 30.5 74.7 EXA1-30 236.2 43 53 13.6 65.1 30.5

Compact Guide Cylinder

JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. *2) Labor Safety and Sanitation Law, etc. Caution Operator error could result in injury or equipment damage.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

RF S WB WL ZZ 40 50 63 80 100 up to 500 30 27 60 22 44 16 13 32 10 15 51 8 42.3 56 M8 x 1.25 6 14 11 M14 x 1.5 19 27 17 84 2.5 25 146 1/4 up to 600 35 32 70 27 52 20 13 40 12 17 58 11 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 35 32 85 27 64 20 15.5 40 10 17 58 11 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 40 37 32 78 25 52 14

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

3 Port Solenoid Valve/

M12 connector pin number G1/2 terminal number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) 3(R) (31) e (11) q 3(R) (31) e (11) q 3(R) (31) e (11) q 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal

7

d e 34 C (U2) (V2) E VX2 VXK 32 T 1.2 7.5 VXD VXD 25 VXZ 5.5 A B G1/2 VXS b a OUT IN VXB 2 x P Port size F 4.5 L K D f J I VXE 4.5 VXP Conduit d e C VXR E U 280 VXH 23 VXF 1.2 7.5 VX3 G1/2 T 5.5 A b a VXA IN OUT B 2 x P Port size f J F I L K D 4.5 4.5 Flat terminal C e d U E 11 1.2 7.5 T 5.5 A b a IN OUT B 2 x P Port size I F J 4.5 L K D 4.5 f (mm) Electrical entry One-touch fitting

RB/RBL/RBQ

With cap SR 6.8 8.7 12 18 25 B 6.5 9 12.5 16 21 A MM h M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 B 4 4 6 6 6 C 12 14 19 27 36 MM B M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 C h1 h2 d f RBC08C RBC10C RBC14C RBC20C RBC27C RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S 6 7.5 10 20 25 12 14 19 27 36 13.9 16.2 21.9 31.2 41.6 6.5 8 11 16 22 23 23 31 40 51 9 11 15 23 32

RB/RBL/RBQ

With cap SR 6.8 8.7 12 18 25 B 6.5 9 12.5 16 21 A MM h M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 B 4 4 6 6 6 C 12 14 19 27 36 MM B M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 C h1 h2 d f RBC08C RBC10C RBC14C RBC20C RBC27C RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S 6 7.5 10 20 25 12 14 19 27 36 13.9 16.2 21.9 31.2 41.6 6.5 8 11 16 22 23 23 31 40 51 9 11 15 23 32

LUBRICATOR

B B 16 Semi-standard Semi-standard 8 Semi-standard 38 Port thread Port thread Part no. Part no. Rc Rc G G NPT C4LL-8(Z)-A NPT C4LL-38(Z)-A C4LL-8-A C4LL-38-A External appearance drawing and part no. B B Metal bowl with sight glass side view External appearance drawing 38 Note 1) B in the table shows the distance from inlet piping centreline to drain port. Refer to "11. DIMENTIONS"P26.

rep-modular-e

Round cutting pliers Nominal: 125 or 150 Tightening torque: 1.4 0.1 Nm 10) Mount the bowl assembly. Hold the bowl assembly by hand and rotate clockwise. Do not use tool for mounting because the bowl may be damaged. Refer to the Check item for referential tightening torque. Actuators Modular F.R.L.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Round cutting pliers Nominal: 125 or 150 Tightening torque: 1.4 0.1 Nm 10) Mount the bowl assembly. Hold the bowl assembly by hand and rotate clockwise. Do not use tool for mounting because the bowl may be damaged. Refer to the Check item for referential tightening torque. Actuators Modular F.R.L.

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

Compact Guide Cylinder End Lock Type SeriesMGP

B + Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA

MHS

L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3

EX510-GPR1.eng

data: Lights up 2 COM B is having no data to receive: Goes off Note: A secure earth connection (Protection class 3) should be performed for FG terminal.

Title not found

i-.xtet0 coP2 so " A ' : Senes CBQ2 End Lock o20 to s100mm l\.4echanicaily locks the cylinder position at end of stroke. | v d With Air o2Olo Utilizes Innova ve 125 Lalge bore size Single -*9$.s"*-,,q e. 180 200 q 125 A DoLble o r o d c02w irlf, rt .16 -+il&4-160 180 2AA Lono stroke g I Sinqle P.4o -, rOO -d.G.*{b-40-**+-'o.or 1 : rN)c0r 80 1oo tlnJ' -*--*-*--33 13 = cQ2L:s 5 s'F ."