High Vacuum Angle Valve 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.
Product (15) Plug assembly -24- 11. Disassembly Drawing 11-1. AR20-D/ AR30-D/ AR40-D/ AR50-D/ AR60-D Cross recessed round head screws (4 pcs.) (10) Valve assembly Bonnet Valve spring (Protrusion on IN side) Washer (only for 50 and 60 sizes) Pressure regulating screw assembly (12) Valve guide assembly Pressure regulating spring Cover (11) Diaphragm assembly Cap OUT Body I N -25- 11-2.
Adjustment method 6 3.1 Vertical auto switch unit 6 Operating Range and Hysteresis 6 Auto Switch Mounting 7 Auto Switch Adjustment 10 3.2 Angle adjustment unit 11 Rotating angle with angle adjustment unit 11 Rotating Angle Adjustment Method 11 4.
/Single Unit Body material Brass 2 x 3.4 Mounting hole W Y Grommet X U 300 Q F D Full wave rectifier (AC type) C R [mm] 1 E G Mounting method Model Port size P B B1 C D E F J K M 2 x P Port size B B1 VDW1 M5 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 22 11 51.7 20 8 13.5 M3 5 15 Mounting bracket dimensions (XD) Electrical entry M Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17
-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Flange type KF (NW), CF KF (NW) KF (NW), CF KF (NW) Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.
For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 Paddle Style Flow Switch Series
6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal) 86.4 Air blow port 8 6 2 x M3 x 0.5 thread depth 10 26 34.7 11 High flow rate nozzle IZN10E-02-X367 (103) 16 92.5 5 5.5 Variable nozzle direction 12 46 18.5 Air blow port 8 4 22 IZN10E Series Made to Order 2 This product is an individually applicable product.
Magnet lever Note) Note) These items (no. 11, 13, and 14) consist of auto switch unit and angle adjuster. Refer to pages 140 and 141 for detailed specifications.
x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1 T1 U1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.
<9> Overload judging time setting Sets time for judgment of overload <10> Output ratio indication Indicates output ratio of controller <11> Temp. upper/lower limit alarm sequence setting Determines whether or not temp. upper/lower limit alarm is output when power is turned on.
FGDA(1 ) FGDB(2 ) 50mm Rc Rc 9/11 FGX-OM-L007-C 5. 1 1) 50mm 2) 0.02MPa 0.02MPa 3) 2 1) 2) 6. ,0.1MPa, 11 1) 2) oC 40 3) IN OUT 4) 5) 6) 7) *2 250mm 8) 21 1) 6 1 2) 3) 2 250mm * * 4) 5) *:FGDT/F 25NmFGDC/E 15Nm 10/11 FGX-OM-L007-C 3 1) 2) 7. 1 2 1 11/11 FGX-OM-L007-C Revision history A P6. 10 1 B P5. P6.1-2. P7.
The installation torque is 0.3 to 0.5 Nm. 14-11-15
Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD .
310.5 300 287 12 12 335.5 325 306 15 13 348 337.5 325 11.5 14 373 362.5 344 14.5 15 385.5 375 363 11.5 16 410.5 400 382 14.5 17 423 412.5 401 11 18 448 437.5 420 14 19 473 462.5 439 17 20 485.5 475 458 14 3-3-84
MHK MHS 90 reverse unit MHC Air gripper for auto hand changing system MHT MHY Variations MHW Adapter for assembling robot Series MA2 8, 10, 11, 14, 15, 20 Series MA3 10, 11, 14, 15, 20, 24, 25 Additional installation unit of electrical contact point (Able to add 8 contact points) 90 reverse unit -X Air grippers for auto hand changing system (10 to 20) Standard type Narrow type Added to the
Communication connector D-sub 9 pin (socket) Holding screw: M2.6 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.
, 6 11 to 22 X-2 3, 4, 5, 6 MSQ MSZ CRQ2X MSQX Symbol: A9 Symbol: A10 MRQ The long shaft can be further shortened by changing the length of the standard chamfer on the long shaft side.
For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch
1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.
LTF8PH100LTF8PH200LTF8PH300LTF8PH400LTF8PH500LTF8PH600LTF8PH700LTF8PH800LTF8PH900LTF8PH-1000100 200 300 400 500 600 700 800 900 2 3 4 5 6 7 8 9 10 11 1000 Positioning Time Guide Positioning time A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.5 sec.) Maximum acceleration: 3000 mm/s2 Positioning time (sec.)