Pilot Operated

0 A !3 !2 !1 o i t !0 !3 !2 !1 o i e t !0 A A e u w y q B C P2 P1 OUT IN P1 w y u B q w y u B q P2 OUT C C IN VXD2272/2382/2392 (32A to 50A) VXD2270/2380/2390 (32A to 50A) !4 !5 !3 !1 i t e !2 !0 A r u B y q !3 !2 !1 i t e o !0 A r u B y q w o w C C Operation When the coil !

0.4

Note 4) Dual 3-port type is not applicable. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 Note) C C: Locking type (Manual) (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.

SFOD-OMT0010

Green 3 COM-A/COM B-3 A 10mNote) Blue 4 COM-B/ A-3 B 15mNote) (c) Shield Cable colour Terminal number C 20mNote) Vcc B-4 Brown 12 Black 13 GND A-4 A B-5 Red 7 Note)Produced upon Black 6 A A-5 receipt of order B B-6 Orange 9 Black 8 B A-6 (Only "Robotic type cable" 3 is available) Actuator side Controller side (14.2) (b) 2 1 (5.5) (14) (a) B A1 5 6 (17.7) 1 (c) 2 1 A6 B6 (18) (6.3) 16 15

Table of Contents

VMG Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated J D NBR, Stainless steel I G F E C Thread B A Barb one-touch: M-32F-2, M-04F-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g A B C D E M Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9

Prevents Micro-Bubbles

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com N B A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

High Purity Chemical Valve

Stations PFA Port size Orifice diameter 1/4 3/8 1/2 Valve type Symbol Type 4 8 12 Manifold P P Stations are counted from station 1 on the left side, with the A (OUT) ports in front. A A N.C. A (OUT) port A Non-locking Locking A LLH2A-03-02-C 1 set 1 set Manifold base part no. LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Sensors Triangle mark position A A A A A 92.2 18 83.7 28.8 A B A B (Lateral connector entry) Manual override Press and turn for the locking type. ( ) 4(A) port side: Orange 2(B) port side: Green DIN rail holding screw Connector case Release lever (Both sides) L2 5 (Rail mounting hole pitch: 12.5) L1 Applicable connector: 20 pin MIL type (Conforming to MIL-C-83503) Applicable connector: 10

A_HEC-OM-K001

During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.

NCA1

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if the surge is applied repeatedly. When a load, such as a relay or solenoid which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

Parallel Style Air Gripper Series MHZ

when using the auto switch at the square groove. 410 Standard Type/Series MHZ2 Finger Option Side Tapped Mounting [1/N1] Through-holes in Opening/ Closing Direction [2/N2] 4 x MM through (Thread for mounting attachment) C C B A 4 x H through (Hole for mounting attachment) S S O O B A (mm) (mm) Model A 2.5 3 4 5 6 7 9 Model A 2.5 3 4 5 6 7 9 B 5 5.7 7 9 12 14 17 B 5 5.7 7 9 12 14 17 C 2 2

Output block / Power block

(Current consumption of one load connected to one output x output number) x Output block number = (0.5 A x 2 points) x 2 pcs. = (1.0 A) x 2 pcs. = 2 A Total current consumption = 20 mA + 2 A = 2.02 A Maximum supply current for Power block = 3.1 A Result 2.02 A 3.1 A OK -25No.EX-OMH0025-C AS-i power supply system If an AS-i power supply system is the only power supply, the supply current

Series AP500

Body Poppet 316L SS Diaphragm 316L SS Nozzle Code S SHP SH 316L SS secondary remelt 316L SS Seat material Hastelloy C-22 Hastelloy C-22 Code Material PCTFE (Standard) PTFE 3) Hastelloy C-22 Hastelloy C-22 No code TF H 3) PTFE recommended for applications such as within a process tool.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

Refrigerated Air Dryer

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

CQS

For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2. Even if a proper plier (tool for installing type C snap ring) is used, it is likely to inflict damage to a human body or peripheral equipment, as a snap ring may be flown out of the tip of a plier (tool for installing a type C snap ring).

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G MM L J K C D B A W MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 26 55 115 235 420 4.45 5.8 7.45 8.9 14.8 17.7 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 3 5 6 8

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

NCA1

B PB + Stroke A 4-EE (NPTF) 4-DD D across flats Stroke A Stroke B 4-NT Depth ND SN + Stroke A + Stroke B LF + Stroke A + Stroke B ZB + Stroke A + Stroke B Bore size (in) MM KK A AA B BA C D DD E EA EE G J R TN WF XT Y LF P A PB PC 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 1

NCA1

Both ends N W/o cushions H Head end R Rod end Dimensions C85 C95 CP95 P + stroke A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM KK A AA B C D DD E EA EE G K R WF Y LD P PC ZZ SN 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26