NCA1

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.

EX120/121/122

value AD value 31208 (79E8) (79E8) 1950 (79E) (79E) 1934 (78E) (78E) a Input 0 b 114 (72) (72) 31208 (F9E8) (8618) Input 0 Input 0 a a b Input signal range a 0 to 10 V Input signal range a b 1 to 5 V Input signal range a b 10 to 10 V 10 V 1 V 5 V 10 V 10 V 0 to 5 V 5 V 4 to 20 mA 4 mA 20 mA 5 to 5 V 5 V 5 V 0 to 20 mA 20 mA 20 to 20 mA 20 mA 20 mA Regarding AD value In the above graph, 3

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

NCM

5/16-24 A 0.75 0.75 1.25 AA 1.00 1.25 1.75 B 0.625 0.750 1.00 CA 0.093 0.093 0.125 D 0.22 0.25 0.38 DD 10-32 UNF 10-32 UNF 1/4-20 UNC E 0.81 1.12 1.56 EA 1.00 1.25 1.75 EE 1/8 1/8 1/4 NA 1.12 1.47 1.93 NE 0.12 0.24 0.25 NH 10-32 UNF 10-32 UNF 1/4-20 UNC NT 1/4-20 1/4-20 5/16-18 TN 0.62 0.81 1.12 WF 0.34 0.47 0.38 YE 0.88 1.22 1.57 XA 0.38 0.62 0.88 Bore size (inch) 075 (3/4") 106 (1-1/16

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

10 20 20 ZZ + 2 Stroke S + Stroke (mm) A AL Bore size Stroke range Standard Long B1 C D E F GA H H1 I J K KA MM NA P RA S 1 2 ZZ 20 20 20 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19 27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16

51

NA P ZZ Z RR S TE TF TH TT TV TW TX TY TZ CA2 20 25 32 40 50 63 112 120 129 141 176 186 91 99 105 113 144 149 Up to 200 CD-G02 CD-G25 CD-G03 CD-G04 CD-G05 CD-G06 24 29 35.5 44 55 69 M5 x 0.8 M5 x 0.8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 11 13 15 18 20 22 57 60 62 62 84 84 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 25 30 35 40 50 60 3.2 3.2 4.5 4.5 6 8 (35.8) (39.8) (49.4) (58.4) (72.4) (90.4) 42 42 48 56

Air Cylinder

(mm) Bore size Stroke range CDH10 CX (mm) A AL B B1 C CZ D E F G H1 J K KA L (mm) 40 50 63 80 +0.3 +0.1 10 12 16 20 25 +0.084 +0.058 0 15 18 25 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 29.5 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 8 M8 x 1.25 M8 x 1.25 6 7 7 14 18 18 22 26 30 35 40 48 58 +0.3

Vacuum Unit

/ Complex exhaust) 40 40 100 Vacuum pressure [kPa] 30 30 80 Air consumption 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 30 40 50 60 Supply pressure [MPa] Suction flow [L/min (ANR)] 19 Vacuum Unit ZK2mA Series The flow rate characteristics correspond to the standard supply pressure.

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

H G I J K L A B C D E F M R +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 16 30 30 36 44 M4 10 10 13 13 10

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 45 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 10 20 M14 x 1.5 30 22 1/4 37 106 11 15 17 50 50 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 10 22 M16 x 1.5 30 26 3/8 43 112 11 15 19 63 55 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 10 25 M18 x 1.5 30 26 3/8 47 116 11 15 21 80 65 32 8 100 75 28 32 22 20 15 M12 x 1.75 26 13 29 M22 x 1.5 35 30

VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

Profile Design ISO/VDMA Air Cylinder Series CP95

e Order No. b d f l1 c a 32 M10x1.25 GKM10-20 10 40 10 52 20 20 40 M12x1.25 GKM12-24 12 48 12 62 24 24 50/63 M16x1.5 GKM16-32 16 64 16 83 32 32 80/100 M20x1.5 GKM20-40 20 80 20 105 40 40 Rod end nut (standard equipment) 30 d D C H B Bore size (mm) Order No.

CLA

MM I """.0 40 -500 20-500 27 30 60 96 Yo V . 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 30 71 M14X1.5 M18X1.5 M1SX1 .5 M22X l .5 I 50 600 20-600 32 35 70 108 Yo V, 52 20 40 10 95 ' 7 27 59 13 12 M8X1.25 7 30 80 , 63 -600 20-800 32 35 86 11 5 Yo y. 64 20 40 10 102 17 26 67 18 15 Ml0Xl .25 7 40 99 ,. 80 -750 20 750 37 40 102 129 Yo Yo 78 25 52 14 11 3 21 30 72 23 17 M12X1.75 11 48 11 7 , 100

VDW

P Series 10, 20 VDW 0 15A 1 2 6 65 (61.5) Series 1 2 10 20 8.5 (6.3) P Series 30 VCW20 12 01A 1 (IN) port 1/8, 1/4 1/8, 1/4 2 (OUT) port Dimensions inside ( ) are for port size 1/8. 12.8 2 x M4 x 6 246 Series VDW10/20/30 Compact Direct Operated 2 Port Solenoid Valve for Water and Air Dimensions VDW21-lF VDW31-lF 40 27 30 20 6.35 6.35 11.4 VX2 20 27 34 25 14 VXD (Bracket mounting hole) 2 x

Water-cooledThermo-chiller

Breaker Operating Characteristics Common for all models 4 h 2 h 1 h 5 s 10 s 20 s 30 s 1 min 2 min 4 min 6 min 10 min 14 min 20 min 30 min Max.

90

ZK2(Ejector System) 100 90 80 70 60 50 40 30 20 10 0 0 5 10 15 20 25 30 Suction flow [L/min (ANR)] 0.5 40 Release flow [L/min (ANR)] Vacuum pressure [kPa] Supply pressure [MPa] 0.4 0.35 0.3 30 20 0.2 10 0 0 1 2 3 4 5 6 7 8 9 10 Needle opening [Number of rotations] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

Compact and Lightweight

40 40 40 40 20 Suction flow rate 10 20 20 20 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 5 10 15 20 25 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 12 14 Supply pressure [MPa] Suction flow rate [L/min (ANR)] Supply pressure [MPa] Suction flow rate [L/min (ANR)] ZH10SA ZH10LA Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 100 100 100

5 Port Solenoid Valve, Series VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance