4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L n L: Dimensions n: Stations 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 173 185.5 185.5 198 210.5 223 235.5 248 248 260.5 273 285.5 298 298 310.5 162.5 175 175 187.5 200 212.5 225 237.5 237.5 250 262.5 275 287.5 287.5 300 140.9 150.9 160.9 170.9 180.9 190.9 200.9 210.9 220.9 230.9 240.9 250.9 260.9 260.9 280.9 16 17.5 12.5 13.5 15 16 17.5 18.5 13.5 15 16 17.5 18.5 18.5 15 47 Series

VZS

(n) 7 stations (15 stations) New D-sub connector VQ7 Conventional D-sub connector (2) (1) Lead wire color Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red Brown Pink Gray Black White 8 stations (Max. 16 stations) Terminal No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Dot marking None None None None

Large Size Vacuum Module: Series ZR

ZR1-SR2-82-A(a set of four threads) For nozzle size 18, 20 ZR1-SR2-86-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For

HRX-OM-I051

FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

Compact Cylinder

Basic (Through-hole/Both ends tapped common): CQUB F Q 2 x M5 x 0.8 Y 4 x M6 x 1 depth 10 4 x 5.4 through 15 KA H H1 Rod end nut Width across flats B1 NY EY D X C1 K NX A + Stroke B + Stroke L EX L1 Rod end male thread Basic (mm) Size Stroke range (mm) A B D EX EY F H K KA L NX NY Q Y 20 25 32 40 5 to 50 49 42.5 10 22 47 11.5 M5 x 0.8 depth 8 5 8 6.5 5.5 36 15 3 5 to 50 49 42.5 10 24 53 11

Air Cylinder Series CS1

8 15 13 12 10 16 14 9.5 7.5 6 4 10 8 12.5 10.5 17.5 15.5 The mounting position should be referred for reference only for the auto switch mounting position at the stroke end detection.

Fieldbus system Analog unit

5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB -21No.EX-OMN0038-C (2)Signed binary data format and twos complement data format Input signal range: 0 to 10 V

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

HRX-OM-W058

0.1 Outlet50Hz Return port 0.0 0 10 20 30 Circulating fluid flow [L/min] Fig 9.6-1 Pump capacity(HRS018/030--20-R) 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R 0.8 80 0.7 70 available area Circulating fluid pressure [MPa] 0.6 60 Pump head[m] 0.5 50 Outlet: 60Hz 0.4 40 0.3 30 Outlet: 50Hz 0.2 20 available area 0.1 10 Return port 0.0 0 0 5 10 15 20 25 Circulating fluid flow [L/min] Fig 9.6-2 Pump

Round Type Hydraulic Cylinder

(n 2) 2 D-C7 D-C80 D-H7C D-C73C D-C80C D-G5/K59 D-G5W/K59W D-G59F/G5BA/G5NT D-B5/B64 50 + 45 (n 2) (n = 2, 3, 4, 5) 10 15 50 D(n = 2, 4, 6) Note 3) 15 + 50 (n 2) 2 65 + 50 (n 2) (n = 2, 3, 4, 5) 10 15 65 15 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) 10 15 75 (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 20 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 15 20 Note 3) When n is

A

50 24 12 4 70 10 15 6 62.5 100 Courtesy of Steven Engineering, Inc. !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

-10 MXP-AD10-10 11-MXPJ6 MXP10-20 MXP-AD10-20 With magnet and mounting screws MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 is the same as MXP10-20.

HRX-OM-M005

flow control function Inverter-driven flow control function applied applied Main Tank capacity*7 L Approx.15 Approx.15 Sub Tank capacity*8 L Approx.16 Approx.16 Circulating fluid port (supply/return) Rc 3/4 Rc 3/4 Facility water C / MPa 10 to 35 / 0.3 to 0.7 Required flow of facility water*9 L/min 15 (Facility water at 25C) 15 (Facility water at 25C) Facility water port (inlet/outlet) Rc

Electric Actuator

load [kg] 1,000 1,000 800 800 600 600 Mey m 400 400 L2 200 200 0 0 0 5 10 15 20 0 5 10 15 20 25 30 Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 L3 m Mer 400 400 200 200 0 0 0 5 10 15 20 25 30 0 5 10 15 20 Work load [kg] Work load [kg] 1 Kg = 2.2 lb 7 Model Selection Series LEJ Table Accuracy (Reference Value) A side B side Traveling parallelism [mm] (Every 300 mm) Model : C side

Rotary Table/Rack & Pinion Style Series MSQ

7 CRB2 CRBU2 CRB1 B B A A MSU When D-F8 is used When D-M9 is used CRJ Solid state auto switch CRA1 D-F8 Rotation D-M9(V), D-M9W(V) Size Operating angle m Hysteresis angle Operating angle m Hysteresis angle CRQ2 B A 20 20 15 15 10 10 10 10 190 190 190 190 45 50 45 25 10 10 10 10 1 2 3 7 16.9 18.8 20.4 24.7 20.9 22.8 24.4 28.7 MSQ MSZ Operating angle m: Value of the operating range Lm of

42

(Maximum 16 stations) n L 1 2 3 4 5 6 7 8 L1 88 113 138 163 188 213 238 263 L2 101 126 151 176 201 226 251 276 n L 1 2 3 4 5 6 7 8 L1 88 113 138 163 188 213 238 263 L2 101 126 151 176 201 226 251 276 n L 9 10 11 12 13 14 15 16 L1 288 313 338 363 388 413 463 463 L2 301 326 351 376 401 426 476 476 n L 9 10 11 12 13 14 15 16 L1 288 313 338 363 388 413 463 463 L2 301 326 351 376 401 426 476

Refrigerated Thermo-chiller

discharge port and the return port are directly connected) Max. 0.40 (at 20 l/min) Max. 0.72 (at 20 l/min) Max. 0.38 (at 20 l/min) 20 10 to 40 (With flow control function by inverter) Approx. 15 Approx. 16 Rc 3/4 Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin 10 to 30 10 to 25 0.3 to 0.7 15/15 Rc 1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger

Speed Controller: Standard Type Series AS In-line Type

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Pilot Operated

Passage symbol 2 1 Max. operating pressure differential (MPa) Min. operating pressure differential (MPa) Weight (g) Max. system pressure (MPa) Note) Flow characteristics Model Orifice size (mm) AC DC Port size Av x 10-6m2 Cv converted VXD2130-02 VXD2130-03 VXD2140-03 VXD2130-04 VXD2140-04 VXD2150-06 VXD2260-10 VXD2270-32 VXD2380-40 VXD2390-50 10 10 15 10 15 20 25 35 40 50 (8A) 1 4 1.9 2.4

ITV

, 12 to 15 VDC Voltage Power supply Current consumption Power supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less Voltage type 0 to 5 VDC, 0 to 10 VDC Input signal Current type 4 to 20 mADC, 0 to 20 mADC Approximately 10 k Voltage type Input impedance Approximately 250 Current type 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within