SMC Corporation of America
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Recommended tightening torque Unit: Nm Thread size 1/8 1/4 3/8 1/2 3/4 1 Tightening torque 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 -7No.PF-OMA1007-B Do not apply torsion or bending moment other than the weight of the product itself. External piping needs to be supported separately as it may cause damage.

-A C2SL-36-A With bowl guard C2SL-36C-A C3SL-36-A C4SL-36-A Drain cock with barb fitting With bowl guard C3SL-36W-A C4SL-36W-A Metal Without drain cock C1SL-2-A C2SL-2-A C3SL-2-A C4SL-2-A With level gauge C3LL-8-A C4LL-8-A With drain cock C1SL-23-A C2SL-23-A C3SL-23-A C4SL-23-A With level gauge C3LL-38-A C4LL-38-A * Bowl seal is included for the AL20-A to AL60-A.

With bracket which can be mounted to the foot at the back of the previous type: F 56 2 x M4 x 0.7 2 x 4.5 84 72 45 7 48.5 41 588 Process Pump (Diaphragm Pump) Wetted Materials: Fluoropolymer Air Operated (External switching type) RoHS PB1313A Series PA How to Order PA(P) Port size Main fluid connection size Connection size in the air side Symbol PAX Female thread Actuation PB PB 01 N01 F01

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

-A C2SL-36-A With bowl guard C2SL-36C-A C3SL-36-A C4SL-36-A Drain cock with barb fitting With bowl guard C3SL-36W-A C4SL-36W-A Metal bowl Without drain cock C1SL-2-A C2SL-2-A C3SL-2-A C4SL-2-A With level gauge C3LL-8-A C4LL-8-A With drain cock C1SL-23-A C2SL-23-A C3SL-23-A C4SL-23-A With level gauge C3LL-38-A C4LL-38-A Note) Bowl seal is included for the AL20-A to AL60-A.

Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) (Mounting hole) 2-8.5 EXH 205.1 196.1 PA PE 156 103 119 112 93 IN EXH OUT 65 62 42 42 25 (EXH port) Rc 3/4 (IN, OUT port) 2-Rc 3/8, 1/2, 3/4 36 71 36 When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

105 to 200 32 20 to 100 14 22 18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) The A and CL measurements are when the unit is in the Z-phase rst detecting position.

Grease pack part number: D-X GR-S-010 (10 g), GR-S-020 (20 g) Individual -X Technical data 961 Series MY1B Construction: 16 to 100 MY1B16 to 100 23 33 32 31 30 24 8 4 6 7 5 1 2 11 19 16 3 6 47 30 37 39 26 MY1B16/20 38 40 MY1B80/100 36 MY1B16 45 43 11 13 15 12 17 20 28 26 10 18 SMC SMC 22 27 MY1B63 36 21 46 44 34 MY1B50/63/80/100 S 42 41 16 9 MY1B80/100 17 MY1B16 29 MY1B80/100 25 14 35 29

36 Series MGG Guide Cylinder With End Lock Operating Range Mounting of Auto Switch Caution Bore size (mm) Auto switch model 1.

Note) In case of mixed ports, indicate piping specifications using the instructions and specification sheet on pages 35 and 36.

How To Order Connector Ass y Number vJ1_g-2o--4A-@ ( 1 10VAC: VJ10-36-3A-') ---fvJ10-20-4AL type I a..l wira len.rrh.-i Lead wire length .

PAF3000/5000 Series Description PAF3000 series PAF5000 series PAF3413 PAF3410 PAF5410 PAF5413 Diaphragm kit KT-PAF3-31 KT-PAF5-31 Check valve kit KT-PAF3-36 KT-PAF5-36 The maintenance procedure is to be distributed individually. Please contact your SMC sales representative for details. Note) One of Nil, F or N is entered as thread symbol.

(SIO mode) Device status parameter (Index 36) Readable device status is as follows. Value Definition of status Evaluation method 0 Operated normally 1 The equipment should be inspected Not available 2 Out of spec.

Specifications 36 Dimensions 39 Accessories 40 -1No.EX-OMP0013-E Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

/min (ANR) Pressure Characteristics (Representative values) AWG20K AWG30K AWG40K 0.25 0.25 0.25 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point Set point 0.2 0.2 0.2 0.15 0.15 0.15 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) Inlet pressure (MPa) Inlet pressure (MPa) 36

No FOR 36 NEXT command was executed without executing FOR command. No operation program 37 Trying to execute a program/step with no commands. Invalid movement command 38 Trying to execute a command other than MOVA, MOVI, or ASET with a step (position movement) designated operation. Format error 39 An error is found in the attached value of a command being programmed.

Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36

5 No. 4 No. 3 No. 2 No. 1 6 5 33.6 (Pitch) P = 6 (2) 38 4 3 2 1 1 (No.1) Groove side Barb fitting [1(P), 2(A), 3(R) port] Applicable tubing O.D. 4, I.D. 2.5, Polyurethane tubing (made by SMC) Soft nylon tubing (made by SMC) Connector (L = 300 to 1000) Lead wire length Cut dimension for panel mount (mounting surface) 32.6 20 (33.7) 31.5 25 2-M2 x 0.4 2-2.2 (For C2) (10) (10) 6 (15) 33.6 36

(b) C(c) Bore size (mm) Rod end configuration Stroke (mm) Clean series 4 6 8 10 15 20 b Action Series Auto switch B Double acting Male thread Without thread None 4 10() 15() 13() 4 Single acting, Spring return 6 13(13) 19(22) 13(33) Double acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36