.: PNP; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: F (Instantaneous Flow: gal/min, Accumulated Flow: gal, Temperature: °F), Bracket: None, Calibration Certificate: None

Series: NCA1 (Standard), Mounting: F (MF1, Front Flange), Bore Size: 500 (5" - Large Bore), Stroke: 2400 (24"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: F (Flanged), Adjustment Range: Not Applicable, Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: F (Front Flange), Type: Standard, Bore Size: 32mm, Port Thread Type: F (Built-in One-touch Fittings), Stroke: 100mm, Body Option: M (Rod End Male Thread)

Magnet: D (Built-in), Mounting: F (Front Flange), Type: Standard, Bore Size: 32mm, Port Thread Type: F (Built-in One-touch Fittings), Stroke: 75mm, Body Option: M (Rod End Male Thread)

Magnet: None, Mounting: F (Front Flange), Type: Standard, Bore Size: 63mm, Port Thread Type: F (Built-in One-touch Fittings), Stroke: 75mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in), Mounting: F (Front Flange), Type: Standard, Bore Size: 16mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 10mm, Body Option: FC (F+C), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: None, Mounting: F (Front Flange), Type: Standard, Bore Size: 40mm, Port Thread Type: F (Built-in One-touch Fittings), Stroke: 20mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: None, Mounting: F (Front Flange), Type: Standard, Bore Size: 32mm, Port Thread Type: F (Built-in One-touch Fittings), Stroke: 30mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: None, Mounting: F (Front Flange), Type: Standard, Bore Size: 25mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 25mm, Body Option: F (Rear Boss Mount)

Magnet: None, Mounting: F (Front Flange), Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 50mm, Body Option: F (Rear Boss Mount), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in), Mounting: F (Front Flange), Type: Standard, Bore Size: 50mm, Port Thread Type: TN (NPT 32-100 Bore), Stroke: 40mm, Body Option: FCM (F+C+M), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in), Mounting: F (Front Flange), Type: Standard, Bore Size: 20mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 20mm, Body Option: F (Rear Boss Mount), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in), Mounting: F (Front Flange), Type: H (Air-hydro), Bore Size: 40mm, Port Thread Type: TN (NPT 32-100 Bore), Stroke: 75mm, Body Option: FM (F+M), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: None, Auto Switch: M9PWV--Solid State, 2-color Indication, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: Z (5m)

Magnet: D (Built-in), Mounting: F (Front Flange), Type: Standard, Bore Size: 32mm, Port Thread Type: F (Built-in One-touch Fittings), Stroke: 75mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: None, Mounting: F (Front Flange), Type: Standard, Bore Size: 50mm, Port Thread Type: F (Built-in One-touch Fittings), Stroke: 100mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

WQ Edition B Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Bore Size: 25mm, Port Thread: Rc, Stroke: 75mm, Rod End Thread: F (Female Rod End), Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: M (1m)

Valve: None; Stop Valve: None, Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)