Direct Operated

Pam3/sec or less 10 Note) to 60 10 Note) to 60 20 to 60 20 to 40 AC DC Note) The leakage amount (10 6 Pam 3/sec) for the V option are values when the differential pressure is 0.1 MPa.

KP/KPQ/KPG

-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5

EXxx-OMO0027

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to master per unit. 2s complement 2s complement.

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

A

0.05~0.83MPa P R E S S U R E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D Rc(PT)* Remove (N) when ordering F F(PF) N NPT Courtesy of Steven Engineering, Inc. !

VEX1

AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 AN300-03 AN400-04 AN400-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900-20 VEX3 23 4 03 04 VEX35004 06 10 VEX37010 12 VEX39014 20 1959 Series VEX3 How to Order Electrical entry (Only with solenoid) Body size Port size Symbol Body size Electrical entry Port size Port 3 (R) 1 (P), 2 (A) 01 02 02 03 04 04 06 10 10 12 14 20 Body size G Grommet

KQ2

-32 UNF 1 16 21.5 22.5 11.11 8 1 8 1 8 1 4 15.5 9.6 10 17.5 2.5 25 20.6 24.5 13.7 15.4 14.29 7 18 2.7 8 9 18 5 10 19 3.2 10 20 32 12 20 28 16 23 33 59 28 36 62 12.7 9.3 15.6 2.3 10-32 UNF 25.5 21.1 22 1 16 23 11.11 Applicable tubing 5 32 16 10 10.4 18 3 1 8 1 4 25 14.29 10-32 UNF 20 22 2.3 10-32 UNF 11.11 10 11.4 19.5 21.6 26 15.1 22.6 27 28.4 23.6 28 29.4 25.6 29 30.4 34.6 31

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

13

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Stainless Steel 316 Fittings

KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 19.4 23.8 19.4 23.8 20.9

E-P HYREG ® Series VY1

be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5

Series KG Stainless Steel One-touch Fittings

D1 D2 L1 L2 A M M5 0.8 KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 3.5 2.7 10 19 3.5 7 9.5 16 13.5 15 13 4 1 8 1 4 10 14 7 11.5 22 26 23 25 10.4 10 18 16 4.2 4.2 M5 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20

Stainless Steel One-touch Fittings Series KG

D1 D2 L1 L2 A M M5 0.8 KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 3.5 2.7 10 19 3.5 7 9.5 16 13.5 15 13 4 1 8 1 4 10 14 7 11.5 22 26 23 25 10.4 10 18 16 4.2 4.2 M5 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20

0.55

1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 Manifold Option Description Part no.

Fieldbus system EtherCAT compatible SI Unit

Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V Selects the analogue input range. (AXB cannot select the following ranges. -10..10 V/ -5..5 V/ -20..20 mA) -5..5 V -10..10 V -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.

Air Fittings & Tubing

F (mm) Port B min. port size Weight (g) L2 L3 L4 L5 L6 P Q1 Q2 M L1 89 110 99 125 108 139 40 KM12-04-02-6 6 17 65 72 81 91 97 112 1 4 10 18 29.5 19.5 29 10.6 16 6 12 4 61.5 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 47 1 4 17 10 19.5 31.5 21.5 31 13 17 7.5 13.5 6 73 55 3 8 19 11.5 22.5 35.5 24 34.5 15.5 18.5 9 14.7 8 86 SKM, #7 to #12 KM13 Tube O.D.

ZP

Pad diameter (mm) 4010 3507 2004 4 x 10 3.5 x 7 2 x 4 Vacuum entry port (Refer to Table (3) for applications.) 02 04 2 4 6 8 10 13 16 20 25 32 40 50 ZX 06 08 10 13 16 20 25 32 40 50 Buffer stroke (Refer to Table (2) for applications.)

Modular Design with Uniform Body Style

400 10 70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated

0.4

L Note) The minimum bending radius of the circular connector cable is 20 mm. 60 30 Plug terminal no. 2 1 15 14 17 16 25 24 3 13 18 23 4 12 26 19 22 5 11 21 20 10 9 8 7 6 Socket side Note) Lengths other than the above are also available. Please contact SMC for details.

Vacuum System Peripherals:

Power supply voltage S L Straight type 3 m Right angle type 3 m Without cable connector Flow Characteristics 0 1 24 VDC 12 to 15 VDC N 0 Option Input signal 10 Bracket 0 1 2 3 4 Current type 4 to 20 mA DC Current type 0 to 20 mA DC Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor