CLK1

Chromated Aluminum alloy Carbon steel Flat washer Bushing Lead-bronze casting Rolled steel Cotter pin Bushing Lead-bronze casting Low carbon steel wire rod FR One-touch fitting Clevis bushing Oil-impregnated sintered alloy KRL08-02S Spatter cover Pivot Carbon steel Heat treated, Zinc chromated KR-08C FR double layer tube Lock ring Heat treated Carbon steel TRB0806W 30 31 32 33 34 35 36 37

Clamp Cylinder with Lock

1 o i w q $7 $8 @4 @3 @5 @1 t 40 Description Component Parts No. 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Qty 1 1 1 1 1 1 1 1 1 1 1 2 1 4 1 1 1 1 1 2 2 4(5) 1 2 Note Zinc chromated Zinc chromated Zinc chromated Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Copper alloy

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Analog Output 1 to 5 VDC 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 0.6 0 0.2 2 0 2 Differential pressure [kPa] Differential pressure [kPa] Dimensions 2 x 3.5 through Indicator light 24.3 37 27 4.4 4.8 10.7 7.3 25 37 9 3000 15 11.7 10.4 2 x M3 x 0.5 depth 4 With bracket A 37 27 25 38.5 40.9 4.2 11.6 69.5 68 7 20 1.6 A View Bracket 836 Pressure Sensor For General Fluids Series

AC Servo Motor Driver

Y1 X2 M Torque limiting mode ABS transfer mode Torque limiting mode 14 37 14.

4-channel Flow Monitor ( compatible)

(Refer to page 37) Press the SET button to set. Move on to the display colour setting. Display colour setting Press the UP or DOWN button to select the display colour. Press the SET button to set. Return to function selection mode.

Compact Manifold Regulator Series ARM5

Dimensions 28 58 (Max. 60) 37 IN OUT 20 15 5 22 34 14 31 SMC IN OUT 62 4 x 1.5 W O-ring size Holding screw M3 x 0.5 x 20 SMC P K U C S O H L 9 524 Series ARM10/11 Blocks/Specific Product Precautions 1 Be sure to read before handling. Refer to front matters 42 and 43 for Safety Instructions and pages 287 to 291 for Precautions on every series.

Precision Regulator

1 Standard specifications Semi-standard specifications IR3000 series Set pressure Max. 0.8 MPa 2 AP100 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Bracket, name plate reverse mounted R Connection NPT 1/8 IR2000 series N01 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01

Step Motor Controller

Refer to the dimensions on page 52 for the mounting dimensions. (35) (25) L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5 385.5

0.4

A combination of J and N is not available. 37 Note 6) Indicate R for the valve with external pilot.

High-precision Digital Pressure Switch ( compatible)

Measurement mode] 20 Pressure Setting 20 3-Step Setting Mode 21 Simple Setting Mode 23 Function Selection Mode 25 Function selection mode 25 Default setting 25 F 0 Display units, switch output specifications and diagnostic information selection function 27 F 1 Setting of OUT1 29 F 2 Setting of OUT2 32 F 3 Digital filter setting 34 F 4 Auto-preset function 35 F 6 Fine adjustment of display value 37

Digital Pressure Switch ( compatible)

16 Installation 16 Piping 18 Wiring 20 Outline of Settings [Measurement mode] 22 Pressure Setting 23 3 Step Setting Mode 24 Simple Setting Mode 26 Function Selection Mode 28 Function selection mode 28 Default setting 28 F 0 Display units, switch output specifications and diagnostic information selection function 30 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37

High-precision Digital Pressure Switch

15 Installation 15 Piping 17 Wiring 19 Outline of Settings [Measurement mode] 22 Pressure Setting 22 3-Step Setting Mode 23 Simple Setting Mode 25 Function Selection Mode 27 Function selection mode 27 Default setting 28 F 0 Display units, switch output specifications and diagnostic information selection function 30 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37

Environment

Table Displacement (Reference Value) 0.06 W L Displacement [mm] 0.04 LEFB32 (L = 30 mm) 0.02 LEFB25 (L = 25 mm) LEFB40 (L = 37 mm) 00 100 200 300 Load W [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. Note 2) Check the clearance and play of the guide separately.

Slide Unit Series CX2/CXWM/CXWL

D-X Individual -X 475 Series CXWM Construction: 10, 16, 25 CXWM10 With end lock CXWM16, 25 16/With end lock 25/With end lock Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM Construction: 10, 16, 25 Component Parts: With End Lock No. 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 Component Parts No. 1 2 3 4 5 6 7 Note Description Description Material Material Aluminum alloy

7

Conduit VXR C E U 280 VXH 23 T VXF G1/2 VX3 A VXA OUT IN OUT IN M B J I F 2 x P Port size (D) L K Flat terminal 11 U E C T A B OUT IN OUT IN M 2 x P Port size J I F L K (D) (mm) Electrical entry Port size P A B C E F I J K L Model Flat terminal Conduit terminal Conduit D M T T U U V T U 55 (61) 99.5 68.5 55 (61) 47.5 61 (67) 23 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37

Digital Pressure Switch ( compatible)

OUT1 ON : Green OUT1 OFF: Red [F 2] Setting of OUT2 Page 37 Same setting as [F 1] OUT1.

Slide Unit Series CX2/CXWM/CXWL

D-X Individual -X 475 Series CXWM Construction: 10, 16, 25 CXWM10 With end lock CXWM16, 25 16/With end lock 25/With end lock Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM Construction: 10, 16, 25 Component Parts: With End Lock No. 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 Component Parts No. 1 2 3 4 5 6 7 Note Description Description Material Material Aluminum alloy

VQ4000

19 37 0.5 Note 1) Set the pressure within the operating pressure range of the solenoid valve.

Electric Rotary Table

L 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5 510.5 273 298 323 348 373 398 423 448 473 498 Trademark DeviceNet is a trademark of ODVA.

3

VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal Conduit Q R Q R S Q R S T Q R VXS23 1/4, 3/8 29.5 66 67 58 55 110.5 60 79.5 102.5 50 60 VXS24