Environment

Operating condition Model LC3F2 A LEC-MR-RB-032 B LEC-MR-RB-12 Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

24 VDC) Max. number of step data 64 points Power supply voltage 24 VDC 12 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Specifications Battery-less Absolute (Step Motor 24 VDC) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Table of Contents

MGGL Ball bushing bearing CX 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 DIntermediate strokes and short strokes other than the above are produced upon receipt of order.

JXCx-OMT0002

JXC-OMT0002-C Model LEFS40 Lead symbol H A B Lead [mm] 30 20 10 Stroke (mm) 1200 1000 1100 1200 1000 1100 1200 Max. speed [mm/s] 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and interpolation) 30 20 10 Min. speed [mm/s] (Speed tuning control) 49 33 17 Supplement 1.3 Initial setting of LES(H) series Model LES(H)8 LES(H)16 LES(H)25 Lead symbol J K J K J K Lead [mm] 8 4 10 5 16

SFOD-OMT0010

Actuator cable: 20 m maximum Cooling method Natural air cooling Operating 0 to 40oC (No freezing) temperature range Operating humidity 90% RH or less (No condensation) range Storage -10 to 60oC (No freezing) temperature range Storage humidity 90% RH or less (No condensation) range Insulation Between the external terminals and case resistance 50M (500 VDC) Weight 1050 g (Direct mounting) 1100

Magnetically Coupled Rodless Cylinder

Theoretical Cylinder Thrust Symbol Specifications 1200 -XB11 -XB13 -X116 -X132 -X160 -X168 -X206 -X210 -X322 -X324 -XC57 Long stroke (2001mm and up) Low speed specifications (7 to 50mm/s) 1100 Hydro specifications 40 40 Axial ports 1000 High speed specifications Helical insert thread specifications 900 Added mounting tap positions for slider Oil-free exterior specifications Theoretical thrust

MY1

Support brackets are not for mounting; use them solely for providing support. m 100 90 (1500) (1500) (1500) (1500) 80 MY1M50 MY1M50 MY1M50 MY1M50 MY1M50 MY1M50 l l 70 MY1M40 MY1M40 MY1M40 MY1M40 (1300) (1300) (1300) (1300) 60 50 MY1M32 MY1M32 MY1M32 MY1M32 (1100) (1100) (1100) (1100) 40 MY1M25 MY1M25 MY1M25 MY1M25 MY1M25 MY1M25 30 (1000) (1000) (1000) (1000) MY1M20 MY1M20 MY1M20 MY1M20 MY1M20

AC

VBA200: Qb = 500 [l/min(ANR)] VBA400: Qb = 1100 [l/min(ANR)] Avoid pulsation Max. 0.05MPa NO VBA400 NO Judgement of flow rate Qb < Q YES VBA200 YES Can not get necessary pressure. L W Tc[s] = Select tank from table below.

Vacuum System Peripherals:

At compressor discharge concentration 30 mg/m3 (ANR) Modular, Mist separator Series AFM Rated flow rate (l/min (ANR)) Oil mist concentration at outlet side 200 450 1100 Filtration (m) Port size Rc Model AFM20 AFM30 AFM40 AFM40-06 1 8 1 4 , , , , Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) 1100 1 4 3 8 0.3 1 4 3 8 1 2 3 4 At inlet pressure 0.7 MPa (Rated flow depends on inlet pressure.)

KT10

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

MK

1149 825 502 16.5 R 50 20 1961 1365 980 596 19.6 H 2801 1950 1400 851 28 R 63 20 3121 2172 1560 948 31.2 H Note) Theoretical force (N)=Pressure (MPa) X Piston area (cm2) X 100 Operation direction R: Rod side (Clamp) H: Head side (Release) Weight/Mounting Through Hole Unit: g Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 10 20 50 70 100 250 280 500 595 87 123 290 320 525 640 1100

Modular F.R.L. Units

1100 200 450 Rated flow (L/min (ANR)) Note 1) Polycarbonate Bowl material Bowl guard Standard (Polycarbonate) Semi-standard (Steel) Relieving type Regulator construction 0.82 1.26 1.42 0.38 0.67 Weight (kg) Note 1) Conditions: Mist separator inlet pressure: 0.7 MPa; The rated flow varies depending on the inlet pressure.

Compact Hydraulic Cylinder

25014 7147 Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight Unit: g Male thread additional weight 5 Cylinder stroke (mm) Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 32 40 50 180 200 220 240 260 280 300 320 340 360 10 610 710 330 350 370 390 410 430 450 470 490 510 52 760 860 480 500 520 540 560 580 600 620 640 660 52 1250 1400 860 890 920 950 980 1010 1040 1070 1100

17

MY2 H/HT m MY3A MY3B 60 MY3M (1550) MY1B40 50 L (1350) 40 MY1B32 Mass m (kg) (1100) 30 MY1B25 m L 20 m 10 0 5000 4500 4000 3500 3000 2500 2000 1500 1000 500 0 Support spacing L (mm) L L Caution D1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting it.

Modular F.R.L. Unit

450 1100 200 0.3m (95% filtered particle size) Maximum 1.0mgf/Nm (approx. 0.8ppm) Note 2) Nominal filtration rating Outlet side oil mist concentration Element life Bowl material Drain capacity cm Weight kg Accessories Bowl guard 2 years or when the pressure drop hits 0.1MPa.

Modular F.R.L. Unit

1100 Nominal filtration rating 0.3m (95% filtered particle size) Outlet side oil mist concentration Maximum 1.0mg/m3 (ANR) (approx. 0.8ppm) Note 2) AFM30 Bowl material Polycarbonate Bowl guard option Standard Drain capacity (cm3) 8 25 45 45 Weight (kg) 0.18 0.22 0.44 0.49 Note 1) When the inlet pressure is 0.7MPa.

SV

1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable related components Applicable related components For details regarding different conditions, make determinations after using the SMC Model Selection Program Pneumatic Cylinder Drive Systems.

LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1