Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

CG5-S

x 1.5 7 18 7 M18 x 1.5 69 1/4 176 80 to 750 130 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 210 100 to 750 131 110 10 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 26 8 M26 x 1.5 100 1/2 212 Flange brackets and plug bolts are installed before shipment from factory.

Mechanically Jointed Rodless Cylinders

Load Weight Allowable Moment MY3M, m3 MY3M, M1 MY3M, M2 MY3M, M3 500 400 300 100 100 200 100 50 40 30 50 40 30 200 50 40 30 100 20 20 63 50 40 30 20 10 10 Load weight (kg) Moment (Nm) Moment (Nm) Moment (Nm) 63 63 63 q 10 5 4 3 e w 20 40 5 4 r t 40 5 4 40 40 3 10 2 3 2 5 4 3 1 2 25 25 25 25 1 1 0.5 0.4 0.3 2 16 16 0.5 0.4 0.3 16 0.5 0.4 0.3 16 1 0.2 0.2 0.2 0.5 0.1 100 200 400 500 1000 1500

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CNA

0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-7-7 8 Cylinder with Lock Double Acting, Single Rod Series CNA 40, 50, 63, 80, 100 How to

Compact Cylinder with Lock Series CLQ

Extension Locking, Rubber Bumper Retraction Locking, Rubber Bumper 1000 1000 100 100 80 100 80 100 Load mass (kg) Load mass (kg) 63 63 10 10 50 50 40 40 25 32 25 32 1 1 20 20 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 0.1 0.1 100 500 Maximum speed (mm/s) 100 500 Maximum speed (mm/s) Allowable Load Mass Horizontal (Without switch) Horizontal (With switch) 30 30 10 10 100 100 80 Load mass m (kg) Load

CJ2

Bore Bore B C d H 10 16 NTJ-015A 10 16 7 8 8.1 9.2 M4 X 0.7 M5 X 0.8 3.2 4 NTJ-010A Dimensions by stroke (mm) Symbol S Z ZZ Stroke Bore 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 10 16 48.5 56 68 80 84.5 92

MNB

100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG 5 4 3 5 4 3 MNB 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 1000 1000 100 100 CLQ

MNB

4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

200 200 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 150 150 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1 MPa 50 50 0 0 10 10 50 50 20 20 30 30 40 40 60 60 70 70 Gripping point L (mm) Gripping point L (mm) MHS3-63D MHS3-63D 500 500 Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) 400 400 Gripping force (N) 0.5 MPa 0.5 MPa 300 300 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 200 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1

CL

75 10 Rod Boot Material 75 + 55 (n 2) n 2 2 20 + 50 ( ) (n = 2, 4, 6) D-B59W 20 75 15 Symbol Rod boot material Maximum ambient temperature D-A3A D-G39A D-K39A D-A44A 70C Nylon tarpaulin J 35 + 30 (n 2) 100 + 100 (n 2) 35 100 10 110C Heat resistant tarpaulin K Maximum ambient temperature for the rod boot itself. 9-2-18 17 Series CLM2 Fine Lock Cylinder Double Acting, Single Rod Mounting

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

220 230 AH 4 x AB AT E1 TR AO SA + Stroke AO Rod flange (F) 4 x FB [mm] Bore size [mm] R TF FB E2 UF W MF 32 32 64 7 50 79 16 10 40 36 72 9 55 90 20 10 50 45 90 9 70 110 25 12 63 50 100 9 80 120 25 12 80 63 126 12 100 153 30 16 100 75 150 14 120 178 35 16 R E2 W MF UF TF Head flange (G) [mm] Bore size [mm] MF ZF 32 10 130 40 10 145 50 12 155 63 12 170 80 16 190 100 16 205 ZF + Stroke MF Single

MXQ

MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20-30 MXQ20-125 MXQ20-125 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-10 MXQ20-10 MXQ20-10 0.04 MXQ20-10 MXQ20-10 MXQ20-

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 27 26 26 48 47 46 104 103 101 199 194 189 385 374 363 42 43 55 58 119 142 219 239 398 444 Flange assembly 9 10 19 25 9 10 19 25 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series CS1/CS2 SGP25A x 1 m AS600-10 AN600-10 Tube bore x Length Speed controller Silencer VFS6100-10 Construction 2 position single 2 position double Sub-plate Assembly Part No.

Slider Type Ball Screw Drive/11-LEFS Series

100 100 LEH LEY -X5 10 10 11LEFS 11LEFS Suction flow rate: 30 L/min Suction flow rate: 30 L/min 11LEJS 1 1 0 0.1 0.6 0.5 0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5

CLQ

38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

VFS

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS Conditions VFS Series CS1 SGP25A x 1 m AS600-10 AN600-10 Tube bore x Length Speed controller Silencer VFS6100-10 VS4 VQ7 Construction EVS 2 position