Thermo-chiller Series HRS Compact Type (Except HRS050)

HRS012-A-10 HRS012-W-10 HRS018-A-10 HRS018-W-10 Model Air-cooled refrigeration Water-cooled refrigeration Air-cooled refrigeration Water-cooled refrigeration Cooling method Refrigerant Control method Ambient temperature/humidity Note 2) R407C (HFC) PID control Temperature: 5 to 40C, Humidity: 30 to 70% Clear water, 15% ethylene glycol aqueous solution Note 5) Circulating fluid Note 3) Circulating

MY1B

Refer to page 959. 1500 1500 1500 1500 1000 Max. collision speed (mm/s) 80 45 25 70 80 Max. operating frequency(cycle/min) 1.96 6.86 8.34 4.22 Extended 1.96 Spring force (N) 4.22 15.98 20.50 6.86 Retracted 3.83 5 to 60 Operating temperature range (C) The shock absorber service life is different from that of the MY1B cylinder depending on operating conditions.

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

Shock Absorber Specifications RB 1412 RB 1007 RB 2015 Shock Absorber Model for L and H Units Model Bore size (mm) 25 Stroke adjustment unit Type Max. absorbed energy (J) 58.8 19.6 5.9 32 40 15 12 7 Stroke absorption (mm) RB1007 L RB1412 Standard (Shock absorber/RB series) 1500 1500 1500 Max. collision speed (mm/s) RB1412 H RB2015 25 45 70 Max. operating frequency (cycle/min) RJ1007H L RJ1412H

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Shock Absorber Specifications Shock Absorbers for L Unit RB 0806 RB 1007 RB 1412 RB 2015 Model Stroke adjustment unit Standard (Shock absorber/RB series) Bore size (mm) 2.9 6 5.9 7 19.6 12 58.8 15 Type 20 Max. energy absorption (J) Stroke absorption (mm) Max. collision speed (mm/s) 16 25 63 32 40 50 1500 L RB0806 RB1007 RB1412 RB2015 80 1.96 4.22 70 4.22 6.86 45 6.86 15.98 25 8.34 20.50 Max

Series PF2W Digital Flow Switch For Water

min 5 to 40 L/min 0.5 to 4 L/min 0.1 L/min 1 L/min 0.5 L/min 0.05 L/min 0.1 L/pulse 1 L/pulse 0.5 L/pulse 0.05 L/pulse Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Operating fluid temperature Accuracy Repeatability Temperature characteristics Note 1) 0 to 50C 5% F.S. 3% F.S. 3% F.S. 2% F.S. 5% F.S. (0 to 50C, 25C reference) Current consumption (No load) Weight Note 2) 70

IZT40/41/42

Bar + High-voltage power supply module + Controller IZT 40 52 D 1 6H R F X10 IZT 42 52 D 1 6H R F X10 Bar IZTB X10 40 52 D 1 6H R F Standard model no. e pages 17 and 18 Type Bar length 40 411 Symbol Bar length [mm] 28 280 52 520 70 700 76 760 88 880 94 940 100 1000 106 1060 118 1180 Symbol Bar length [mm] 124 1240 136 1360 142 1420 148 1480 154 1540 166 1660 172 1720 178 1780 184 1840 Symbol

Thermo-chiller Basic Type HRSE Series

Model HRSE012-A-10-(T) HRSE018-A-10-(T) Cooling method Air-cooled refrigeration Refrigerant R407C (HFC) Refrigerant charge kg 0.3 0.32 Control method Compressor ON/OFF Ambient temperature/Humidity/Altitude Note 1), 11) Temperature: 5 to 35C, Humidity: 30 to 70%, Altitude: less than 3000 m Circulating uid Note 2) Tap water, 15% ethylene glycol aqueous solution Set temperature range Note 1)

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specications Model HRSH090-Al-20-l HRSH090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) (GWP1975) Refrigerant charge kg 1.32 Control method PID control Ambient temperature/humidity Note 1), 9) C/% 5 to 45/30 to 70% Circulating uid Note 2) Tap water, 15% Ethylene

Thermo-chiller

Model HRS018-A-20--R HRS030-A-20--R Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 0.39 Control method PID control Ambient temperature/Humidity/Altitude1 [C] Temperature: 5 to 45C, Humidity: 30 to 70%, Altitude: less than 3000 m Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution4 Set temperature range1 [C] 5 to 40 Cooling capacity3

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

HRW002-H HRW002-HS HRW008-H HRW008-HS HRW015-H HRW015-HS HRW030-H HRW030-HS Model Water-cooled Cooling method Ambient temperature/humidity Note 1) Temperature: 50 to 95F (10 to 35C), Humidity: 30 to 70%RH FluorinertFC-40/GALDEN HT200 Circulating fluid Note 2) Temperature range setting Note 1) 68 to 194F (20 to 90C) Cooling capacity (50/60 Hz common) (kW) 2 8 15 29 Circulating fluid system

Mechanically Jointed Rodless Cylinder Basic Type ø 25, ø 32, ø 40 MY1B Series

:With low load shock absorber + Adjustment bolt With short spacer With long spacer H:With high load shock absorber + Adjustment bolt With short spacer With long spacer Port Port Spacers are used to fix the stroke adjustment unit an intermediate stroke position Shock Absorber Specifications Shock Absorber Model for L and H Units RB1412 19.6 12 1500 45 6.86 15.98 5 to 60 RB1007 5.9 7 1500 70

KT10

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e No pressure gauge 0 6 10 20 40 60 Q w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN e 4P 4PN 4000 psig/bar 3) 4 4B NPT 1/4 inch

Stroke Reading Rodless Cylinder with Brake ML2B Series ø 25, ø 32, ø 40

SL6 LL6 L6 L7L6 SL L L6L L7L Without unit Nil LS L6S L7S Left side stroke adjustment unit L: With low load shock absorber + Adjustment bolt Spacer length Port Port With short spacer With long spacer Shock Absorber Model 25 RB1007 Model 32 RB1412 40 RB1412 Shock Absorber Specifications 40 RB1412 19.6 12 1500 45 6.86 15.98 5 to 60 32 RB1412 19.6 12 1500 45 6.86 15.98 25 RB1007 5.9 7 1500 70

2-Layer Soft Fluoropolymer Tubing Series TQ

acid Sulfuric acid Nitric acid Caustic soda Caustic potash Ammonlum hydroxide Hydrogen peroxide Water Phenol Benzene Toluene Xylene Carbon tetrachlorlde Acetone Methyl ethyl ketone Citric acid Stearic acid Formic acid Ethyl acetate Butyl acetate Methyl alcohol Ethyl alcohol Butyl alcohol Isopropyl alcohol Cellosolve Hexane Cyclohexane 58 (0.4) 145 (1.0) 131 (0.9) 87 (0.6) 87 (0.6) 158 (70

Series TRTU Flame Resistant (Equivalent to UL-94 Standard V-0) FR Three-layer Polyurethane Tubing

Min. bending radius (mm) Note 2) 50 60 70 80 2R 20 to +60C Water: 0 to 40C (No freezing) Ambient and fluid temperature Fixed end Inner tube Polyurethane Middle layer Material Aluminum laminated film Outer layer Polyolefin (Equivalent to UL-94 standard V-0) Note 1) Applicable for general industrial water. Please consult with SMC if using for the other kind of fluid.

Water Regulator

Thread type Port size Nil Rc N NPT 01 1/8 02 1/4 Related Equipment Check Valve INA-14-290/XTO-674Water Strainer Series WF300 Body material: Bronze Mesh: 100/70/50/25 mesh 14-E628 Body material: Brass Best Pneumatics Port size: Rc1/8 Port size: Rc1/4, 3/8, 1/2 WR110--X224/WR110--X215 14-E627

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70

In-line Air Filter ZFC Series

Metric size 2 3.2 3.2 4 4 6 6 8 10 12 Inch size 1/8" 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" 3/8" 0.8 Fluid Air, Nitrogen 0.6 Operating pressure 100 kPa to 1.0 MPa (at 20C) Flow rate (Positive pressure) [L/min] *1 15 45 50 80 100 200 250 450 550 650 0.4 Flow rate (Vacuum pressure) [L/min] 2 5 7 10 10 20 30 70 80 100 0.2 Proof pressure [MPa] 1.5 (at 20C) Operating and ambient temperature range

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads FILTER/REGULATOR, MODULAR F.R.L.. FILTER/REGULATOR. 0.36000 lb. N01.