Series VQ Base Mounted Metal Seal/Rubber Seal B) for respective stations of the manifold. The optional specification permits mixture of single and double wiring. See p.1. 10-160 for details. (+) () 9A 9 stations (+) () 9B Hook groove b on shaft a and close the cover.
Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.
rectifier) AC (Class B coil/H coil) Note 2) Rated voltage 100 VAC, 200 VAC, 110 VAC, 220 VAC, 230 VAC, 240 VAC, 48 VAC DC (Class B coil only) 24 VDC, 12 VDC 10% of rated voltage 10% or less of rated voltage 20% or less of rated voltage 2% or less of rated voltage Class B, Class H Coil specifications Allowable voltage fluctuation AC (Class B coil, with a full-wave rectifier) AC (Class B coil
74.7 EXA1-40 240.4 51 64.4 4.6 71 35.5 75.6 -145No.PF-OMA1007-B EXA1-60-SA-# Refer to separate operation manuals for other AMS components. -146No.PF-OMA1007-B Accessories Seal cap (10 pcs.)
& 2s Complements Data Format AD value AD value AD value 31208 (79E8) (79E8) 1950 (79E) (79E) 1934 (78E) (78E) a Input 0 b 114 (72) (72) 31208 (F9E8) (8618) Input 0 Input 0 a a b Input signal range a 0 to 10 V Input signal range a b 1 to 5 V Input signal range a b 10 to 10 V 10 V 1 V 5 V 10 V 10 V 0 to 5 V 5 V 4 to 20 mA 4 mA 20 mA 5 to 5 V 5 V 5 V 0 to 20 mA 20 mA 20 to 20 mA 20 mA 20 mA
Dimensions [mm] Model L1 L2 L3 A B C D E F G J 127.1 LEPS6m-25m 138.6 11.5 16.5 21 24.5 28 16.5 28 36 76.4 LEPS6m-50m 156.6 169.6 13 22 45 30 52 22 52 60 107.4 18 Series LEPS Dimensions LEPS10 D E C B 4 10 22 ( ) +0.025 0 ( ) +0.025 0 3H9 depth 3 3H9 depth 3 2 x M5 x 0.8 thread depth 10 4 x M4 x 0.7 thread depth 6 28 24 16 K 25 14 Table operating range Note 1) [1] 1 Motor cable length 300
B 5 E A Auto switch mounting groove (Both sides) ( 10 only) Refer to the dimension table. When auto switches are used on 10, side mounting with through-holes is not possible.
Control Bias Pn144 0 to 10 0.1% 1000 Immediately Tuning (Reverse Direction) 2 Vibration Suppression 1 Frequency A Pn145 10 to 2500 0.1 Hz 500 Immediately Tuning 2 Vibration Suppression 1 Frequency B Pn146 10 to 2500 0.1 Hz 700 Immediately Tuning Model Following Control Speed Feedforward Compensation Pn147 2 0 to 10 0.1% 1000 Immediately Tuning 2 2nd Model Following Control Gain Pn148
Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 2 Analogue input range Sets the analogue input device range. Selects the analogue input range. -10..10 V Channel 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.
MRHQ MA DModel MHR2-30 MDHR2-30 B 25 25.5 B 7 7 10 10 503 Rotary Actuated Air Gripper/3-Finger Type Series MHR3/MDHR3 Size: 10, 15 How to Order Connecting port Body side R MHR 3 10 R Without auto switch R: Body side Port With auto switch (Built-in magnet) MDHR 3 10 R M9N S With magnet (For auto switch) Made to Order Refer to page 505 for details.
) 24VDC (10%) 24VDC (10%) 100 to 240VAC (10%) 100 to 240VAC (10%) 100 to 240VAC (10%) 24VDC (10%) 100 to 240VAC (10%) Power consumption 20VA or less 10W or less 20VA or less 10W or less 20VA or less 10W or less 10W or less 20VA or less Between case and AC line: 1500VAC for 1 min.
10 to 40 61.5 79.5 4.5 5.5 30 45 16 10 to 60 70.5 90.5 6.6 8 39 48 20 10 to 60 79 99 6.6 8 42 52 FV 25 10 to 50,75,100 84.5 106.5 5.5 8 48 56 30 10 to 50,75,100 104 126 5.5 8 54 62 FT FX 40 L B + Stroke 10 to 50,75,100 104 126 6.6 9 67 76 FZ A + Stroke 2-FD Bore size (mm) FZ L M 25, 30, 40 10 55 18 16 60 20 20 64 20 FV 25 65 22 34 30 72 22 40 FT FX 40 89 22 50 (mm) L B + Stroke FZ A +
) VPA VPA 1P 3R 32 3 NO 7 VPA3 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 For vacuum/VPA542V-1(-F) 02 03 A B 1/4, 3/8 2(A) port 41.1 2 x 4.2 (For mounting) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x
50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.
connector (5-pin, socket, B-code) of GW unit.
Auto switch A 12 12 B A 5 _ Model B 14.5 14.5 15.5 15.5 10R 10E 10R 10E MHR2 4.7 _ MDHR2 4 4 4 4 2.3-10 Series MHR2/MDHR2 15 Without Auto Switch: MHR2-15R P.C.D29 (Mounting thread) 3-M3 X 0.5 thread depth 6 44 42 MHR2-15E port position B 45 120 o 120 11 C A 36 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port 10 M3 X 0.5 Finger opening port Finger closing port M3 X 0.5 25 o 25 o 6
VFR VP450 VP470 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 82 (3 position: 98.5) 129 VZS 71(95.5) VFS 139.5 B A B A VS4 VQ7 (External pilot port) 1/8 (External pilot port) 1/8 EVS VFN A B B A B B B A EA P EB P EA EB ( ): Port size 3/4, 1 Dimensions: Port
Hs B 30 (33) 36 Auto switch Numbers in ( ) are for type D-F5LF. Approx. Hs D-A44 D-A5/A6 D-A59W 33 Auto switch A Auto switch A B 34.5 Approx. Ht Approx. Ht 56 36 Approx. Hs B Approx.
ZX B B A B A B ZR P1 A A ZM 10 9 4 5 ZMA ZQ 3 ZH ZU ZL ZY ZF 11 ZP Section A-A' (Ejector) 12 SP 2 7 ZCUK AMJ 8 AMV AEP HEP Related Equipment 6 1 Section B-B' (Solenoid valve) Component Parts Replacement Parts Description Material Note Description Part no. No. No.