OMU0023

Modbus RTU protocol (Hexadecimal notation) Request data 01 08 0 1234 ED7C Response data (normal response) 01 08 0 1234 ED7C (Binary notation) Response data 0001 1000 0 0 0001 0010 0011 0100 1110 1101 0111 1100 Response data (normal response) 0001 1000 0 0 0001 0010 0011 0100 1110 1101 0111 1100 For correspondence between ASCII notation and ASCII hexadecimal notation, refer to the 8.4 ASCII

Standard Combinations

40C JIS Symbol ACG40C ACG20C Air filter Lubricator Regulator Standard Specifications ACG20C ACG30C ACG40C Model AF40 AFM40 ARG40 AF30 AFM30 ARG30 AF20 AFM20 ARG20 Air filter Component Mist separator Regulator 1/4 3/8 1/2 1/8 1/4 1/4 3/8 Port size Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Regulating pressure range 0.05 to 0.85 MPa Rated flow (l/min (ANR)) 450 200 1100

25

silicon 100 m/s2 Ambient and fluid temperature Ambient humidity Material Impact resistance Standards/Directive CE (EMC Directive: 2004/108/EC) Note) When the air purge is performed between a charged object and an ionizer at a distance of 300 mm Number of emitter cartridges/Bar weight 340 5 590 740 860 Bar length symbol 400 6 640 790 910 460 7 690 840 960 580 9 790 940 1060 640 10 830 980 1100

3

Max. operating pressure differential Note 3) (MPa) Flow rate characteristics Max. system pressure Note 3) (MPa) Weight Note 2) (g) AC DC Kv Cv Body material Size Port size (Nominal diameter) Orifice diameter (mm) Model Min. operating pressure differential Note 1) (MPa) VXH 2.1 2.4 3 1/4 (8A) 10 VXS235 600 3/8 (10A) 2.4 2.8 4 1/2 (15A) 15 VXS245 4.6 5.3 720 5 3/4 (20A) 20 VXS255 7.9 9.2 1100

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Mechanically Jointed Rodless Cylinder Series MY1

) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1CW25 MY1CW25 (1000) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (900) (1000) (900) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) (900) 20 20 1.

MY1

Also, for long stroke operation involving vibration and impact, use of a side support is recommended even if the spacing value is within the allowable limits shown in the graph. 100 90 (1500) (1500) (1500) (1500) 80 MY1M50 MY1M50 MY1M50 MY1M50 l l 70 MY1M40 MY1M40 MY1M40 MY1M40 (1300) (1300) (1300) (1300) 60 50 MY1M32 MY1M32 MY1M32 MY1M32 (1100) (1100) (1100) (1100) 40 2.

JXCx-OMU0026

1200 1000 1100 1200 Max. speed [mm/s] 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and interpolation) 30 20 10 Min. speed [mm/s] (Speed tuning control) 49 33 17 -112No.

Refrigerated Air Dryers

Compressor intake Rated conditions *4 60 Hz 4.6 6.5 10.4 13.3 Inlet air pressure [MPa] 0.7 Refrigerant R407C (HFC) IDF E Inlet air temperature [C] 55 Ambient temperature [C] 32 Outlet air pressure dew point [C] 10 Single-phase: 230 VAC 10% (50 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Power supply voltage (Frequency) Power consumption [W] 50/60 Hz *5 Three-phase 200 V 1100

CRQ2

Weight JIS Symbol (g) Standard weight Size 90 180 10 120 150 15 220 270 20 600 700 30 900 1100 40 1400 1600 Values less the weight of auto switch. Precautions Be sure to read before handling. Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series.

Compact Rotary Actuator

Table 3 Specification-3 Size Weightg Internal capacitycm 90 180 360 90 180 360 10 120 150 200 1.2 2.2 4.3 15 220 270 380 2.9 5.5 10.7 20 600 700 1000 7.1 13.5 26.3 30 900 1100 1510 12.1 22.9 44.7 40 1400 1600 2280 20.5 39 76 -17- 1-2 Effective output Fig.1 Effective output 1-3 Rotation range When pressurized from the Port A, the shaft will rotate clockwise.

Low-Speed Rotary Actuator

G 1/8 NPT 1/8 , NPTF 1/8 Output (Nm) { At 0.5MPa } 0.3 0.75 1.8 3.1 5.3 Table 2 Allowable kinetic energy and adjustment range of rotating time Rotating speed adjustment range having Size Allowable kinetic energy stable operation J s/90 10 0.00025 0.7 to 5 15 0.00039 20 0.025 1 to 5 30 0.048 40 0.081 Weight Table 3 Weight (g) Weight * Size 90 180 10 120 150 15 220 270 20 600 700 30 900 1100

CRQ2

With air cushion Rotation time (s/90) Rubber bumper Without cushion 0.25 x 100.2 to 0.7 10 0.39 x 100.2 to 0.7 15 0.12 0.2 to 1 40 0.025 20 0.25 0.2 to 1 40 0.048 30 0.40 0.2 to 1 40 0.081 40 ) Allowable kinetic energy with cushion Maximum energy absorption with optimal adjustment of cushion needle Weight Table (g) Standard weight Size 90 180 120 150 10 220 270 15 600 700 20 900 1100

VQ5000

In addition, 3 of the wiring types are available with IP65 enclosures. 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ5100--04 VQ5101--04 IP65 compatible Enclosure Individual wiring type kit (Connector) C It is when the cylinder is extending that is meter-out controlled by speed

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1 220 LE-CA-3 420 LE-CA-5 700 LE-CA-8 1100 LE-CA-A 1370 LE-CA-B 2050 LE-CA-C 2720 Connector B terminal no.

Series SV

0.6 0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100

PFxx-OMY0005

(Window comparator) 1250 0x04E2 1ot (Selection of output type) Setting of OUT1 output normal and reserved output U8 0 Y 0: 1_P (Normal output) 1: 1_n (Reverse output) 2 R/W P_1 (n_1) (Selection of output set value) Setting range 0xFFCE to 0x041A (-50 to 1050) Setting of OUT1 output set value (Hysteresis) S16 500 Y 1 R/W H_1 (Setting of OUT1 hysteresis) Setting range 0x0 to 0x044C (0 to 1100

4-channel Flow Monitor ( compatible)

Flow L/min 50 to 250 20 to 280 250 L Flow cfm 13 to 66 5 to 74 PD 200 to 1000 80 to 1120 Temperature oC 0 to 100 -10 to 110 50 oC Temperature oF 32 to 212 14 to 230 PD 0 to 1000 -100 to 1100 Flow L/min 0.0 to 10.0 0.0 to 10.5 10 L Flow gal/min 0.000 to 0.353 0.000 to 0.370 PD 0 to 1000 0 to 1050 Flow L/min 0.0 to 50.0 0.0 to 52.5 50 L Flow gal/min 0.00 to 1.76 0.00 to 1.86 PD 0 to 1000 0

Programless controller Step motor (servo 24 VDC)

1 60 300 60 300 60 300 2 70 400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100 600 5 150 700 200 700 200 700 6 200 800 300 800 300 800 7 300 900 400 900 400 900 8 400 1000 500 1000 500 1000 9 500 1200 600 1200 600 1200 10 600 1400 700 1400 700 1400 11 700 1600 800 1600 800 1600 12 800 1800 900 1800 900 1800 13 900 2000 1000 2000 1000 2000 14 1000 2500 1200 2500 1200 2500 15 1100